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51. 发明授权

US06516785B1 Air flow sensor 有权
标题翻译：气流传感器
公开(公告)号：US06516785B1
公开(公告)日：2003-02-11
申请号：US09763967
申请日：2001-02-28
申请人： Keiichi Nakada , Izumi Watanabe , Hiroshi Yoneda , Kei Ueyama , Masamichi Yamada
发明人： Keiichi Nakada , Izumi Watanabe , Hiroshi Yoneda , Kei Ueyama , Masamichi Yamada
IPC分类号： G01F1692
CPC分类号： G01F1/684 , F02D41/187 , G01F1/6842 , G01F1/6845 , G01F1/692 , G01F1/698 , G01F5/00 , H01L2224/48091 , H01L2224/8592 , H01L2924/19105 , H01L2924/00014
摘要： In a thermal air flow sensor, an air flow measuring element and an intake air temperature sensing element of an intake air temperature sensor are mounted on a single support member so as to be positioned within an intake passage. The support member is made of a glass-ceramic material for example and is held by a holder secured to the wall of an intake pipe. The support member has a structure whereby both sides of a portion of the support member located on the side away from the intake pipe wall are easy to be taken away their heat by an air flow moving through the intake pipe. The air flow measuring element and the intake air temperature sensing element are disposed on such a heat-removed surface of the support member and are electrically connected respectively to conductors disposed on the support member, with their electric connections being sealed with resin, whereby the intake air temperature sensor and the air flow sensor can be rendered integral with each other.
摘要翻译：在热空气流量传感器中，进气温度传感器的气流测量元件和进气温度感测元件安装在单个支撑构件上，以便定位在进气通道内。支撑构件例如由玻璃陶瓷材料制成，并由固定在进气管壁上的保持架保持。支撑构件具有这样的结构，其中位于远离进气管壁的一侧的支撑构件的一部分的两侧容易被移动通过进气管的气流带走其热量。气流测量元件和进气温度感测元件设置在支撑构件的这种除热表面上，并且分别电连接到设置在支撑构件上的导体，其电连接用树脂密封，由此进气空气温度传感器和空气流量传感器可以彼此成为一体。

52. 发明授权

US07181962B2 Thermal flow sensor 有权
标题翻译：热流量传感器
公开(公告)号：US07181962B2
公开(公告)日：2007-02-27
申请号：US10546174
申请日：2004-05-26
申请人： Masamichi Yamada , Izumi Watanabe , Keiichi Nakada , Junichi Horie
发明人： Masamichi Yamada , Izumi Watanabe , Keiichi Nakada , Junichi Horie
IPC分类号： G01F1/68
CPC分类号： G01F1/6845 , G01F1/698
摘要： A thermal flow sensor which is fabricated at a low cost and has improved reliability. Over a cavity (7) formed in a semiconductor substrate (2), at least a heating resistance (4) is formed near the center of the cavity with an electrical insulation film interposed between the heating resistance and the cavity. The temperature (Th) of the heating resistance (4) is controlled to be higher than the medium temperature (Ta) by a constant temperature (ΔTh=Th−Ta). A distance (Ws) in the direction of airflow from an upstream end of the heating resistance (4) to an upstream end of the electrical insulation film lying over the cavity and the constant temperature (ΔTh) satisfy the following relationship: ΔTh/Ws≦800 (° C./mm) Thus, a thermal flow sensor is provided which can prevent deposition of floating fine particles, such as carbon particles, caused by the thermophoretic effect, can be fabricated at a low cost, and has high reliability.
摘要翻译：一种以低成本制造并具有改进的可靠性的热流传感器。在形成在半导体衬底（2）中的空腔（7）上，在腔的中心附近形成至少一个加热电阻（4），其中电绝缘膜置于加热电阻和空腔之间。加热电阻（4）的温度（Th）被控制为高于介质温度（Ta）恒温（DeltaTh = Th-Ta）。从加热电阻（4）的上游端到位于空腔上的电绝缘膜的上游端和恒温（DeltaTh）的气流方向的距离（Ws）满足以下关系： line-formula description =“In-line Formulas”end =“lead”？> DeltaTh / Ws <= 800（°C./mm)

