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    • 51. 发明申请
    • Microfactory comb capacitive accelerometer
    • 微电容式电容式加速度计
    • US20070012110A1
    • 2007-01-18
    • US11305200
    • 2005-12-19
    • Philippe Robert
    • Philippe Robert
    • G01P15/125H01L21/467
    • G01P15/125B81B3/007B81B2201/0235B81B2203/0136G01P15/0802
    • A comb capacitive accelerometer comprising a substrate (5), a mobile electrode (2) relative to said substrate (5) fitted with an ensemble of mobile fingers (7), an electrode (4) fixed relative to said substrate (5) fitted with an ensemble of fixed fingers (8A, 8B), each of said mobile fingers (7) being positioned between two contiguous fixed fingers (8A, 8B) so as to form a microstructure with interdigital combs. According to the invention the mobile fingers (7) are connected to one another by at least a first connecting beam (20) etched directly into the substrate (5), and/or the fixed fingers (8A, 8B) are connected to one another by at least a second connecting beam (22) etched directly in the substrate (5).
    • 一种梳状电容式加速度计,包括:衬底(5),相对于所述衬底(5)的移动电极(2),所述衬底(5)装配有可移动指状物(7)的组合;相对于所述衬底(5)固定的电极(4) 固定指状物(8A,8B)的组合,每个所述可移动指状物(7)位于两个相邻的固定指状物(8A,8B)之间,以便形成具有叉指式梳状物的微结构。 根据本发明,移动手指(7)通过直接蚀刻到基底(5)中的至少一个第一连接梁(20)彼此连接,和/或固定指(8A,8B)连接到 通过至少第二连接光束(22)彼此直接蚀刻在基板(5)中。
    • 53. 发明授权
    • Device for displaying the core of an optical fiber
    • 用于显示光纤纤芯的装置
    • US5253034A
    • 1993-10-12
    • US849185
    • 1992-03-11
    • Roland HakounPhilippe RobertMichel ReslingerJoan Galopin
    • Roland HakounPhilippe RobertMichel ReslingerJoan Galopin
    • G02B6/255G01N21/84G01B11/12
    • G02B6/2551
    • A device for displaying the core (C) of an optical fiber (F) in two directions that are transverse to the fiber (F) includes two light sources illuminating the fiber. Each source emits a beam of light. The beams have different directions D.sub.1 and D.sub.2. The directions lie in a plane that is orthogonal to the longitudinal axis (X) of the fiber (F). An objective lens (L.sub.3, L.sub.4), reception and display components (2, 3) are employed and receive and display images of the fiber (F) produced by the beams. The objective lens is focused in a plane (P) that intercepts the beams from the fiber (F) inside the fiber (F). The angle (.alpha..sub.1, .alpha..sub.2) between either of the directions (D.sub.1, D.sub.2) and the focal axis (Y) of the objective lens (L.sub.3, L.sub.4) is such that the objective lens (L.sub.3, L.sub.4) directly receives the two beams from the fiber (F) with sufficient light intensity to enable the display component to operate.
    • 用于在横向于光纤(F)的两个方向上显示光纤(F)的芯(C)的装置包括照射光纤的两个光源。 每个源发出一束光。 梁具有不同的方向D1和D2。 方向位于与纤维(F)的纵轴(X)正交的平面中。 使用物镜(L3,L4),接收和显示部件(2,3),并接收和显示由光束产生的光纤(F)的图像。 物镜聚焦在从光纤(F)内部的光纤(F)截取光束的平面(P)中。 物镜(L3,L4)的方向(D1,D2)和焦点轴(Y)之间的角度(α1,α2)使得物镜(L3,L4)直接接收两个 来自光纤(F)的光束具有足够的光强度,以使显示部件能够工作。
    • 54. 发明授权
    • Absolute position detector for an apparatus for measuring linear angular
values
    • 用于测量线性角度值的装置的绝对位置检测器
    • US5235181A
    • 1993-08-10
    • US804769
    • 1991-12-09
    • Miroslav DuranaRoland GallayPhilippe Robert
    • Miroslav DuranaRoland GallayPhilippe Robert
    • G01D5/36
    • G01D5/36
    • The detector comprises an optoelectronic sensing unit (3) and a transparent rule (2) having two parallel graduation tracks (4, 5). One track (5) has incremental graduation of constant step and the other track (4) has pseudo-random graduation forming binary coding bits constituting a continuous sequence of words which are different from each other, the width of a bit being a function of the step of the incremental graduation. The incremental track (5) is read through a sensing graticule (9) by photodetectors (8) which are 90 electrical degrees out of phase in order to permit an interpolation in the step of said track. The track (4) with pseudo-random graduation is read by a CCD detector (11) through an image-enlarging lens (13). The signals generated are processed by circuits (15a, 15b) which assure the combining of the information taken from the two tracks of the rule.
