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    • 51. 发明授权
    • Light emitting device and method of fabricating the same
    • 发光元件及其制造方法
    • US07294517B2
    • 2007-11-13
    • US10172749
    • 2002-06-17
    • Toru TakayamaHirokazu YamagataAkihiko KouraShunpei Yamazaki
    • Toru TakayamaHirokazu YamagataAkihiko KouraShunpei Yamazaki
    • H01L21/00
    • H01L27/3258
    • It is characteristic of an organic material suited to an interlayer insulating film to transmit vapor therethrough and to be liable to absorb moisture, and the material has a disadvantage that it is extremely susceptible to oxygen and moisture to be readily deteriorated no matter whether it is low-molecular or high-molecular. Further, alkali metal or alkaline earth metal is used for a positive electrode or a negative electrode of a light emitting element, and these are liable to be oxidized by oxygen. Thus moisture is responsible for deterioration of a light emitting element and for failure such as dark spots or the like. A light emitting device is provided to comprise an interlayer insulating film comprising a high molecular chemical compound and formed on a TFT formed on an insulating surface, a light emitting element, which is provided on the interlayer insulating film, and in which a light emitting layer comprising an organic chemical compound is formed between a pair of electrodes, and an inorganic insulating film containing silicon and nitrogen as its main components or a carbon film possessing a SP3 coupling and containing hydrogen formed between the interlayer insulating film and the light emitting element.
    • 适用于层间绝缘膜的有机材料的特征在于透过蒸气并易于吸收水分,并且该材料具有这样的缺点,即不管其是否低,氧气和水分都容易劣化 分子或高分子。 此外,碱金属或碱土金属用于发光元件的正极或负极,并且它们易于被氧氧化。 因此,水分导致发光元件的劣化和诸如黑点等的故障。 提供了一种发光器件,其包括:层间绝缘膜,其包含高分子化合物,形成在形成于绝缘表面上的TFT上;发光元件,其设置在层间绝缘膜上,并且其中发光层 在一对电极之间形成有机化合物,以及含有硅和氮作为主要成分的无机绝缘膜或具有SP 3 O 3耦合的碳膜,并且包含形成在层间绝缘层 胶片和发光元件。