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    • 42. 发明申请
    • Diamond Electron Emission Cathode,Electron Emission Source,Electron Microscope,And Electron Beam Exposure Device
    • 金刚石电子发射阴极,电子发射源,电子显微镜和电子束曝光装置
    • US20080067493A1
    • 2008-03-20
    • US11665472
    • 2006-06-19
    • Yoshiyuki YamamotoAkihiko UedaYoshiki NishibayashiTakahiro Imai
    • Yoshiyuki YamamotoAkihiko UedaYoshiki NishibayashiTakahiro Imai
    • H01J1/30C30B29/04H01L29/06
    • H01J1/15H01J1/14H01J37/06H01J2237/06308H01J2237/06316
    • An object of the present invention is to provide an electron emission cathode and an electron emission source using diamond and having a high brightness and a small energy width that are suitable for electron ray and electron beam devices and vacuum tubes, in particular, electron microscopes and electron beam exposure devices, and also electronic devices using such cathode and source. The diamond electron emission cathode according to the present invention has single crystal diamond in at least part thereof. The diamond electron emission cathode has a columnar shape having a sharpened acute section and a heating section. One electron emitting portion is provided in the sharpened acute section. The electron emitting portion and heating section comprise a diamond semiconductor. The diamond semiconductor is a p-type semiconductor having p-type impurities at 2×1015 cm−3 or higher. The semiconductor is present in the electron emitting portion. A metal layer is formed on the surface of the electron emission cathode. The metal layer is present in at least part of the heating section. The shortest distance from the electron emitting portion to an end portion of the metal layer is 500 μm or less. An electric current for heating is supplied to the heating section with a pair of current introducing terminals, and some of the introduced electrons can be emitted from the electron emitting portion.
    • 本发明的目的是提供一种使用金刚石的电子发射阴极和电子发射源,其具有适用于电子射线和电子束装置以及真空管,特别是电子显微镜和 电子束曝光装置,以及使用这种阴极和源的电子装置。 根据本发明的金刚石电子发射阴极在其至少一部分中具有单晶金刚石。 金刚石电子发射阴极具有锐化锐角部分和加热部分的柱状。 一个电子发射部分设置在锐化的尖锐部分。 电子发射部分和加热部分包括金刚石半导体。 金刚石半导体是具有2×10 15 -3 -3以上的p型杂质的p型半导体。 半导体存在于电子发射部分中。 在电子发射阴极的表面上形成金属层。 金属层存在于加热部分的至少一部分中。 从电子发射部到金属层的端部的最短距离为500μm以下。 通过一对电流导入端子向加热部供给加热用电流,能够从电子发射部射出一些导入的电子。
    • 46. 发明申请
    • METHOD OF MANUFACTURING GaN-BASED FILM
    • 制造GaN基膜的方法
    • US20120122301A1
    • 2012-05-17
    • US13283963
    • 2011-10-28
    • Shinsuke FUJIWARAKoji UematsuYoshiyuki YamamotoIssei Satoh
    • Shinsuke FUJIWARAKoji UematsuYoshiyuki YamamotoIssei Satoh
    • H01L21/20
    • C30B29/406C30B25/02H01L33/007H01L33/0079
    • A method of manufacturing a GaN-based film includes the steps of preparing a composite substrate, the composite substrate including a support substrate in which a coefficient of thermal expansion in its main surface is more than 0.8 time and less than 1.0 time as high as a coefficient of thermal expansion of GaN crystal in a direction of a axis and a single crystal film arranged on a main surface side of the support substrate, the single crystal film having threefold symmetry with respect to an axis perpendicular to a main surface of the single crystal film, and forming a GaN-based film on the main surface of the single crystal film in the composite substrate, the single crystal film in the composite substrate being an SiC film. Thus, a method of manufacturing a GaN-based film capable of manufacturing a GaN-based film having a large main surface area and less warpage without crack being produced in a substrate is provided.
    • 制造GaN基膜的方法包括以下步骤:制备复合基板,该复合基板包括其主表面的热膨胀系数大于0.8倍且小于1.0倍的支撑基板 GaN晶体沿着轴方向的热膨胀系数和布置在支撑基板的主表面侧的单晶膜,单晶膜相对于垂直于单晶主表面的轴线具有三重对称性 并且在复合衬底中的单晶膜的主表面上形成GaN基膜,复合衬底中的单晶膜是SiC膜。 因此,提供了一种制造能够制造基板上具有大的主表面积和较少翘曲的GaN基膜的GaN基膜的方法。