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    • 51. 发明授权
    • Floating gate memory device with homogeneous oxynitride tunneling dielectric
    • 具有均匀氧氮化物隧道电介质的浮栅存储器件
    • US06828623B1
    • 2004-12-07
    • US10232487
    • 2002-08-30
    • Xin GuoNian YangZhigang Wang
    • Xin GuoNian YangZhigang Wang
    • H01L29788
    • H01L29/518H01L21/28273H01L29/7885
    • A memory device with homogeneous oxynitride tunneling dielectric. Specifically, the present invention describes a flash memory cell that includes a tunnel oxide dielectric layer including homogeneous oxynitride. The tunnel oxide dielectric layer separates a floating gate from a channel region that is formed between a source region and a drain region in a substrate. The flash memory cell further includes a dielectric layer that separates a control gate from the floating gate. In one case, the homogenous oxynitride is a defect free silicon nitride. The homogeneity of the oxynitride is due to the uniform distribution of nitride within the tunnel oxide dielectric layer. Further, the use of the homogeneous oxynitride can increase the dielectric constant and lower the barrier height of the tunnel oxide dielectric layer for increased performance. Also, the homogenous oxynitride supports source-side channel hot hole erasing in the flash memory cell.
    • 具有均匀氧氮化物隧道电介质的存储器件。 具体地,本发明描述了一种闪存单元,其包括包括均匀氮氧化物的隧道氧化物介电层。 隧道氧化物电介质层将浮置栅极与形成在衬底中的源极区域和漏极区域之间的沟道区域分离。 闪存单元还包括将控制栅极与浮动栅极分离的介质层。 在一种情况下,均匀的氮氧化合物是无缺陷的氮化硅。 氧氮化物的均匀性是由于氮化物在隧​​道氧化物介电层内的均匀分布。 此外,为了提高性能,使用均匀的氮氧化物可以增加介电常数并降低隧道氧化物介电层的势垒高度。 此外,均匀的氮氧化物支持闪存单元中的源极侧通道热孔擦除。
    • 52. 发明授权
    • Method of detecting and distinguishing stack gate edge defects at the source or drain junction
    • 在源极或漏极结处检测和区分堆叠栅极边缘缺陷的方法
    • US06822259B1
    • 2004-11-23
    • US10126193
    • 2002-04-19
    • Zhigang WangNian YangXin Guo
    • Zhigang WangNian YangXin Guo
    • H01L2358
    • H01L21/28273G11C16/04G11C29/006G11C2029/0403G11C2029/5002
    • A method and apparatus for testing semiconductors comprising stacked floating gate structures. A floating gate is programmed (710). An electrical stress or disturb voltage is applied to a control gate with a source and a drain in a specific set of conditions (720). Subsequent to the stressing, a drain current versus gate voltage relationship is measured (730). The sequence of programming, stressing and measuring may be repeated (740) with different conditions for source and drain. More particularly, positive and negative biases are applied to a source while a drain is held at ground, and similar biases are applied to a drain while a source is held at ground. Through inspection of the measurement information taken after this sequence of stress applications, a stack gate edge-defect may be identified (750) as associated with a source edge or a drain edge. In this novel manner, stack gate edge defects may be identified and localized via non-destructive means, and corrective actions to the semiconductor manufacturing process and/or the partially manufactured wafer may be taken.
    • 一种用于测试包括堆叠浮栅结构的半导体的方法和装置。 浮动门被编程(710)。 电应力或干扰电压在特定条件(720)中用源极和漏极施加到控制栅极。 在应力之后,测量漏极电流与栅极电压的关系(730)。 编程,应力和测量的顺序可以重复(740),具有不同的源和漏源条件。 更具体地,在将源极保持在地面的同时将漏极保持在接地处时,将正和负偏压施加到源极,并且在将源保持在地面的同时将类似的偏压施加到漏极。 通过检查在该应力应用序列之后采取的测量信息,可以将源极边缘或漏极边缘的叠栅极边缘缺陷识别(750)。 以这种新颖的方式,可以通过非破坏性手段识别和定位堆叠栅极边缘缺陷,并且可以采取对半导体制造工艺和/或部分制造的晶片的校正动作。
    • 53. 发明授权
    • Extraction of drain junction overlap with the gate and the channel length for ultra-small CMOS devices with ultra-thin gate oxides
    • 漏极结的提取与具有超薄栅极氧化物的超小型CMOS器件的栅极和沟道长度重叠
    • US06646462B1
    • 2003-11-11
    • US10178144
    • 2002-06-24
    • Nian YangZhigang WangXin Guo
    • Nian YangZhigang WangXin Guo
    • H01L2998
    • H01L22/34H01L29/7836H01L2924/0002H01L2924/00
    • The present invention generally relates to a method of determining a source/drain junction overlap and a channel length of a small device, such as a MOS transistor. A large reference device having a known channel length is provided, and a source, drain, and substrate on which the device has been formed are grounded. A predetermined gate voltage is applied to a gate of the large device, and a gate to channel current of the reference device is measured. A source, drain, and substrate on which the small device has been formed are grounded, and the predetermined voltage is applied to a gate of the small device, and a gate to channel current of the small device is measured. The substrate and one of the source or the drain of the small device is floated, and a predetermined drain voltage is applied to source or the drain which is not floating. A gate to drain current for the small device is measured, and a source/drain junction overlap length is calculated. The source/drain junction overlap length is then used to calculate the channel length of the small device.
