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    • 52. 发明公开
    • Method for the production of a 3D solid-state radiation detector
    • Verfahren zur Herstellung eine 3D-Feststoffstrahlungsdetektors
    • EP2256810A1
    • 2010-12-01
    • EP09425213.7
    • 2009-05-29
    • Fondazione Bruno Kessler
    • Boscardin, Maurizio
    • H01L27/146
    • H01L27/1446H01L31/03529Y02E10/50
    • Method for the production of a 3D detector comprising a wafer (1) and a plurality of partial incisions (5 and 6) whose perimetral walls are doped alternately and in a different way, being said perimetral walls put into contact by means of metallic contacts (7) on both larger sides (11 and 12) of the wafer (1). Said production method comprises the realization of a first and second oxide layer on both larger sides of the wafer, the insulation of the wafer by means of the doping of the interface surfaces with said oxide layers, the making of conductive areolas near said first oxide layer by means of doping and cross incision with respect to said oxide layers by passing through said second oxide layer up to said first oxide layer, said incisions intercepting said doped areolas, and then the appropriate doping of the perimetral surfaces of said incisions and the making of openings by means of oxide layers for coming into contact with the doped areolas from the outside using metallic material.
    • 一种用于生产3D检测器的方法,所述3D检测器包括晶圆(1)和多个部分切口(5和6),所述多个部分切口(5和6)的周壁被交替地以不同的方式掺杂,所述周边壁通过金属触点 7)在晶片(1)的两个较大侧面(11和12)上。 所述制造方法包括在晶片的两个较大侧面上实现第一和第二氧化物层,通过与所述氧化物层掺杂界面的方式对晶片进行绝缘,在所述第一氧化物层附近制造导电分布 通过穿过所述第二氧化物层通过穿过所述第二氧化物层的所述氧化物层的掺杂和交叉切口,所述切口截取所述掺杂的混合物,然后适当掺杂所述切口的周边表面,并制备 通过氧化物层与外部使用金属材料与掺杂的混合物接触的开口。