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    • 42. 发明申请
    • FINDING MINIMUM REMAINING FLOAT FOR A PATTERN OF NON-UNIFORM SIZED FEATURES
    • 寻找非均匀尺寸特征的图案的最小剩余量
    • US20100063770A1
    • 2010-03-11
    • US12206381
    • 2008-09-08
    • Bruce A. WilsonPaul C. Hollingshead
    • Bruce A. WilsonPaul C. Hollingshead
    • G01B21/16
    • G05B19/40931G05B2219/37441G05B2219/37617Y02P90/265
    • A method for analyzing tolerances for features for an object. A framework may be created from the plurality of features for the object. The framework may be fitted to a plurality of manufactured features for the object based on the plurality of features to form a fit framework. A remaining clearance may be identified between each of a plurality of manufactured sizes associated with the plurality of features and each of plurality of virtual conditions for the plurality of features to form a plurality of remaining clearances. A plurality of remaining clearance geometric shapes may be formed from the plurality of remaining clearances. The plurality of remaining clearance features may be positioned around a single true position. A common region may be identified from between the plurality of remaining clearances. A minimum remaining float may be identified from the common region. A resulting pattern transformation may be determined.
    • 一种用于分析对象特征的公差的方法。 可以从对象的多个特征创建框架。 基于多个特征,框架可以被安装到用于对象的多个制造特征以形成配合框架。 可以在与多个特征相关联的多个制造尺寸中的每一个与用于多个特征的多个虚拟条件中的每一个之间识别剩余间隙,以形成多个剩余间隙。 可以从多个剩余间隙形成多个剩余的间隙几何形状。 多个剩余的间隙特征可以围绕单个真实位置定位。 可以从多个剩余间隙之间识别公共区域。 可以从公共区域识别最小剩余浮动。 可以确定所得到的图案变换。
    • 44. 发明申请
    • Diagnostic method for manufacturing processes
    • 制造过程的诊断方法
    • US20040049364A1
    • 2004-03-11
    • US10236450
    • 2002-09-06
    • John R. Allen
    • G06F015/00
    • G05B19/401B65G2207/14G05B19/41875G05B2219/32189G05B2219/32221G05B2219/32222G05B2219/35223G05B2219/37617Y02P90/22
    • A method for use in a system for diagnosing the causes of manufacturing defects involves process characterization. A set of forms is identified for a workpiece and for a piece of manufacturing equipment that acts upon the workpiece. The forms for the workpiece are preferably a hierarchic set of geometric forms. Each such geometric form corresponds to an aspect of the action of the manufacturing equipment upon the workpiece. A plurality of measurements is made on a defective workpiece following the hierarchical order of forms. The measurements are compared to a reference datum, and a deviation from the datum is computed. If the deviation exceeds a preselected threshold, an alert condition results, attributable to the action of the manufacturing equipment. Targeted adjustment corresponding to the action that caused the defect can then be made to the equipment.
    • 用于诊断制造缺陷原因的系统的方法涉及过程表征。 为工件和作用于工件的一件制造设备识别出一组形式。 工件的形式优选为几何形式的分层组合。 每个这样的几何形状对应于制造设备在工件上的动作的一个方面。 根据形式的分级顺序对缺陷工件进行多次测量。 将测量与参考基准进行比较,并计算与基准的偏差。 如果偏差超过预选阈值,则可能由于制造设备的作用而导致警报状态。 然后可以对设备进行与导致缺陷的动作相对应的目标调整。