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    • 53. 发明申请
    • Sheet for mounting polishing workpiece and method for making the same
    • 用于安装抛光工件的板及其制造方法
    • US20080003932A1
    • 2008-01-03
    • US11478601
    • 2006-07-03
    • Chung-Chih FengI-Peng YaoChen-Hsiang Chao
    • Chung-Chih FengI-Peng YaoChen-Hsiang Chao
    • B24B19/00
    • B24B37/30B24B41/068
    • The present invention relates to a sheet for mounting a polishing workpiece. The sheet comprises a substrate, a surface layer and a slightly rough layer. The substrate has a surface. The surface layer is located on the surface of the substrate, with no hole structure existing in the interior thereof, and has a surface. The slightly rough layer is located on the surface of the surface layer to carry and mount the polishing workpiece, with no hole structure existing in the interior thereof. Accordingly, when the polishing workpiece contacts the slightly rough layer, the air therebetween is easily vented out via the slightly rough layer, without the phenomenon of air wrapping, which increases the adsorption force between the polishing workpiece and the sheet.
    • 本发明涉及一种用于安装抛光工件的片材。 片材包括基底,表面层和稍微粗糙的层。 基板具有表面。 表面层位于基板的表面上,其内部没有孔结构,并具有表面。 稍微粗糙的层位于表层的表面上,以承载和安装抛光工件,其内部没有孔结构。 因此,当研磨工件接触稍微粗糙的层时,它们之间的空气容易通过稍微粗糙的层排出,而没有空气缠绕现象,这增加了研磨工件和片材之间的吸附力。
    • 54. 发明申请
    • Polishing pad and method of producing same
    • 抛光垫及其制造方法
    • US20070010175A1
    • 2007-01-11
    • US11175212
    • 2005-07-07
    • Chung-Chih FengI-Peng YaoYung-Chang Hung
    • Chung-Chih FengI-Peng YaoYung-Chang Hung
    • B24B7/30B24D11/00B24B1/00
    • B24D13/147B24B37/30B24D11/001
    • The present invention relates to a method of producing a polishing pad, comprising steps of: (a) providing a base material comprising a plurality of fibers; said base material having a surface for polishing a substrate; (b) impregnating the surface of the base material with an elastomer solution; (c) curing the elastomer impregnated in the surface of the base material to form a plurality of first continuous pores embedded in the elastomer and fibers; (d) impregnating the surface of the base material and elastomer obtained in the step (c) with a condition polymer solution; and (e) curing the condition polymer impregnated in the surface of the base material and elastomer and partially filling the condition polymer into the first continuous pores to form a plurality of second continuous pores.
    • 本发明涉及一种制造抛光垫的方法,包括以下步骤:(a)提供包含多根纤维的基材; 所述基材具有用于抛光基材的表面; (b)用弹性体溶液浸渍基材的表面; (c)固化浸渍在基材表面的弹性体以形成嵌入弹性体和纤维中的多个第一连续孔; (d)用条件聚合物溶液浸渍在步骤(c)中获得的基材和弹性体的表面; 和(e)固化浸渍在基材表面和弹性体表面的状态聚合物,并将状态聚合物部分地填充到第一连续孔中以形成多个第二连续孔。