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    • 51. 发明申请
    • Deformable micromirror device
    • 可变形微镜装置
    • US20080158442A1
    • 2008-07-03
    • US12005501
    • 2007-12-26
    • Kazuma AraiFusao IshiiYoshihiro Maeda
    • Kazuma AraiFusao IshiiYoshihiro Maeda
    • H04N5/74
    • H04N9/3123G02B26/0833G09G3/2022G09G3/346G09G2300/0842G09G2320/0223
    • A micromirror device, which makes an image display with digital image data, comprises pixel elements each of which makes pulse width modulation for incident light depending on the deflection state of light and which are arranged in the form of an array. The array of the pixel elements is composed of B subsets each including pixel elements of Ms (COLUMNs)×Ns (ROWs) (Ms, Ns, and B are natural numbers). Each of the pixel elements has a mirror, and at least one memory cell. The memory cell has a transistor of an input gate capacity Ct[F]. Each memory cell is connected by a ROW line having a wiring resistance R[Ω], and a wiring capacity C[F]. When a gray scale display of 10 [bits] or more for each color is made with a color sequential display of C0 colors, Ms, Ns, B, Ct, R, C, and C0 have a relationship of R*(Ct+C)
    • 使用数字图像数据进行图像显示的微镜器件包括像素元件,每个像素元件根据光的偏转状态对入射光进行脉冲宽度调制,并且以阵列的形式布置。 像素元件的阵列由B个子集组成,每个子集包括M个像素元素(COLUMN)x N S(ROW)(M S S S S / N N,S B是自然数)。 每个像素元件具有反射镜和至少一个存储单元。 存储单元具有输入栅极容量C T [F]的晶体管。 每个存储单元通过具有布线电阻RΩ和布线容量C [F]的ROW线连接。 当对于每种颜色进行10 [比特]或更多的灰度级显示时,使用C> 0< 0>颜色的颜色顺序显示, / C,C,C,C,C和C 0具有如下关系:R *(C + T + C) (1.63×10 -5 * B)/(C *)* M N * N(M +1)]。
    • 56. 发明申请
    • Methods and configurations for manufacturing hinges for micro-mirror devices
    • 用于制造微镜装置铰链的方法和结构
    • US20060018005A1
    • 2006-01-26
    • US11187248
    • 2005-07-23
    • Fusao Ishii
    • Fusao Ishii
    • G02B26/00
    • G02B26/0841
    • An image display system includes an improved hinge for a micro-mirror device composed of a conductive doped semiconductor and immune to plastic deformation at typical to extreme temperatures. The hinge is directly connected to the micro-mirror device and facilitates the manufacturing of an optically flat micro-mirror. This eliminates Fraunhofer diffraction due to recesses on the reflective surface of the micro-mirror. In addition, the hinge is hidden from incoming light thus improving contrast and fill-factor. The image display system further includes signal transmission metal traces formed on areas between the doped semiconductor hinges. The signal transmission metal traces are formed either before or after a high temperature crystallization process is applied to the hinges.
    • 图像显示系统包括用于由典型到极端温度下的导电掺杂半导体构成的微镜装置的改进铰链,并且不受塑性变形的影响。 铰链直接连接到微镜装置,并且有助于光学平面微镜的制造。 这消除了由于微镜的反射表面上的凹陷引起的弗劳恩霍夫衍射。 此外,铰链隐藏入射光,从而改善对比度和填充因子。 图像显示系统还包括形成在掺杂半导体铰链之间的区域上的信号传输金属迹线。 在将高温结晶过程施加到铰链之前或之后形成信号传输金属迹线。
    • 57. 发明申请
    • Control of micromirrors with intermediate states
    • 具有中等状态的微镜的控制
    • US20050206992A1
    • 2005-09-22
    • US11136041
    • 2005-05-23
    • Fusao Ishii
    • Fusao Ishii
    • G02B26/00G02B26/08G09G3/20G09G3/34H04N5/74
    • G09G3/346G02B26/0841G09G3/2011G09G3/2037G09G3/2077G09G2300/0842G09G2300/0852G09G2310/02G09G2310/0251G09G2310/0262H04N5/7458H04N2005/7466
    • A micromirror device with at least one intermediate state is disclosed in this invention with the reflecting mirror placed at an angular position between a fully on angle and fully off angle. The micromirror device includes a reflecting element supported on a hinge for oscillating and positioning at least three angular positions. The micromirror device further has a control circuit for receiving a series of control words of different number of bits as a time modulation signal to control the reflecting element for controlling a gray scale of display wherein the control circuit further receiving an oscillation signal for superimposing on the time modulation signal for oscillating the reflecting element for further controlling the gray scale of display. The series of control words further includes a sequence of control words of a least number of bits to a maximum number of bits of a least number of bits to a maximum number of bits with a time gap between each of the control words. The oscillating signal may be inserted optionally into a gap between the control words, into every control word, into a control word of the MSB, or into a control word of the LSB, In a preferred embodiment, the oscillating signal is applied to dispose the reflecting element at an intermediate state with a zero degree relative to an incident light.
