专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

51. 发明授权

US07457036B2 Front projection screens including reflective layer and an array of anamorphic microlenses 失效
标题翻译：前投影屏幕包括反射层和一组变形微透镜
公开(公告)号：US07457036B2
公开(公告)日：2008-11-25
申请号：US11948143
申请日：2007-11-30
申请人： Robert L. Wood
发明人： Robert L. Wood
IPC分类号： G03B21/60
CPC分类号： G03B21/602 , B29C39/006 , B29C39/026 , B29D11/00365 , B29L2011/0016 , B29L2011/0083 , G02B5/0205 , G02B5/0284 , G02B17/002 , G02B17/008 , G02B27/0961 , G02B27/0983
摘要： Projection screens include a substrate, a reflective layer on the substrate and a refractive layer on the substrate. The refractive layer includes an array of anamorphic microlenses.
摘要翻译：投影屏幕包括衬底，衬底上的反射层和衬底上的折射层。折射层包括变形微透镜阵列。

52. 发明授权

US07432788B2 Microelectromechanical magnetic switches having rotors that rotate into a recess in a substrate 有权
标题翻译：微电子机械磁开关具有旋转到衬底中的凹部中的转子
公开(公告)号：US07432788B2
公开(公告)日：2008-10-07
申请号：US10859633
申请日：2004-06-03
申请人： Konstantin Glukh , Robert L. Wood , Vivek Agrawal
发明人： Konstantin Glukh , Robert L. Wood , Vivek Agrawal
IPC分类号： H01H51/22
CPC分类号： H01H1/0036 , H01H36/00 , H01H2001/0042 , H01H2001/0047 , H01H2036/0093
摘要： A magnetic switch includes a substrate having a recess therein. A rotor or rotors are provided on the substrate. The rotor includes a tail portion that overlies the recess, and a head portion that extends on the substrate outside the recess. The rotor may be fabricated from ferromagnetic material, and is configured to rotate the tail in the recess in response to a changed magnetic field. First and second magnetic switch contacts also are provided that are configured to make or break electrical connection between one another in response to rotation of the tail in the recess, in response to the changed magnetic field. Related operation and fabrication methods also are described.
摘要翻译：磁开关包括其中具有凹部的基板。转子或转子设置在基板上。转子包括覆盖凹部的尾部和在凹部外部的衬底上延伸的头部。转子可以由铁磁材料制成，并且被配置为响应于改变的磁场而使凹部中的尾部旋转。第一和第二磁性开关触点还被设置成响应于改变的磁场而响应于凹部中的尾部的旋转而使彼此之间的电连接彼此形成或断开。还描述了相关操作和制造方法。

53. 发明授权

US07394594B2 Methods for processing a pulsed laser beam to create apertures through microlens arrays 失效
标题翻译：用于处理脉冲激光束以通过微透镜阵列产生孔的方法
公开(公告)号：US07394594B2
公开(公告)日：2008-07-01
申请号：US11382163
申请日：2006-05-08
申请人： Richard N. Gardner , Thomas A. Rinehart , Robert L. Wood
发明人： Richard N. Gardner , Thomas A. Rinehart , Robert L. Wood
IPC分类号： G02B27/10
CPC分类号： G02B3/0056 , G02B27/0927 , G02B27/0988
摘要： A pulsed laser beam is used to create apertures in a layer on a back side of a substrate that includes a microlens array on a front side thereof. The pulsed laser beam is focused in a vacuum spatial filter. A profile of the pulsed laser beam that emerges from the vacuum spatial filter is converted to a top hat profile. The laser beam having the top hat profile is diffused. Finally, the pulsed laser beam having the top half profile that has been diffused is impinged through the microlens array on the front side of the substrate and onto the layer on the back side of the substrate. Related apparatus for creating the apertures and microlens array products are also described.
摘要翻译：使用脉冲激光束在衬底的背面上的层中产生孔，该衬底的前侧包括微透镜阵列。脉冲激光束聚焦在真空空间滤光片中。将从真空空间滤波器出来的脉冲激光束的轮廓转换成顶帽型材。具有顶帽型材的激光束被扩散。最后，具有已经扩散的上半部分轮廓的脉冲激光束通过衬底正面上的微透镜阵列和衬底的背面上的层上。还描述了用于产生孔和微透镜阵列产品的相关装置。