53. 发明授权

US07650784B2 Thermal type flow rate measuring apparatus 有权
标题翻译：热式流量测量仪
公开(公告)号：US07650784B2
公开(公告)日：2010-01-26
申请号：US12139761
申请日：2008-06-16
申请人： Izumi Watanabe , Junichi Horie , Keiichi Nakada , Kei Ueyama , Masamichi Yamada
发明人： Izumi Watanabe , Junichi Horie , Keiichi Nakada , Kei Ueyama , Masamichi Yamada
IPC分类号： G01F1/68
CPC分类号： G01F1/6845 , G01F1/6842 , G01F1/692 , G01F1/698 , G01F1/699
摘要： A flow rate sensor has a problem that a resistance value of a heat generating resistor itself varies and sensor characteristics are changed during use of the sensor for a long term. Also, the temperature of the heat generating resistor must be adjusted on a circuit substrate with a resistance constituting one side of a fixed temperature difference control circuit, and this has been one of factors pushing up the production cost. All resistances used for fixed temperature difference control are formed on the same substrate as temperature sensitive resistors of the same material. This enables all the resistances for the fixed temperature difference control to be exposed to the same environmental conditions. Hence, even when the resistances change over time, the changes over time occur substantially at the same tendency. Since the resistances for the fixed temperature difference control change over time essentially at the same rate, a resulting output error is very small.
摘要翻译：流量传感器具有长期使用传感器时发热电阻器本身的电阻值变化，传感器特性变化的问题。此外，发热电阻器的温度必须在构成固定温度差控制电路的一侧的电阻的电路基板上进行调整，这是提高生产成本的因素之一。用于固定温差控制的所有电阻都与相同材料的感温电阻器形成在同一基板上。这使得固定温差控制的所有电阻能够暴露在相同的环境条件下。因此，即使电阻随着时间的推移而变化，随着时间的推移发生大体上同样的变化。由于固定温差控制的电阻基本上以相同的速率变化，所以产生的输出误差非常小。

54. 发明申请

US20080250856A1 THERMAL TYPE FLOW RATE MEASURING APPARATUS 有权
标题翻译：热式流量测量装置
公开(公告)号：US20080250856A1
公开(公告)日：2008-10-16
申请号：US12139761
申请日：2008-06-16
申请人： Izumi WATANABE , Junichi Horie , Keiichi Nakada , Kei Ueyama , Masamichi Yamada
发明人： Izumi WATANABE , Junichi Horie , Keiichi Nakada , Kei Ueyama , Masamichi Yamada
IPC分类号： G01F1/68
CPC分类号： G01F1/6845 , G01F1/6842 , G01F1/692 , G01F1/698 , G01F1/699
摘要： A flow rate sensor has a problem that a resistance value of a heat generating resistor itself varies and sensor characteristics are changed during use of the sensor for a long term. Also, the temperature of the heat generating resistor must be adjusted on a circuit substrate with a resistance constituting one side of a fixed temperature difference control circuit, and this has been one of factors pushing up the production cost. All resistances used for fixed temperature difference control are formed on the same substrate as temperature sensitive resistors of the same material. This enables all the resistances for the fixed temperature difference control to be exposed to the same environmental conditions. Hence, even when the resistances change over time, the changes over time occur substantially at the same tendency. Since the resistances for the fixed temperature difference control change over time essentially at the same rate, a resulting output error is very small.
摘要翻译：流量传感器具有长期使用传感器时发热电阻器本身的电阻值变化，传感器特性变化的问题。此外，发热电阻器的温度必须在构成固定温度差控制电路的一侧的电阻的电路基板上进行调整，这是提高生产成本的因素之一。用于固定温差控制的所有电阻都与相同材料的感温电阻器形成在同一基板上。这使得固定温差控制的所有电阻能够暴露在相同的环境条件下。因此，即使电阻随着时间的推移而变化，随着时间的推移发生大体上同样的变化。由于固定温差控制的电阻基本上以相同的速率变化，所以产生的输出误差非常小。

