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    • 51. 发明申请
    • Beam direction module and optical switch using the same
    • 光束方向模块和光开关使用相同
    • US20050013534A1
    • 2005-01-20
    • US10890131
    • 2004-07-14
    • Atsushi KazamaKazuyuki FukudaToshiya ShiramatsuMasaya HorinoYasuhiro Itou
    • Atsushi KazamaKazuyuki FukudaToshiya ShiramatsuMasaya HorinoYasuhiro Itou
    • G02B6/26G02B6/32G02B6/35G02B26/08
    • G02B6/3556G02B6/32G02B6/3512G02B6/3544G02B6/357G02B6/3572G02B6/3578G02B6/3584
    • A beam direction module which can be applied to an optical switch, comprising: a collimator support member; a first mirror substrate including first micro-mirrors, and first windows through which beams can pass; a first electrode substrate including first mirror driving electrodes, and second windows through which beams can pass; a first spacer; a second mirror substrate including second micro-mirrors, and third windows through which beams can pass; a second electrode substrate including second mirror driving electrodes, and fourth windows through which beams can pass; a second spacer; and an inter-mirror spacer, wherein the first electrode substrate, the first spacer, the first mirror substrate, the inter-mirror spacer, the second mirror substrate, the second spacer and the second electrode substrate are stacked successively on the collimator support member and fixed between caps and the collimator support member while pins protruding from the collimator support member are inserted into alignment through-holes formed.
    • 可以应用于光开关的光束方向模块,包括:准直器支撑部件; 包括第一微反射镜的第一反射镜基板和光束能穿过的第一窗口; 第一电极基板,包括第一反射镜驱动电极和光束能通过的第二窗口; 第一间隔物 包括第二微反射镜的第二反射镜基板和光束能穿过的第三窗口; 第二电极基板,包括第二反射镜驱动电极和第四窗口,波束可以通过该第四窗口; 第二间隔物 以及反射镜间隔件,其中所述第一电极基板,所述第一间隔件,所述第一反射镜基板,所述反射镜间隔件,所述第二反射镜基板,所述第二间隔物和所述第二电极基板依次堆叠在所述准直器支撑部件上, 固定在盖和准直器支撑构件之间,而从准直器支撑构件突出的销插入形成的对准通孔中。