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    • 52. 发明申请
    • METHODS OF FABRICATING AN F-RAM
    • 制作F-RAM的方法
    • WO2014209559A1
    • 2014-12-31
    • PCT/US2014/040886
    • 2014-06-04
    • CYPRESS SEMICONDUCTOR CORPORATION
    • SUN, ShanRAMKUMAR, KrishnaswamyDAVENPORT, Tom E.
    • H01L21/8242
    • H01L28/57H01L21/76807H01L21/76834H01L21/76849H01L21/76895H01L27/11507
    • Non-volatile memory cells including complimentary metal-oxide-semiconductor transistors and embedded ferroelectric capacitor and methods of forming the same are described. In one embodiment, the method includes forming on a surface of a substrate a gate level including a gate stack of a MOS transistor, a first dielectric layer overlying the MOS transistor and a first contact extending through the first dielectric layer from a top surface thereof to a diffusion region of the MOS transistor. A local interconnect (LI) layer is deposited over the top surface of the first dielectric layer and the first contact, a ferro stack including a bottom electrode, a top electrode and ferroelectric layer there between deposited over the LI layer, and the ferro stack and the LI layer patterned to form a ferroelectric capacitor and a LI through which the bottom electrode is electrically coupled to the diffusion region of the MOS transistor.
    • 描述了包括互补金属氧化物半导体晶体管和嵌入式铁电电容器的非易失性存储单元及其形成方法。 在一个实施例中,该方法包括在衬底的表面上形成栅极电平,栅极电平包括MOS晶体管的栅极堆叠,覆盖MOS晶体管的第一电介质层和从顶表面延伸穿过第一电介质层的第一触点 MOS晶体管的扩散区域。 局部互连(LI)层沉积在第一电介质层的顶表面上,第一触点,包括沉积在LI层上的底电极,顶电极和铁电层的铁电堆和铁堆和 LI层被图案化以形成铁电电容器和LI,底电极通过该电极电耦合到MOS晶体管的扩散区域。
    • 54. 发明申请
    • OFFSET SENSOR PATTERN
    • 偏移传感器图案
    • WO2014105942A1
    • 2014-07-03
    • PCT/US2013/077787
    • 2013-12-26
    • CYPRESS SEMICONDUCTOR CORPORATION
    • PETERSON, JonathanWILSON, ColePRENDERGAST, Patrick
    • G06F3/041G06F3/045
    • G01R27/2605G01R1/02G06F1/16G06F3/044G06F3/047
    • A capacitive sensor array may comprise a plurality of column sensor electrodes and a plurality of row sensor electrodes. The column sensor electrodes may be capacitively coupled with the row sensor electrodes to form a plurality of unit cells each including an intensity center identifying a location of greatest capacitance sensitivity between a row electrode and a column electrode. An axis of a set of row sensor electrodes may cross at least a portion of each row electrode in the set, and the intensity centers associated with the row electrodes in the set may be staggered on alternating sides of the axis. For each of the plurality of unit cells, a distance between the intensity center of the unit cell and a nearest intensity center of another unit cell at a perimeter of the unit cell may be at least 0.7 times the height of the unit cell.
    • 电容传感器阵列可以包括多个列传感器电极和多个行传感器电极。 列传感器电极可以与行传感器电极电容耦合以形成多个单元电池,每个单元电池包括识别行电极和列电极之间最大电容灵敏度位置的强度中心。 一组行传感器电极的轴可以与组中的每个行电极的至少一部分交叉,并且与组中的行电极相关联的强度中心可以在轴的交替侧交错布置。 对于多个单元电池中的每一个,单元电池的强度中心与单元电池周边的另一个晶胞的最近的强度中心之间的距离可以是单元电池的高度的至少0.7倍。