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    • 57. 发明授权
    • Methods of forming and operating field effect transistors having gate and sub-gate electrodes
    • 形成和操作具有栅极和子栅电极的场效应晶体管的方法
    • US06680224B2
    • 2004-01-20
    • US10389846
    • 2003-03-17
    • Hyung-cheol ShinJong-ho LeeSang-yeon Han
    • Hyung-cheol ShinJong-ho LeeSang-yeon Han
    • H01L218234
    • H01L29/66643H01L21/2807H01L21/28105H01L29/1083H01L29/4983H01L29/7831H01L29/7836
    • Field effect transistors include a semiconductor substrate having a channel region of first conductivity type therein extending adjacent a surface thereof. Source and drain regions of second conductivity type are also provided at opposite ends of the channel region. The source and drain regions extend in the semiconductor substrate and form P-N rectifying junctions with the channel region. A gate electrode extends on the channel region and comprises a first electrically conductive material having a first work function. A first sub-gate electrode extends on the channel region and comprises a second electrically conductive material having a second work function that is unequal to the first work function. The second electrically conductive material is preferably selected so that a difference between the second work function and a work function of the channel region is sufficient to form an inversion-layer in a portion of the channel region extending opposite the first sub-gate electrode when the first sub-gate electrode is at a zero potential bias relative to the channel region.
    • 场效应晶体管包括其中具有第一导电类型的沟道区的半导体衬底,其在其表面附近延伸。 第二导电类型的源极和漏极区域也设置在沟道区域的相对端。 源区和漏区在半导体衬底中延伸并与沟道区形成P-N整流结。 栅电极在沟道区域上延伸并且包括具有第一功函数的第一导电材料。 第一子栅极电极在沟道区域上延伸并且包括具有不等于第一功函数的第二功函数的第二导电材料。 优选选择第二导电材料,使得第二功函数和沟道区的功函数之间的差足以在沟道区域的与第一子栅电极相对延伸的部分中形成反转层,当第 第一子栅极电极相对于沟道区域处于零电位偏置。
    • 58. 发明授权
    • Single transistor cell, method for manufacturing the same, memory circuit composed of single transistors cells, and method for driving the same
    • 单晶体管单元,其制造方法,由单晶体管单元构成的存储电路及其驱动方法
    • US06352864B1
    • 2002-03-05
    • US09624398
    • 2000-07-24
    • Jong-ho Lee
    • Jong-ho Lee
    • H01L2100
    • H01L29/6684G11C11/22G11C11/223H01L21/28291H01L29/78391
    • A semiconductor memory device, a method for manufacturing the same, a memory circuit including the semiconductor memory device, and a method for driving the same, are provided. In detail, one transistor forms a memory cell, and a single transistor cell capable of arbitrarily accessing the memory cell, a method for manufacturing the same, a memory circuit, and a method for driving the memory circuit, are provided. An island type semiconductor layer as an active region is formed on a ferroelectric layer. A word line crosses the semiconductor layer. A source is formed on the semiconductor layer on one side of the word line, and a drain is formed on the other side. A plate line is formed below the ferroelectric layer to face the word line, and intersects the word line. A drive line is connected to the source, and a bit line is connected to the drain.
    • 提供半导体存储器件,其制造方法,包括半导体存储器件的存储器电路及其驱动方法。 详细地说,提供了一个晶体管形成存储单元,以及能够任意访问存储单元的单个晶体管单元,其制造方法,存储器电路和用于驱动存储器电路的方法。 在铁电层上形成作为有源区的岛状半导体层。 字线穿过半导体层。 源极形成在字线一侧的半导体层上,另一侧形成漏极。 在铁电层下方形成面对字线的板线,并与字线相交。 驱动线连接到源极,位线连接到漏极。
    • 60. 发明授权
    • Nonvolatile semiconductor memory device, a method of fabricating the
same, and read, erase write methods of the same
    • 非易失性半导体存储器件,其制造方法以及其读取,擦除写入方法
    • US6046927A
    • 2000-04-04
    • US177569
    • 1998-10-23
    • Jong-ho LeeIn-Seon ParkCha-Young Yoo
    • Jong-ho LeeIn-Seon ParkCha-Young Yoo
    • H01L27/108G11C11/22H01L21/8242H01L21/8246H01L27/105
    • G11C11/22
    • A ferroelectric memory device includes a silicon-on-insulator substrate having a handling wafer, a first insulating layer, and a semiconductor layer. It also includes a first conductive layer used as a bit line formed in the first insulating layer, a source region formed in the semiconductor layer, a drain region formed in the semiconductor layer, a second insulating layer formed over the semiconductor layer between the source and drain regions, a second conductive layer for use as both a lower electrode and gate electrode, formed over the second insulating layer between the source and drain regions, a ferroelectric layer formed over the semiconductor layer, and a third conductive layer for use as an upper electrode formed over the ferroelectric layer. For reading, writing, and erasing, different voltages are applied to the upper electrode and the semiconductor layer between the drain and source. For writing, the upper electrode receives a writing voltage, and the semiconductor layer receives a ground voltage. This brings the drain and source to a floating state to either invert polarization of the ferroelectric layer or retain initial polarization, depending upon the data. For erasing, the upper electrode receives an erasing voltage, and the semiconductor layer receives a ground voltage. This brings the drain and source to a floating state. For reading, the upper electrode receives a reading voltage, and the semiconductor layer receives a ground voltage. A sensing current is then provided to the drain, and potential variation is sensed on the bit line.
    • 铁电存储器件包括具有处理晶片,第一绝缘层和半导体层的绝缘体上硅衬底。 它还包括用作形成在第一绝缘层中的位线的第一导电层,形成在半导体层中的源极区,形成在半导体层中的漏极区,在半导体层之间形成的第二绝缘层, 漏极区域,用作下电极和栅电极的第二导电层,形成在源区和漏区之间的第二绝缘层上,形成在半导体层上的铁电层,以及用作上层的第三导电层 形成在铁电层上的电极。 对于读取,写入和擦除,不同的电压施加到漏极和源极之间的上部电极和半导体层。 对于写入,上部电极接收写入电压,并且半导体层接收地电压。 这取决于数据,将漏极和源极引入浮置状态以反转铁电层的极化或保持初始极化。 为了擦除,上部电极接收擦除电压,半导体层接收接地电压。 这将使排水和源处于浮动状态。 为了读取,上部电极接收读取电压,半导体层接收接地电压。 然后将感测电流提供给漏极,并且在位线上感测到电位变化。