55. 发明申请

US20060272403A1 Thermal type flow rate measuring apparatus 有权
标题翻译：热式流量测量仪
公开(公告)号：US20060272403A1
公开(公告)日：2006-12-07
申请号：US11505987
申请日：2006-08-18
申请人： Izumi Watanabe , Junichi Horie , Keiichi Nakada , Kei Ueyama , Masamichi Yamada
发明人： Izumi Watanabe , Junichi Horie , Keiichi Nakada , Kei Ueyama , Masamichi Yamada
IPC分类号： G01F1/68
CPC分类号： G01F1/6845 , G01F1/6842 , G01F1/692 , G01F1/698 , G01F1/699
摘要： A flow rate sensor has a problem that a resistance value of a heat generating resistor itself varies and sensor characteristics are changed during use of the sensor for a long term. Also, the temperature of the heat generating resistor must be adjusted on a circuit substrate with a resistance constituting one side of a fixed temperature difference control circuit, and this has been one of factors pushing up the production cost. All resistances used for fixed temperature difference control are formed on the same substrate as temperature sensitive resistors of the same material. This enables all the resistances for the fixed temperature difference control to be exposed to the same environmental conditions. Hence, even when the resistances change over time, the changes over time occur substantially at the same tendency. Since the resistances for the fixed temperature difference control change over time essentially at the same rate, a resulting output error is very small.
摘要翻译：流量传感器具有长期使用传感器时发热电阻器本身的电阻值变化，传感器特性变化的问题。此外，发热电阻器的温度必须在构成固定温度差控制电路的一侧的电阻的电路基板上进行调整，这是提高生产成本的因素之一。用于固定温差控制的所有电阻都与相同材料的感温电阻器形成在同一基板上。这使得固定温差控制的所有电阻能够暴露在相同的环境条件下。因此，即使电阻随着时间的推移而变化，随着时间的推移发生大体上同样的变化。由于固定温差控制的电阻基本上以相同的速率变化，所以产生的输出误差非常小。

56. 发明授权

US07032446B2 Flowrate measuring device with improved flow introduction into sub-passage outlet 有权
标题翻译：流量测量装置，具有改进的通流入子通道出口
公开(公告)号：US07032446B2
公开(公告)日：2006-04-25
申请号：US10083403
申请日：2002-02-27
申请人： Keiichi Nakada , Izumi Watanabe , Junichi Horie , Kei Ueyama , Hiromu Kikawa , Masamichi Yamada
发明人： Keiichi Nakada , Izumi Watanabe , Junichi Horie , Kei Ueyama , Hiromu Kikawa , Masamichi Yamada
IPC分类号： G01F1/68
CPC分类号： G01F1/684 , G01F1/6842 , G01F5/00 , G01F15/12
摘要： There is provided a flow rate measuring device which comprises a means for introducing a backward flow of the main passage into the sub-passage through the outlet of the sub-passage of the flow rate measuring device is provided near the outlet of the sub-passage, in order to keep the flow rate measuring element from being destroyed under the presence of dust and water in an intake manifold and which has high reliability for a long period of use and an excellent pulsation characteristic.
摘要翻译：提供了一种流量测量装置，其包括用于将主通道的逆流引导到通过流量测量装置的子通道的出口的子通道的装置，设置在子通道的出口附近为了保持流量测量元件在进气歧管中存在灰尘和水的情况下被破坏，并且长时间使用具有高可靠性和优异的脉动特性。