    • 在本发明中公开了具有至少一个中间状态的微镜装置,其中反射镜放置在完全角度和完全偏离角之间的角位置。 微反射镜装置包括支撑在铰链上用于摆动和定位至少三个角度位置的反射元件。 微镜装置还具有控制电路,用于接收不同位数的一系列控制字作为时间调制信号,以控制用于控制显示灰度级的反射元件,其中控制电路还接收振荡信号以叠加在 用于振荡反射元件的时间调制信号,用于进一步控制显示器的灰度级。 一系列控制字还包括具有最少位数的最大位数到最大位数的最少位数的控制字序列,每个控制字之间具有时间间隙。 振荡信号可以可选地插入到控制字之间的间隙中,转换成每个控制字,变成MSB的控制字,或者插入到LSB的控制字中。在优选实施例中,应用振荡信号来配置 反射元件处于相对于入射光为零度的中间状态。
    • 58. 发明申请
    • Micromirrors with support walls
    • 带扶手墙的微镜
    • US20050162727A1
    • 2005-07-28
    • US10763672
    • 2004-01-24
    • Fusao IshiiFumitomo Hide
    • Fusao IshiiFumitomo Hide
    • G02B26/08G02F1/03G02F1/07
    • G02B26/0841
    • A micromirror device comprises a reflective element that is supported by at least 1 support wall. Support walls are designed for providing devices with improved mechanical and optical performance. Support walls are supported by a deformable element. The deformable element may be a torsion hinge. The deformable element may be supported by support structures that are designed to limit the deflection of the reflective element. An array of micromirror devices may be used as a spatial light modulator (SLM). Methods of fabricating micromirror arrays comprise the steps of: 1) providing a three-layer substrate, comprising a crystalline layer, a sacrificial layer, and a base layer, with the sacrificial layer being disposed between the crystalline layer and the base layer; 2) forming a deformable element in the crystalline layer; 3) forming support structures for the deformable element; and 4) forming electronic circuits on the base layer.
    • 微反射镜装置包括由至少1个支撑壁支撑的反射元件。 支撑墙设计用于为设备提供改进的机械和光学性能。 支撑壁由可变形元件支撑。 可变形元件可以是扭转铰链。 可变形元件可以被设计成限制反射元件的偏转的支撑结构支撑。 微镜器件的阵列可以用作空间光调制器(SLM)。 制造微镜阵列的方法包括以下步骤:1)提供三层衬底,其包括晶体层,牺牲层和基底层,牺牲层设置在晶体层和基底层之间; 2)在所述结晶层中形成可变形元件; 3)形成用于可变形元件的支撑结构; 和4)在基层上形成电子电路。
    • 59. 发明授权
    • High performance micromirror arrays and methods of manufacturing the same
    • 高性能微镜阵列及其制造方法
    • US06862127B1
    • 2005-03-01
    • US10699140
    • 2003-11-01
    • Fusao Ishii
    • Fusao Ishii
    • B81B3/00G02B26/08G02B26/00H01L21/50
    • G02B26/0841B81B3/0035B81B2201/042
    • A 1 dimensional or 2 dimensional array of micromirror devices comprises a device substrate with a 1st surface and a 2nd surface, control circuitry disposed on said 1st surface and a plurality of micromirrors disposed on said 2nd surface. Each micromirror comprises a reflective surface that is substantially optically flat, with neither recesses nor protrusions. Such a 1 dimensional or 2 dimensional array of micromirror devices may be used as a spatial light modulator (SLM). Methods of fabricating arrays of micromirror devices are also disclosed. Such methods generally involve providing a device substrate with a 1st surface and a 2nd surface, fabricating control circuitry on the 1st surface, and fabricating micromirrors on the 2nd surface, such that the reflective surfaces of the micromirrors are substantially optically flat, with neither recesses nor protrusions.
    • 微镜器件的一维或二维阵列包括具有第一表面和第二表面的器件衬底,设置在所述第一表面上的控制电路和设置在所述第二表面上的多个微镜。 每个微反射镜包括基本上光学平坦的反射表面,既没有凹陷也没有突起。 微镜器件的这种一维或二维阵列可以用作空间光调制器(SLM)。 还公开了制造微镜器件阵列的方法。 这样的方法通常涉及提供具有第一表面和第二表面的器件衬底,在第一表面上制造控制电路,并且在第二表面上制造微镜,使得微镜的反射表面基本上光学平坦, 突起