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    • 54. 发明申请
    • MONOLITHIC THREE-DIMENSIONAL STRUCTURES
    • 单片三维结构
    • WO2003025981A1
    • 2003-03-27
    • PCT/US2002/019817
    • 2002-07-15
    • BINOPTICS CORPORATION
    • BEHFAR, AlexSCHREMER, Alfred, T.STAGARESCU, Cristian, B.
    • H01L21/00
    • G02B6/12002B81B2201/047B81C99/008B81C2201/0159G02B6/13G02B6/4204G02B6/4249G03F7/0037Y10S438/948Y10S438/949Y10S438/95
    • Three-dimensional structures of arbitrary shape are fabricated on the surface of a substrate (10) through a series of processing steps wherein a monolithic structure is fabricated in successive layers. A first layer (14) of photoresist material is spun onto a substrate (10) surface (18) and is exposed (26) in a desired pattern corresponding to the shape of a final structure, at a corresponding cross-sectional level in the structure. The layer is not developed after exposure; instead, a second layer (30) of photoresist material is deposited and is also exposed (32) in a desired pattern. Subsequent layers (40,52,64) spun onto the top surface of prior layers (14,30) and exposed (44,54,66), and upon completion of the succession of layers each defining corresponding levels of the desired structure, the layers are all developed at the same time leaving the three-dimensional structure (22).
    • 通过一系列处理步骤在基片(10)的表面上制造任意形状的三维结构,其中单片结构以连续的层制造。 将光致抗蚀剂材料的第一层(14)旋涂到基材(10)表面(18)上,并以对应于最终结构形状的所需图案以结构中相应的横截面水平曝光(26) 。 暴露后层不发达; 替代地,沉积光致抗蚀剂材料的第二层(30)并且还以期望的图案暴露(32)。 随后的层(40,52,64)旋转到先前层(14,30)的顶表面并暴露(44,54,66),并且在各层完成后,各层限定所需结构的相应水平, 所有层都同时开发出离开三维结构(22)。
    • 55. 发明申请
    • UNIDIRECTIONAL CURVED RING LASERS
    • 单向弯曲环激光
    • WO2003015228A1
    • 2003-02-20
    • PCT/US2002/016593
    • 2002-06-25
    • BINOPTICS CORPORATION
    • BEHFAR, Alex
    • H01S3/10
    • H01S5/1071H01S5/026H01S5/1003H01S5/14
    • A controllable, unidirectional ring laser having a reduced length includes at least one curved waveguide section (42), at least one partially transmitting facet (62), and a mechanism for producing unidirectional propagation of light within the waveguide cavity .The mechanism includes an external reflector (102), which may be either planar or curved, in the path of emitted light from a waveguide facet. In another embodiment, the reflector is replaced by a source of light (220) directed at the emitting facet of the waveguide. Another embodiment includes the use of an asymmetric element in the cavity .If desired, two unidirectional devices can be used selectively to produce a reversible waveguide.
    • 具有减小的长度的可控的单向环形激光器包括至少一个弯曲波导部分(42),至少一个部分透射小面(62)和用于在波导腔内产生光的单向传播的机构。该机构包括外部 反射器(102),其可以是来自波导面的发射光的路径中的平面或弯曲的。 在另一个实施例中,反射器由指向波导的发射面的光源(220)代替。 另一个实施例包括在空腔中使用不对称元件。如果需要,可以选择性地使用两个单向器件来产生可逆波导。