54. 发明授权

US07332197B2 Methods of fabricating microneedle arrays using sacrificial molds, and microneedle arrays fabricated thereby 有权
标题翻译：使用牺牲模具制造微针阵列的方法和由此制造的微针阵列
公开(公告)号：US07332197B2
公开(公告)日：2008-02-19
申请号：US10304277
申请日：2002-11-26
申请人： Robert L. Wood , Henry A. Wynands , Karen W. Markus
发明人： Robert L. Wood , Henry A. Wynands , Karen W. Markus
IPC分类号： B05D7/22 , B05D1/36
CPC分类号： B81C99/0085 , A61B5/14514 , A61B5/150022 , A61B5/150282 , A61B5/150984 , A61M37/0015 , A61M2037/003 , A61M2037/0053 , B81B2201/055 , Y10T29/302 , Y10T29/49222
摘要： Microneedle arrays are fabricated by providing a sacrificial mold including a substrate and an array of posts, preferably solid posts, projecting therefrom. A first material is coated on the sacrificial mold including on the substrate and on the array of posts. The sacrificial mold is removed to provide an array of hollow tubes projecting from a base. The inner and outer surfaces of the array of hollow tubes are coated with a second material to create the array of microneedles projecting from the base. The sacrificial mold may be fabricated by fabricating a master mold, including an array of channels that extend into the master mold from a face thereof. A third material is molded into the channels and on the face of the master mold, to create the sacrificial mold. The sacrificial mold then is separated from the master mold. Alternatively, wire bonding may be used to wire bond an array of wires to a substrate to create the sacrificial mold. The first material preferably is coated on the sacrificial mold by plating. Prior to plating, a plating base preferably is formed on the sacrificial mold including on the substrate and on the array of posts. The inner and outer surfaces of the array of hollow tubes preferably are coated with the second material by overplating the second material on the inner and outer surfaces of the array of hollow tubes.
摘要翻译：微针阵列通过提供包括基底和从其突出的柱的阵列（优选固体柱）的牺牲模具来制造。第一材料涂覆在牺牲模具上，包括在基板上和柱阵列上。去除牺牲模具以提供从基部突出的中空管阵列。中空管阵列的内表面和外表面涂覆有第二材料以产生从基底突出的微针阵列。牺牲模具可以通过制造主模具来制造，该模具包括从其表面延伸到主模具中的通道阵列。将第三种材料模制到通道中并在母模的表面上，以形成牺牲模具。然后将牺牲模具与主模具分离。或者，引线接合可用于将线阵列引线接合到基底以产生牺牲模。第一种材料优选通过电镀涂覆在牺牲模具上。在电镀之前，优选在包括在基板和柱阵列上的牺牲模具上形成镀覆基底。优选地，中空管阵列的内表面和外表面通过在中空管阵列的内表面和外表面上的第二材料的上镀敷而涂覆有第二材料。

55. 发明授权

US07190387B2 Systems for fabricating optical microstructures using a cylindrical platform and a rastered radiation beam 有权
标题翻译：用于制造使用圆柱形平台和辐射辐射束的光学微结构的系统
公开(公告)号：US07190387B2
公开(公告)日：2007-03-13
申请号：US10661916
申请日：2003-09-11
申请人： Thomas A. Rinehart , Robert L. Wood , Robert P. Freese
发明人： Thomas A. Rinehart , Robert L. Wood , Robert P. Freese
IPC分类号： G03F7/20
CPC分类号： G02B3/0031 , G02B3/0012 , G02B3/0043 , G02B5/1857
摘要： Optical microstructures, such as microlenses, are fabricated by rotating a cylindrical platform that includes a radiation sensitive layer thereon, about its axis, while simultaneously axially rastering a laser beam across at least a portion of the radiation sensitive layer. The cylindrical platform is also simultaneously translated axially while it is being rotated. The amplitude of the laser beam is continuously varied while rastering. The optical microstructures that are imaged in the radiation sensitive layer can be developed to provide a master for replicating a microlenses.
摘要翻译：诸如微透镜的光学微结构通过围绕其轴线旋转包括辐射敏感层的圆柱形平台来制造，同时沿着辐射敏感层的至少一部分轴向地扫描激光束。圆柱形平台在旋转的同时也被轴向同时平移。激光束的幅度连续变化。可以开发在辐射敏感层中成像的光学微结构以提供用于复制微透镜的母版。