    • 本发明一般涉及一种确定诸如MOS晶体管的小器件的源/漏结重叠和沟道长度的方法。 提供具有已知通道长度的大参考装置,并且其上形成有装置的源极,漏极和基板接地。 将预定的栅极电压施加到大型器件的栅极,并测量参考器件的栅极到沟道电流。 形成小型器件的源极,漏极和衬底接地,并且将预定电压施加到小器件的栅极,并且测量小器件的栅极到沟道电流。 衬底和小器件的源极或漏极中的一个浮置,并且将预定的漏极电压施加到不浮动的源极或漏极。 测量用于小器件的漏极电流的栅极,并计算源极/漏极结重叠长度。 然后使用源极/漏极结重叠长度来计算小器件的沟道长度。
    • 54. 发明授权
    • Programming with floating source for low power, low leakage and high density flash memory devices
    • 使用浮动源编程,实现低功耗,低泄漏和高密度闪存设备
    • US06570787B1
    • 2003-05-27
    • US10126330
    • 2002-04-19
    • Zhigang WangNian YangXin Guo
    • Zhigang WangNian YangXin Guo
    • G11C1604
    • G11C16/12
    • The present invention relates to a flash memory array architecture comprising a plurality of flash memory cells arranged in a NOR type array configuration. Each of the plurality of flash memory cells have a source terminal coupled together to form a common source. The array architecture further comprises a common source selection component coupled between the common source of the array and a predetermined potential. The common source selection component is operable to couple the common source to the predetermined potential in a first state and electrically isolate or float the common source from the predetermined potential in a second state, thereby reducing leakage of non-selected cells associated with the activated bit line during a program mode of operation.
    • 本发明涉及一种闪存阵列架构,其包括以NOR型阵列配置布置的多个闪存单元。 多个闪存单元中的每一个具有耦合在一起以形成公共源的源极端子。 阵列结构还包括耦合在阵列的公共源和预定电位之间的公共源选择部件。 公共源选择组件可操作以将公共源耦合到处于第一状态的预定电位,并且在第二状态下将公共源与预定电位电隔离或浮动,从而减少与激活位相关联的未选择单元的泄漏 在程序运行模式下运行。
    • 57. 发明授权
    • Spectrum management device and method, geographic location database and subsystem
    • US10952080B2
    • 2021-03-16
    • US16300061
    • 2017-04-18
    • Xin GuoSony Corporation
    • Xin GuoChen Sun
    • H04W16/14H04W72/04H04W48/16H04W72/08H04L27/00
    • Provided in the present disclosure are a spectrum management device and method, a geographic location database, a coexistence discovery device, and subsystems for use in a radio communication system comprising a main system and subsystems. The spectrum management device comprises: a processing circuit, which is configured to: acquire spectrum usage information and spectrum adjustment capability information of subsystems managed by the spectrum management device, the spectrum usage information corresponding to information related to used spectrums assigned to and used by each subsystem, the spectrum adjustment capability information corresponding to information related to whether the subsystems support a spectrum adjustment operation, and an adjustment of the spectrums of the subsystems managed by the spectrum management device is determined on the basis of the spectrum usage information and the spectrum adjustment capability information, thus the interference caused by the subsystems as a result of spectrum usage to the main system is limited within a permissible range of the main system. The spectrum management device and method, the geographic location database, the coexistence discovery device, and the subsystems of the present disclosure achieve highly efficient use of spectrum resources.