57. 发明授权

US06988399B1 Physical quantity detecting device having second lead conductors connected to the electrodes and extending to the circumference of the substrate 失效
标题翻译：物理量检测装置具有连接到电极并延伸到基板的圆周的第二引线导体
公开(公告)号：US06988399B1
公开(公告)日：2006-01-24
申请号：US09763970
申请日：2000-05-02
申请人： Izumi Watanabe , Keiichi Nakada , Masamichi Yamada
发明人： Izumi Watanabe , Keiichi Nakada , Masamichi Yamada
IPC分类号： G01F1/68
CPC分类号： G01P15/123 , F02D41/1454 , F02D41/182 , F02D41/187 , F02D2200/0414 , F02D2200/703 , G01F1/6845 , G01F1/692 , G01P2015/0828 , H01L2224/48091 , H01L2224/73265 , H01L2924/00014
摘要： It is an object of the present invention to provide a simple-structure physical quantity detecting device whose resistance does not vary irrespective of use for long periods, a method for manufacturing thereof and a motor vehicle control system using the physical quantity detecting sensor to improve its reliability. An airflow sensor (20) is equipped with a heat generating resistor (12H) and a temperature measuring resistor (12C), formed on a semiconductor substrate (11). The heat generating resistor (12H) is formed in a thin-wall portion (11A). Both end portions of the heat generating resistor (12H) are connected through first lead conductors (13H1, 13H2) to electrodes (14H1, 14H2), respectively. A second lead conductor (15H1) connected to the electrode (14H1) extends to an outer circumferential portion of the airflow sensor (10). A second lead conductor (15H2, 15H3) connected to the electrode (14H2) also extend to the outer circumferential portion of the airflow sensor (10), but a disconnection portion (16) is made in the middle thereof to establish electrical non-conduction.
摘要翻译：本发明的一个目的是提供一种简单结构的物理量检测装置，其电阻不会随着长时间的使用而变化，其制造方法和使用该物理量检测传感器的机动车辆控制系统来改善其可靠性。气流传感器（20）配备有形成在半导体衬底（11）上的发热电阻器（12H）和温度测量电阻器（12C）。发热电阻器（12H）形成在薄壁部分（11A）中。发热电阻器（12H）的两端分别通过第一引线导体（13H 1，13 H 2）连接到电极（14H 1，14 H 2）。连接到电极（14H 1）的第二引线导体（15H 1）延伸到气流传感器（10）的外周部分。连接到电极（14H 2）的第二引线导体（15H 2，15 H 3）也延伸到气流传感器（10）的外周部分，但是在其中间形成有断开部分（16）建立电气非导通。

58. 发明申请

US20050186696A1 Gas flowmeter and manufacturing method thereof 有权
公开(公告)号：US20050186696A1
公开(公告)日：2005-08-25
申请号：US11088175
申请日：2005-03-24
申请人： Masamichi Yamada , Junichi Horie , Izumi Watanabe , Keiichi Nakada
发明人： Masamichi Yamada , Junichi Horie , Izumi Watanabe , Keiichi Nakada
IPC分类号： F02D35/00 , G01F1/684 , G01F1/692 , H01L21/00 , H01L21/469
CPC分类号： G01F1/692 , G01F1/6845 , Y10T29/49002 , Y10T29/49007 , Y10T29/4902
摘要： A gas flowmeter capable of reducing a secular change comprises a silicon semiconductor substrate formed with a cavity and a heat element formed above the cavity of the semiconductor substrate by way of an insulating film. The heat element is a silicon (Si) semiconductor thin film impurity-doped at high concentration. Stoichiometrically stable silicon nitride (Si3N4) thin films as barrier layers which less permeate and less absorb hydrogen in the heat generating temperature range of the heat element are formed above and below the silicon (Si) semiconductor thin film.

