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    • 48. 发明专利
    • AT300405B
    • 1972-07-25
    • AT1166868
    • 1968-11-29
    • BALZERS PATENT BETEILIG AG
    • G01B9/02G01K5/58
    • 1,250,205. Measuring temperature photoelectrically. BALZERS PATENT-UND BETEILIGUNGS A. G. Dec. 16, 1968 [Dec. 21, 1967], No. 59692/68. Heading G1A. Variations in the temperature of a substrate in coating forming apparatus are measured by interferometrically investigating variations in the substrate thickness due to thermal expansion. Visible, ultraviolet or infrared light from a laser 21 passes through a window 12 into a vacuum deposition enclosure 11 and is reflected on to a substrate 17. Light reflected from or transmitted through the faces of the substrate interferes causing variations in intensity of the light received by photo-cell 25 each change from maximum to minimum intensity corresponding to a predetermined change in temperature. The transmitted interference fringes may be detected by a photo-cell 26 and indicated or recorded. The thickness of the layer being deposited may also be determined by detecting the interference of the light reflected from the front and back of the layer. If the angle of incidence of the light is suitably chosen, variations due to temperature changes may be distinguished from superimposed variations due to layer build up by their different amplitudes.