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    • 54. 发明授权
    • Substrate processing apparatus and substrate processing method
    • 基板加工装置及基板处理方法
    • US06769855B2
    • 2004-08-03
    • US10032528
    • 2001-12-27
    • Masayuki YokomoriOsamu Kuroda
    • Masayuki YokomoriOsamu Kuroda
    • B65G6500
    • H01L21/67781G06F9/4493Y10S414/138
    • A substrate processing apparatus (1) includes a wafer loading/unloading and arraying part (14) to remove substrates W from a container (C) where a plurality of unprocessed substrates W to be processed are accommodated at regular intervals, substrate arraying part (51a, 51b, 60) for arranging the substrates W having been removed from two containers (C) at the loading/unloading and arraying part (14) at pitches half the pitch to arrange the substrates in the container (C), a processing part (4) for applying a designated process on the substrates (W), a transfer mechanism (17) for transporting the substrates (W) arranged by the substrate array part (51a, 51b, 60) to the processing part (4) and a stand-by part (75) to allow the substrates arranged by the substrate array parts to stand in readiness temporarily.
    • 衬底处理装置(1)包括晶片装载/排出部分(14),用于从要容纳多个待处理的多个未处理衬底W的容器(C)移除衬底W,所述衬底W以规则的间隔被容纳,衬底排列部分(51a ,51b,60),用于将已经从加载/卸载和排列部分(14)两个容器(C)移除的基板W以间距的一半排列,以将基板布置在容器(C)中,处理部分 4),用于在基板(W)上施加指定的处理;传送机构(17),用于将由基板阵列部分(51a,51b,60)布置的基板(W)传送到处理部分(4) - 通过部分(75),以允许由衬底阵列部分布置的衬底临时立即准备就绪。
    • 56. 发明授权
    • Optical condenser system for light scanning apparatus
    • 光学扫描仪用光电聚光系统
    • US5774250A
    • 1998-06-30
    • US839156
    • 1997-04-23
    • Katsumi ShimadaOsamu Kuroda
    • Katsumi ShimadaOsamu Kuroda
    • G02B26/10G02B13/00G02B13/18G02B26/12G02B26/08
    • G02B26/125
    • An optical condenser system for a light scanning apparatus includes a first lens which is a single lens formed of plastic and a second lens which is a plano-convex lens formed of glass and convex toward the scanning surface. The first lens is concave toward a deflector of the light scanning apparatus and each side of the first lens is an aspheric surface defined by the following formula (6). The first and second lens satisfying the following formulae (1) to (5) 0.1f.ltoreq.d.sub.0 .ltoreq.0.3f (1) 0.02f.ltoreq.d.sub.2 .ltoreq.0.2f (2) -1.0.times.10.sup.2 /f.sup.3 .ltoreq.a.sub.1 .ltoreq.-1.0/f.sup.3( 3) 5.0.times.10/f.sup.5 .ltoreq.a.sub.2 .ltoreq.5.0.times.10.sup.3 /f.sup.5( 4) -0.3/f.ltoreq.1/f.sub.1 .ltoreq.0.3f (5) z=ch.sup.2 /�1+{1-(1+K)c.sup.2 h.sup.2}.sup.1/2 !+a.sub.1 h.sup.4 +a.sub.2 h.sup.6 +a.sub.3 h.sup.8 +a.sub.4 h.sup.10 ( 6) wherein f represents the focal length (mm) of the whole system, d.sub.0 represents the axial surface separation (mm) between the deflecting point at the deflector and the first lens, d.sub.2 represents the axial surface separation (mm) between the first lens and the second lens and f.sub.1 represents the focal length (mm) of the first lens.
    • 一种用于光扫描装置的光学聚光器系统包括:第一透镜,其是由塑料形成的单个透镜,第二透镜是由玻璃形成并且朝向扫描表面凸出的平凸透镜。 第一透镜对于光扫描装置的偏转器是凹形的,并且第一透镜的每一侧是由下式(6)限定的非球面。 满足以下公式(1)至(5)的第一和第二透镜0.1f