    • 检测器包括光电感测单元(3)和具有两个平行的刻度轨道(4,5)的透明规则(2)。 一个轨道(5)具有恒定步长的递增刻度,另一个轨迹(4)具有构成彼此不同的连续字序列的伪随机分级形成二进制编码位,位的宽度是 递增毕业的一步。 通过光电探测器(8)通过感测刻度(9)读取增量轨迹(5),该光电探测器(8)相差90°,以便允许在所述轨道的步骤中进行内插。 具有伪随机刻度的轨道(4)由CCD检测器(11)通过图像放大透镜(13)读取。 产生的信号由电路(15a,15b)处理,确保从规则的两条轨道获得的信息的组合。
    • 55. 发明授权
    • MEMS-type pressure pulse generator
    • MEMS型压力脉冲发生器
    • US08818007B2
    • 2014-08-26
    • US13184858
    • 2011-07-18
    • Philippe Robert
    • Philippe Robert
    • H04R25/00H04R31/00H04R19/00H04R17/00B06B1/02H04R23/00G10K15/04H04R1/00
    • H04R19/005B06B1/0292H04R1/005H04R17/00H04R23/002H04R31/00H04R2201/003H04R2400/00
    • A device and method for generating or recovering acoustic energy are provided, including a substrate; at least one deformable cavity disposed in the substrate and being delimited by at least one mobile or deformable wall, the at least one deformable cavity extending in a lateral direction in the substrate defined by a first plane parallel to an upper surface of the substrate; at least one opening disposed in an upper portion of the at least one deformable cavity, configured to transmit at least one pulse produced in the at least one deformable cavity to an ambient atmosphere, the at least one pulse being a pressure pulse, a depression pulse, a partial vacuum pulse, or a combination thereof; and at least one actuator configured to generate a force in the first plane that displaces or deforms, or displaces and deforms, the at least one mobile or deformable wall.
    • 提供了一种用于产生或恢复声能的装置和方法,包括基底; 所述至少一个可变形空腔设置在所述基板中并且由至少一个可移动或可变形壁限定,所述至少一个可变形空腔在由所述基板的上表面平行的第一平面限定的所述基板中沿横向方向延伸; 设置在所述至少一个可变形空腔的上部中的至少一个开口,其被配置成将在所述至少一个可变形空腔中产生的至少一个脉冲传送到环境大气,所述至少一个脉冲是压力脉冲, ,部分真空脉冲或其组合; 以及至少一个致动器,其构造成在所述第一平面中产生使所述至少一个移动或可变形壁发生位移或变形或移位和变形的力。
    • 57. 发明授权
    • Inertial or resonating sensor in surface technology, with out of plane detection by strain gauge
    • 表面技术中的惯性传感器或谐振传感器,通过应变仪进行平面外检测
    • US08371166B2
    • 2013-02-12
    • US12692051
    • 2010-01-22
    • Philippe Robert
    • Philippe Robert
    • G01P15/10G01C19/56
    • G01P15/097G01C19/5656G01C19/5769G01P15/0802
    • A MEMS surface sensor, including: a substrate, a surface of which defines a substrate plane; a first zone having a first thickness, of which two surfaces form a first plane and a second plane parallel in relation to one another and to the substrate plane, first zone forming at least one mobile mass that moves in a direction out of the substrate plane; and a second zone, linked to a fixed zone of the substrate, the second zone forming at least a pivot link of the mobile mass in relation to said substrate, and having a thickness less or equal to that of the mobile mass and being linked to the mobile mass, an axis of the pivot link being between the first plane and the second plane, and parallel to the first plane and the second plane.
    • 一种MEMS表面传感器,包括:衬底,其表面限定衬底平面; 第一区域,其具有第一厚度,其中两个表面形成第一平面和相对于彼此平行的第二平面和基板平面,第一区域形成至少一个在离开基板平面的方向移动的移动质量块 ; 以及连接到所述基底的固定区域的第二区域,所述第二区域相对于所述基底形成所述移动块体的至少枢轴连杆,并且具有小于或等于所述移动块体的厚度并且与 所述移动质量块,所述枢轴连杆的轴线在所述第一平面和所述第二平面之间,并且平行于所述第一平面和所述第二平面。