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    • 55. 发明申请
    • Method for manufacturing bonded wafer
    • 贴合晶圆的制造方法
    • US20090111245A1
    • 2009-04-30
    • US11921081
    • 2006-05-18
    • Keiichi OkabeSusumu Miyazaki
    • Keiichi OkabeSusumu Miyazaki
    • H01L21/302H01L21/02
    • H01L21/76256
    • The present invention provides a method for manufacturing a bonded wafer comprising steps of forming an oxide film on at least a surface of a base wafer or a surface of a bond wafer; bringing the base wafer and the bond wafer into close contact via the oxide film; subjecting these wafers to a heat treatment under an oxidizing atmosphere to bond the wafers together; grinding and removing the outer periphery of the bond wafer so that the outer periphery has a predetermined thickness; subsequently removing an unbonded portion of the outer periphery of the bond wafer by etching; and then thinning the bond wafer so that the bond wafer has a desired thickness, wherein the etching is conducted by using a mixed acid at 30° C. or less at least comprising hydrofluoric acid, nitric acid, and acetic acid. Thus there is provided a method for manufacturing a bonded wafer by which unbonded portions of the outer periphery of the bond wafer are removed with a high selectivity ratio (RSi/RSiO2) without causing metallic contamination.
    • 本发明提供了一种用于制造接合晶片的方法,包括以下步骤:在基底晶片或接合晶片的表面的至少一个表面上形成氧化膜; 使基底晶片和接合晶片经由氧化膜紧密接触; 在氧化气氛下对这些晶片进行热处理以将晶片粘合在一起; 研磨和去除接合晶片的外周,使得外周具有预定厚度; 随后通过蚀刻去除接合晶片的外周的未结合部分; 然后使接合晶片变薄,使得接合晶片具有期望的厚度,其中通过使用至少包含氢氟酸,硝酸和乙酸的30℃或更低的混合酸来进行蚀刻。 因此,提供了一种制造接合晶片的方法,通过该方法,以高选择率(RSi / RSiO2)除去接合晶片的外周的未结合部分而不引起金属污染。
    • 56. 发明申请
    • Legged Mobile Robot
    • 有腿的移动机器人
    • US20070273320A1
    • 2007-11-29
    • US11578180
    • 2005-02-18
    • Makoto ShishidoSusumu MiyazakiHiroyuki Kaneko
    • Makoto ShishidoSusumu MiyazakiHiroyuki Kaneko
    • B25J9/00
    • B25J19/0091
    • In a legged mobile robot having a body and legs connected to the body, a seating aid is provided at its body so as to enable to sit on a seat. With this, the space occupied by the robot can be decreased to reduce space during storage and transport, and also enhance safety in the course of transport. In addition, maintenance work is simplified because immobilization in the seated condition is possible. Still further, the range of works is expanded to enable deskwork and the like. Further, the seating aid is provided at a location that is rearward of a center of gravity of the robot when the robot is seated. With this, the moment acting on the robot about the center of gravity during seating does not operate to tilt the robot rearward and, therefore, the robot can be enabled to keep a stable posture from before to after sitting down.
    • 在具有连接到身体的身体和腿部的腿式移动机器人中,在其身体处设置座椅辅助件,以便能够坐在座椅上。 由此,可以减少机器人占用的空间,以减少储存和运输过程中的空间,并提高运输过程中的安全性。 另外,维护工作简化了,因为固定在就座状态是可能的。 此外,扩展了作品的范围以实现书桌等。 此外,当机器人就座时,座椅辅助装置设置在机器人的重心后方的位置。 因此,在座椅期间作用于机器人关于重心的时刻不会使机器人向后倾斜,因此机器人能够在坐下之后保持稳定的姿势。
    • 57. 发明申请
    • Legged mobile robot and control system thereof
    • 有腿的移动机器人及其控制系统
    • US20070193789A1
    • 2007-08-23
    • US10593493
    • 2005-02-18
    • Toru TakenakaHiroshi GomiSusumu MiyazakiKazushi Hamaya
    • Toru TakenakaHiroshi GomiSusumu MiyazakiKazushi Hamaya
    • B62D51/06
    • B25J19/0091
    • The legged mobile robot the foot comprises a foot main body connected to each leg, a toe provided at a fore end of the foot main body to be bendable with respect to the foot main body, and a bending angle holder capable of holding a bending angle of the toe in a bendable range of the toe. In addition, a legged mobile robot control system is configured to hold the bending angle of the toe at a first time point which is a liftoff time of the leg from a floor or earlier thereof, and to release the bending angle at a second time point after the leg has lifted off the floor to restore the toe to a initial position. With this, the bending angle at the time of liftoff can continue to be held after liftoff, whereby the robot can be prevented from becoming unstable owing to the toe contacting the floor immediately after liftoff. In addition, stability during tiptoe standing can be enhanced.
    • 腿式移动机器人脚包括连接到每个腿的脚本体,设置在脚主体的前端以相对于脚本体可弯曲的脚趾以及能够保持弯曲角度的弯曲角保持器 的脚趾在脚趾的可弯曲范围内。 此外,有腿的移动机器人控制系统被配置为在脚踏板的起始时间的第一时间点保持脚趾的弯曲角度,该第一时间点是从地板或更早的腿部起飞时间,并且在第二时间点释放弯曲角度 腿后抬起地板将脚趾恢复到初始位置。 由此,脱扣后的弯曲角度可以继续保持,由此能够防止机器人由于在起飞后立即接触地板而变得不稳定。 此外,可以提高脚尖站立时的稳定性。