56. 发明授权

US06360539B1 Microelectromechanical actuators including driven arched beams for mechanical advantage 失效
标题翻译：微机电致动器包括驱动的拱形梁，用于机械优点
公开(公告)号：US06360539B1
公开(公告)日：2002-03-26
申请号：US09542672
申请日：2000-04-05
申请人： Edward A. Hill , Vijayakumar R. Dhuler , Allen B. Cowen , Ramaswamy Mahadevan , Robert L. Wood
发明人： Edward A. Hill , Vijayakumar R. Dhuler , Allen B. Cowen , Ramaswamy Mahadevan , Robert L. Wood
IPC分类号： F01B2910
CPC分类号： H01H1/0036 , H01H61/02 , H01H2061/006
摘要： Microelectromechanical actuators include a substrate, spaced apart supports on the substrate and a thermal arched beam that extends between the spaced apart supports and that further arches upon heating thereof, for movement along the substrate. One or more driven arched beams are coupled to the thermal arched beam. The end portions of the driven arched beams move relative to one another to change the arching of the driven arched beams in response to the further arching of the thermal arched beam, for movement of the driven arched beams. A driven arched beam also includes an actuated element at an intermediate portion thereof between the end portions, wherein a respective actuated element is mechanically coupled to the associated driven arched beam for movement therewith, and is mechanically decoupled from the remaining driven arched beams for movement independent thereof.
摘要翻译：微机电致动器包括衬底，衬底上的间隔开的支撑件和在间隔开的支撑件之间延伸的热拱形梁，并且在其加热时进一步拱形地沿着衬底运动。一个或多个被驱动的弓形梁联接到热拱形梁。被驱动的拱形梁的端部相对于彼此移动，以响应于热拱形梁的进一步拱形来改变被驱动的弓形梁的拱形，以便驱动的拱形梁的运动。被驱动的弓形梁还包括在其端部之间的中间部分处的致动元件，其中相应的致动元件机械地联接到相关联的被驱动的弓形梁以与其一起运动，并且与剩余的被驱动的弓形梁机械地分离以便独立运动其中。

57. 发明授权

US06324748B1 Method of fabricating a microelectro mechanical structure having an arched beam 有权
标题翻译：制造具有拱形梁的微电机械结构的方法
公开(公告)号：US06324748B1
公开(公告)日：2001-12-04
申请号：US09232941
申请日：1999-01-19
申请人： Vijayakumar R. Dhuler , Robert L. Wood , Ramaswamy Mahadevan
发明人： Vijayakumar R. Dhuler , Robert L. Wood , Ramaswamy Mahadevan
IPC分类号： H01H1100
CPC分类号： F16K99/0001 , B81B3/0024 , B81B3/0054 , B81B2201/031 , B81B2201/054 , B81B2203/0109 , B81B2203/051 , F03G7/06 , F15C5/00 , F16K99/0011 , F16K99/0034 , F16K99/0044 , F16K2099/0071 , F16K2099/0074 , F16K2099/008 , G02B6/3803 , G02B6/4226 , H01H1/0036 , H01H9/14 , H01H61/00 , H01H61/02 , H01H67/26 , H01H2001/0042 , H01H2001/0047 , H01H2001/0068 , H01H2061/006 , Y10T29/49105
摘要： A MEMS actuator is provided that produces significant forces and displacements while consuming a reasonable amount of power. The MEMS actuator includes a microelectronic substrate, spaced apart supports on the substrate and a metallic arched beam extending between the spaced apart supports. The MEMS actuator also includes a heater for heating the arched beam to cause further arching of the beam. In order to effectively transfer heat from the heater to the metallic arched beam, the metallic arched beam extends over and is spaced, albeit slightly, from the heater. As such, the MEMS actuator effectively converts the heat generated by the heater into mechanical motion of the metallic arched beam. A family of other MEMS devices, such as relays, switching arrays and valves, are also provided that include one or more MEMS actuators in order to take advantage of its efficient operating characteristics. In addition, a method of fabricating a MEMS actuator is further provided.
摘要翻译：提供了一种MEMS致动器，其在消耗合理的功率的同时产生显着的力和位移。 MEMS致动器包括微电子基板，在基板上的间隔开的支撑件和在间隔开的支撑件之间延伸的金属拱形梁。 MEMS致动器还包括用于加热拱形梁以进一步拱起梁的加热器。为了有效地将热量从加热器传递到金属拱形梁，金属拱形梁从加热器延伸过去并且稍微间隔开。因此，MEMS致动器有效地将由加热器产生的热量转换成金属拱形梁的机械运动。还提供了一系列其它MEMS器件，例如继电器，开关阵列和阀，其包括一个或多个MEMS致动器以便利用其有效的操作特性。此外，还提供了一种制造MEMS致动器的方法。

