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    • 52. 发明申请
    • Actuator and systems and methods
    • 执行器及系统及方法
    • US20060228069A1
    • 2006-10-12
    • US11094411
    • 2005-03-31
    • Peter GulvinJun MaPinyen Lin
    • Peter GulvinJun MaPinyen Lin
    • G02B6/26
    • B81B3/0024B81B2201/045
    • An actuator system that includes two beams that are formed into a diamond pattern. A crossbar is positioned at a midsection to connect the two beams. When power is applied to the two beams, the diamond pattern is driven vertically. An actuator system may also include a substrate and a first layer above a second layer on the substrate. The first and second layers include upper and lower beams joined together at one end of the layers. A method of forming an actuator system includes forming a first layer above a second layer on a substrate, joining the first and second layers together at one end of the layers, and forming upper and lower beams. The upper and lower beams may be different in width, length and thickness to control a vertical movement of the actuator system.
    • 一种致动器系统,包括形成为菱形图案的两个梁。 横梁位于中部以连接两个梁。 当向两个光束施加电力时,垂直驱动金刚石图案。 致动器系统还可以包括衬底和衬底上的第二层上方的第一层。 第一层和第二层包括在层的一端处连接在一起的上梁和下梁。 形成致动器系统的方法包括在衬底上形成第二层以上的第一层,在层的一端将第一层和第二层结合在一起,并形成上梁和下梁。 上梁和下梁的宽度,长度和厚度可以不同,以控制致动器系统的垂直运动。
    • 56. 发明申请
    • Cantilever beam MEMS variable optical attenuator
    • 悬臂梁MEMS可变光衰减器
    • US20060127029A1
    • 2006-06-15
    • US11010769
    • 2004-12-13
    • Pinyen LinYao WangJun MaXueyuan LiuPeter GulvinKristine GermanJoel Kubby
    • Pinyen LinYao WangJun MaXueyuan LiuPeter GulvinKristine GermanJoel Kubby
    • G02B6/00
    • G02B6/3508G02B6/266G02B6/3566G02B6/357G02B6/358G02B6/3594G02B6/3596
    • An improved cantilever beam optical switch design which provides the function of a variable optical attenuator (VOA). A small degree of intentional misalignment of the waveguide will create different levels of optical attenuation. By finely controlling the misalignment of a selected switched position, a single device may be realized that will provide the functions of both switching and attenuating or just attenuation alone. The optical MEMS device utilizes a latching mechanism in association with a thermal drive actuator for aligning a cantilever beam platform. The integration of the switching function and the VOA function reduce the optical loss which is otherwise unavoidable when the inevitable alterative of a separate switch and a separate VOA must necessarily be employed. The resultant improved device can also be applied for correcting the difference in optical intensity created by the manufacturing tolerances inherent in the fabrication of array waveguide gratings.
    • 改进的悬臂光束开关设计,提供可变光衰减器(VOA)的功能。 波导的有意的不对准会导致不同程度的光衰减。 通过精细地控制所选择的切换位置的未对准,可以实现单个设备,其将提供单独切换和衰减或仅仅衰减的功能。 光学MEMS器件利用与用于对准悬臂梁平台的热驱动致动器相关联的闩锁机构。 开关功能和VOA功能的集成减少了当必须采用单独的开关和单独的VOA的不可避免的替代时否则不可避免的光损耗。 所得到的改进的器件还可以用于校正由阵列波导光栅的制造中固有的制造公差产生的光强差。
    • 59. 发明授权
    • Bistable microelectromechanical system based structures, systems and methods
    • 双稳态微机电系统的结构,系统和方法
    • US06828887B2
    • 2004-12-07
    • US10063762
    • 2002-05-10
    • Joel A. KubbyFuqian YangJun MaKristine A. GermanPeter M. Gulvin
    • Joel A. KubbyFuqian YangJun MaKristine A. GermanPeter M. Gulvin
    • H01H5122
    • G02B6/3508B81B3/0054B81B2201/032G02B6/3546G02B6/3568G02B6/3582G02B6/3596H01H2001/0042
    • A bistable microelectromechanical system (MEMS) based system comprises a micromachined beam having a first stable state, in which the beam is substantially stress-free and has a specified non-linear shape, and a second stable state. The curved shape may comprises a simple curve or a compound curve. In embodiments, the boundary conditions for the beam are fixed boundary conditions, bearing boundary conditions, spring boundary conditions, or a combination thereof. The system may further comprise an actuator arranged to move the beam between the first and second stable states and a movable element that is moved between a first position and a second position in accordance with the movement of the beam between the first and second stable states. The actuator may comprise one of a thermal actuator, an electrostatic actuator, a piezoelectric actuator and a magnetic actuator. The actuator may further comprise a thermal impact actuator or a zippering electrostatic actuator.
    • 基于双稳态微机电系统(MEMS)的系统包括具有第一稳定状态的微加工梁,其中梁基本上无应力且具有特定的非线性形状和第二稳定状态。 弯曲形状可以包括简单曲线或复合曲线。 在实施例中,梁的边界条件是固定的边界条件,轴承边界条件,弹簧边界条件或其组合。 系统还可以包括致动器,其被布置成在第一和第二稳定状态之间移动梁,以及根据梁在第一和第二稳定状态之间的移动而在第一位置和第二位置之间移动的可动元件。 致动器可以包括热致动器,静电致动器,压电致动器和磁致动器中的一个。 致动器还可以包括热冲击致动器或拉链静电致动器。
    • 60. 发明授权
    • Water treatment method by catalyzing ozone with a persulfate
    • 用过硫酸盐催化臭氧的水处理方法
    • US09169141B2
    • 2015-10-27
    • US14118660
    • 2012-05-15
    • Jun MaJin JiangSuyan PangYi YangJuntao Zhu
    • Jun MaJin JiangSuyan PangYi YangJuntao Zhu
    • C02F1/72C02F1/78
    • C02F1/722C02F1/725C02F1/78
    • A water treatment method by catalyzing ozone with a persulfate comprises the following steps: introducing the ozone into an ozone contact reactor filled with water to be treated; at the same time putting the persulfate into the reactor, wherein a stirring state is kept in the water treatment process. The method solves the problems of difficulty in the ionization of hydrogen peroxide, low capability in inducing the decomposition of the ozone, high hydrogen peroxide residues and inconvenience of hydrogen peroxide transportation and storage existing in the conventional water treatment method for catalyzing the ozone by using the hydrogen peroxide. Hydroxyl radicals and sulfate free radicals with strong oxidizing properties, which are generated by catalyzing ozone with the persulfate, are oxidized to remove pollution, so that the method has the advantages of high catalytic capability, high oxidative degradation efficiency, wide pH application range, a small amount of catalyst residues, convenience of operation and the like, and can be applied in mass production.
    • 通过用过硫酸盐催化臭氧的水处理方法包括以下步骤:将臭氧引入填充有待处理水的臭氧接触反应器中; 同时将过硫酸盐放入反应器中,其中在水处理过程中保持搅拌状态。 该方法解决了常规水处理方法中存在的过氧化氢离子化难以引起臭氧分解能力低,过氧化氢残留量高,过氧化氢运输和储存不便等问题。 过氧化氢。 通过催化臭氧与过硫酸盐生成的具有强氧化性质的羟基和硫酸根自由基被氧化以除去污染物,因此该方法具有催化能力高,氧化降解效率高,pH适用范围广, 催化剂残渣少,操作方便等优点,可以批量生产。