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    • 56. 发明授权
    • Manufacturing system
    • 制造系统
    • US4544318A
    • 1985-10-01
    • US477895
    • 1983-03-23
    • Hiroto NagatomoHisashi MaejimaJun SuzukiKeishin Fujikawa
    • Hiroto NagatomoHisashi MaejimaJun SuzukiKeishin Fujikawa
    • B65G49/07H01L21/00H01L21/02H01L21/67H01L21/677H01L21/68B65G1/06
    • H01L21/67276H01L21/67724H01L21/67727H01L21/67736H01L21/67769Y10T29/5196
    • A manufacturing system in which the automatic control of the system and the automatic control of a process management are organically coupled, thereby to sharply reduce the number of workers to be engaged in the manufacture. In order to establish both the versatility necessary for multiple type of treatment and the high efficiency necessary for large-quantity treatments, the arrangement of respective treatment sections is made the job-shop-type, and the construction of treating devices themselves included in the treatment sections is made the flow-shop-type, to achieve the consecutive automation. In order to also automate the management of the process, a stocker in which unfinished products are put is situated in a specified place of the system such as the central part thereof, while the process is put forward in such a manner that a conveyor machine controlled by a control unit having a computer reciprocates between the stocker and the groups of treatment sections. The manufacturing system is suitable for the fabrication of semiconductor devices which have many kinds of articles where each kind of article needs to be mass-produced.
    • 其中系统的自动控制和过程管理的自动控制的制造系统被有机地耦合,从而大大减少了从事制造的工人的数量。 为了确定多种类型的治疗所需的通用性和大量治疗所需的高效率,各处理部的布置成为工作车间型,并且包括在处理中的处理装置本身的构造 部分采用流动车间式,实现连续自动化。 为了使过程的管理自动化,将未完成产品放置的储料器位于诸如其中央部分的系统的指定位置,同时以使输送机控制的方式提出该过程 通过具有计算机的控制单元在储盘器和处理区组之间往复运动。 该制造系统适合制造具有多种制品的半导体器件,每种制品需要大量生产。