59. 发明授权

US06925866B2 Thermal type flow rate measuring apparatus 有权
标题翻译：热式流量测量仪
公开(公告)号：US06925866B2
公开(公告)日：2005-08-09
申请号：US10449117
申请日：2003-06-02
申请人： Izumi Watanabe , Junichi Horie , Keiichi Nakada , Kei Ueyama , Masamichi Yamada
发明人： Izumi Watanabe , Junichi Horie , Keiichi Nakada , Kei Ueyama , Masamichi Yamada
IPC分类号： G01F1/684 , F02D35/00 , F02D41/18 , F02D45/00 , G01F1/692 , G01F1/698 , G01F1/699 , G01F1/68
CPC分类号： G01F1/6845 , G01F1/6842 , G01F1/692 , G01F1/698 , G01F1/699
摘要： A flow rate sensor has a problem that a resistance value of a heat generating resistor itself varies and sensor characteristics are changed during use of the sensor for a long term. Also the temperature of the heat generating resistor must be adjusted on a circuit substrate with a resistance constituting one side of a fixed temperature difference control circuit, and this has been one of factors pushing up the production cost. All resistances used for fixed temperature difference control are formed on the same substrate as temperature sensitive resistors of the same material. This enables all the resistances for the fixed temperature difference control to be exposed to the same environmental conditions. Hence, even when the resistances change over time, the changes over time occur substantially at the same tendency. Since the resistances for the fixed temperature difference control change over time essentially at the same rate, a resulting output error is very small.
摘要翻译：流量传感器具有长期使用传感器时发热电阻器本身的电阻值变化，传感器特性变化的问题。此外，发热电阻器的温度必须在构成固定温度差控制电路的一侧的电阻的电路基板上进行调整，这是提高生产成本的因素之一。用于固定温差控制的所有电阻都与相同材料的感温电阻器形成在同一基板上。这使得固定温差控制的所有电阻能够暴露在相同的环境条件下。因此，即使电阻随着时间的推移而变化，随着时间的推移发生大体上同样的变化。由于固定温差控制的电阻基本上以相同的速率变化，所以产生的输出误差非常小。

60. 发明授权

US5708205A Measuring element for a mass air flow sensor and mass air flow sensor using the measuring element 失效
标题翻译：使用测量元件的质量空气流量传感器和质量空气流量传感器的测量元件
公开(公告)号：US5708205A
公开(公告)日：1998-01-13
申请号：US649177
申请日：1996-05-17
申请人： Masamichi Yamada , Kaoru Uchiyama , Izumi Watanabe , Tadashi Isono , Toshihiko Nakau
发明人： Masamichi Yamada , Kaoru Uchiyama , Izumi Watanabe , Tadashi Isono , Toshihiko Nakau
IPC分类号： G01P5/12 , F02D35/00 , G01F1/68 , G01F1/692 , G01F1/698 , H01C13/00
CPC分类号： G01F1/698 , G01F1/692 , H01C13/00
摘要： A measuring element for a mass air flow sensor formed on a substrate for measuring a flow rate of an objective fluid comprises a pair of heated resistors of thin films juxtaposed in the flowing direction of the objective fluid, formed at a thin film heated resistor forming part on the substrate, a pair of non-heated ambient temperature sensing resistors of thin films, formed at a thin film ambient temperature sensing resistor forming part on the substrate, and a plurality of electrode terminals of thin films formed at a supporting part at which the substrate is supported, being a part excluding the heated resistor thin film forming part and the thin film ambient temperature sensing resistor forming part, for taking out electrical signals from the heated resisters and the non-heated ambient temperature sensing resistors, wherein the thin film heated resistor forming part and the thin film ambient temperature sensing resistor forming part are shifted each other and arranged before and after in the flowing direction of the fluid, and shifted and arranged left and right in the direction perpendicular to the flowing direction so that the pair of the heated resistors and the pair of the non-heated do not superimpose each other in the viewing direction parallel to the flowing direction, and the supporting part is allocated at one end side of the substrate, at which the plurality of electrode terminals of thin films are formed.
摘要翻译：形成在用于测量物流的流量的基板上的质量空气流量传感器的测量元件包括一对加热的薄膜电阻，该薄膜并列在物流的流动方向上，形成在薄膜加热的电阻器形成部分在衬底上，形成在薄膜环境温度感测电阻器上形成在衬底上的一部分薄膜的一对非加热环境温度感测电阻器，以及形成在支撑部分处的多个薄膜电极端子，基板被支撑，除了加热的电阻器薄膜形成部分和薄膜环境温度感测电阻器形成部分之外的部分，用于从加热的电阻器和非加热的环境温度感测电阻器中取出电信号，其中薄膜被加热电阻器形成部分和薄膜环境温度感测电阻器形成部分彼此相互偏移并且在之前和之后布置并且沿垂直于流动方向的方向左右移动并布置，使得一对加热电阻器和一对未加热的电阻器在观察方向上不彼此叠置平行并且支撑部分被分配在形成有多个薄膜电极端子的基板的一端侧。

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