58. 发明授权

US06275320B1 MEMS variable optical attenuator 失效
标题翻译： MEMS可变光衰减器
公开(公告)号：US06275320B1
公开(公告)日：2001-08-14
申请号：US09405789
申请日：1999-09-27
申请人： Vijayakumar R. Dhuler , Edward A. Hill , Ramaswamy Mahadevan , Mark David Walters , Robert L. Wood
发明人： Vijayakumar R. Dhuler , Edward A. Hill , Ramaswamy Mahadevan , Mark David Walters , Robert L. Wood
IPC分类号： G02B2600
CPC分类号： G02B26/0841 , B81B3/0054 , B81B2201/038 , B81B2201/047 , G02B6/266
摘要： A MEMS (Micro Electro Mechanical System) variable optical attenuator is provided that is capable of optical attenuation over a full range of optical power. The MEMS variable optical attenuator comprises a microelectronic substrate, a MEMS actuator and an optical shutter. The MEMS variable optical attenuator may also comprise a clamping element capable of locking the optical shutter at a desired attenuation position. The variable light attenuator is capable of attenuating optical beams that have their optical axis running parallel and perpendicular to the substrate. Additionally, the MEMS actuator of the present invention may comprise an array of MEMS actuators capable of supplying the optical shutter with greater displacement distances and, thus a fuller range of optical attenuation. In one embodiment of the invention, the MEMS actuator comprises a thermal arched beam actuator. Additionally, the variable optical attenuator of the present invention may be embodied in a thermal bimorph cantilever structure. This alternate embodiment includes a microelectronic substrate and a thermal bimorph cantilever structure having at least two materials of different thermal coefficient of expansion. The thermal bimorph is responsive to thermal activation and moves in the direction of the material having the lower thermal coefficient expansion. Upon activation, the thermal bimorph intercepts the path of the optical beam and provides for the desired level of optical attenuation. The invention also provides for a method of optical attenuation and a method for fabricating an optical attenuator in accordance with the described structures.
摘要翻译：提供了一种能够在全光范围内进行光衰减的MEMS（微机电系统）可变光衰减器。 MEMS可变光衰减器包括微电子衬底，MEMS致动器和光学快门。 MEMS可变光衰减器还可以包括能够将光学快门锁定在期望的衰减位置的夹紧元件。可变光衰减器能够衰减其光轴平行且垂直于衬底的光束。另外，本发明的MEMS致动器可以包括MEMS致动器的阵列，其能够向光学快门提供更大的位移距离，并且因此具有更宽的光学衰减范围。在本发明的一个实施例中，MEMS致动器包括热拱形梁致动器。另外，本发明的可变光衰减器可以以热双压电晶片悬臂结构体现。该替代实施例包括具有不同热膨胀系数的至少两种材料的微电子衬底和热双压电晶片悬臂结构。热双压电晶体响应于热激活并沿具有较低热系数膨胀的材料的方向移动。在激活时，热双压电晶片截取光束的路径并提供所需的光衰减水平。本发明还提供了一种光衰减的方法以及根据所述结构制造光衰减器的方法。

