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    • 51. 发明专利
    • Plating apparatus and plating method
    • 电镀设备和电镀方法
    • JP2009249656A
    • 2009-10-29
    • JP2008096327
    • 2008-04-02
    • Mitsubishi Electric Corp三菱電機株式会社
    • TAKEMOTO YOHEIICHII TAKUYASUNAMOTO MASATOSHIFUJITA MINORU
    • C23C18/31H05K3/18H05K3/24
    • PROBLEM TO BE SOLVED: To provide a plating apparatus and a plating method for suppressing deposition of gold between wiring patterns without changing nickel plating liquid in a short period of time.
      SOLUTION: The plating apparatus 10 comprises a metallic plating tank 1 for storing the plating liquid 7, electrodes 2 to be immersed in the plating liquid 7, and a power supply unit 6. The lead wire 4 of a reference electrode and the lead wire 5 of a counter electrode which are connected to the power supply unit 6 respectively are connected to the plating tank 1, and the plating tank 1 is made an anode. The lead wire 3 of a sample electrode connected to the power supply unit 6 is connected to the electrode 2, and the electrode 2 is made a cathode. The potential difference between the plating tank 1 and the electrodes 2 is set to the natural polarization potential by the power supply unit 6.
      COPYRIGHT: (C)2010,JPO&INPIT
    • 要解决的问题:提供一种用于在短时间内不改变镀镍液体的情况下,在布线图案之间抑制金沉积的电镀设备和电镀方法。 电镀装置10包括用于储存电镀液7的金属镀槽1,浸在镀液7中的电极2和电源单元6.参考电极的引线4和 分别连接到电源单元6的对电极的引线5连接到电镀槽1,并且镀槽1被制成阳极。 连接到电源单元6的样品电极的引线3连接到电极2,并且电极2被制成阴极。 电镀槽1和电极2之间的电位差由电源单元6设定为自然极化电位。版权所有(C)2010,JPO&INPIT
    • 52. 发明专利
    • Electroless plating method
    • 电镀法
    • JP2009179845A
    • 2009-08-13
    • JP2008019240
    • 2008-01-30
    • Mitsubishi Electric Corp三菱電機株式会社
    • TAKEMOTO YOHEIICHII TAKUYASUNAMOTO MASATOSHIFUJITA MINORU
    • C23C18/44C23C18/18C23C18/36H05K3/18H05K3/24H05K3/26
    • PROBLEM TO BE SOLVED: To provide an electroless plating method which inhibits gold from abnormally depositing between wiring patterns in electroless plating, and consequently does not damage a desired wiring pattern. SOLUTION: The electroless plating method includes: an electroless nickel-plating step of forming an electroless nickel-plated film on the surface of a wiring pattern of a metal sintered compact, in a glass ceramic wiring substrate constituted by an insulative substrate made from glass ceramic and the wiring pattern of the metal sintered compact; a displacement-type electroless gold-plating step of forming a displacement-type electroless gold-plated film on the electroless nickel-plated film; and a reduction-type electroless gold-plating step of forming a reduction-type electroless gold-plated film on the displacement-type electroless gold-plated film; and further includes a glass etching step conducted in between the electroless nickel-plating step and the displacement-type electroless gold-plating step or in between the displacement-type electroless gold-plating step and the reduction-type electroless gold-plating step. COPYRIGHT: (C)2009,JPO&INPIT
    • 要解决的问题:提供一种化学镀方法,其抑制金在化学镀中的布线图案之间异常沉积,因此不会损坏所需的布线图案。 解决方案:化学镀方法包括:在由金属烧结体的布线图案的表面上形成无电解镀镍膜的无电镀镍步骤,在由绝缘基板制成的玻璃陶瓷布线基板中 来自玻璃陶瓷和金属烧结体的布线图案; 位移型无电镀金步骤,在化学镀镍膜上形成位移型无电镀金膜; 以及在位移型无电镀金膜上形成还原型无电镀金膜的还原型无电镀金工序; 并且还包括在无电镀镍步骤和位移型无电镀金步骤之间或在位移型无电镀金步骤和还原型无电镀金步骤之间进行的玻璃蚀刻步骤。 版权所有(C)2009,JPO&INPIT