59. 发明授权

US06114794A Thermal arched beam microelectromechanical valve 有权
标题翻译：热拱形梁微机电阀
公开(公告)号：US06114794A
公开(公告)日：2000-09-05
申请号：US232939
申请日：1999-01-19
申请人： Vijayakumar R. Dhuler , Robert L. Wood , Ramaswamy Mahadevan
发明人： Vijayakumar R. Dhuler , Robert L. Wood , Ramaswamy Mahadevan
IPC分类号： B81B3/00 , B81C1/00 , F03G7/06 , F15C5/00 , F16K99/00 , G02B6/38 , G02B6/42 , H01H1/00 , H01H9/14 , H01H61/00 , H01H61/02 , H01H65/00 , H01H67/26 , H04Q1/16 , H01L37/00 , H02N10/00
CPC分类号： F16K99/0001 , B81B3/0024 , B81B3/0054 , F03G7/06 , F15C5/00 , F16K99/0011 , F16K99/0044 , H01H1/0036 , H01H61/02 , B81B2201/031 , B81B2201/054 , B81B2203/0109 , B81B2203/051 , F16K2099/0071 , F16K2099/0074 , F16K2099/008 , F16K99/0034 , G02B6/3803 , G02B6/4226 , H01H2001/0042 , H01H2001/0047 , H01H2001/0068 , H01H2061/006 , H01H61/00 , H01H67/26 , H01H9/14 , Y10T29/49105
摘要： A MEMS actuator is provided that produces significant forces and displacements while consuming a reasonable amount of power. The MEMS actuator includes a microelectronic substrate, spaced apart supports on the substrate and a metallic arched beam extending between the spaced apart supports. The MEMS actuator also includes a heater for heating the arched beam to cause further arching of the beam. In order to effectively transfer heat from the heater to the metallic arched beam, the metallic arched beam extends over and is spaced, albeit slightly, from the heater. As such, the MEMS actuator effectively converts the heat generated by the heater into mechanical motion of the metallic arched beam. A family of other MEMS devices, such as relays, switching arrays and valves, are also provided that include one or more MEMS actuators in order to take advantage of its efficient operating characteristics. In addition, a method of fabricating a MEMS actuator is further provided.
摘要翻译：提供了一种MEMS致动器，其在消耗合理的功率的同时产生显着的力和位移。 MEMS致动器包括微电子基板，在基板上的间隔开的支撑件和在间隔开的支撑件之间延伸的金属拱形梁。 MEMS致动器还包括用于加热拱形梁以进一步拱起梁的加热器。为了有效地将热量从加热器传递到金属拱形梁，金属拱形梁从加热器延伸过去并且稍微间隔开。因此，MEMS致动器有效地将由加热器产生的热量转换成金属拱形梁的机械运动。还提供了一系列其它MEMS器件，例如继电器，开关阵列和阀，其包括一个或多个MEMS致动器以便利用其有效的操作特性。此外，还提供了一种制造MEMS致动器的方法。

60. 发明授权

US5554485A Mid and deep-UV antireflection coatings and methods for use thereof 失效
公开(公告)号：US5554485A
公开(公告)日：1996-09-10
申请号：US315271
申请日：1994-09-29
申请人： Robert R. Dichiara , James T. Fahey , Pamela E. Jones , Christopher F. Lyons , Wayne M. Moreau , Ratnam Sooriyakumaran , Gary T. Spinillo , Kevin M. Welsh , Robert L. Wood
发明人： Robert R. Dichiara , James T. Fahey , Pamela E. Jones , Christopher F. Lyons , Wayne M. Moreau , Ratnam Sooriyakumaran , Gary T. Spinillo , Kevin M. Welsh , Robert L. Wood
IPC分类号： G03F7/11 , G03F7/09 , H01L21/027 , H01L21/30 , G03C5/00
CPC分类号： G03F7/091 , Y10S522/904
摘要： An antireflective coating composition for use with chemically amplified photoresist compositions comprising a polymer composition which is highly absorbent to mid and deep UV radiation, which is substantially inert to contact reactions with a chemically amplified photoresist composition, and which is insoluble in the developer for the chemically amplified photoresist composition.

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式