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    • 44. 发明授权
    • Apparatus for implanting metal ions in metals and ceramics
    • 用于在金属和陶瓷中注入金属离子的装置
    • US5777438A
    • 1998-07-07
    • US600524
    • 1996-02-13
    • Yasuo Suzuki
    • Yasuo Suzuki
    • C23C14/48H01J37/317H01J37/32H05B37/02
    • H01J37/32412
    • A metal ion implanting apparatus according to the present invention includes a vacuum vessel also serving as an anode, a holder for holding a substrate to be processed, a plurality of arc evaporation sources, a plurality of arc power supplies and a bias power supply. Each of the plurality of arc evaporation sources has a cathode including at least one of metal and a metal compound. The cathode evaporates cathode substance by arc discharge between the cathodes and the vacuum vessel also serving as the anode. Each of the plurality of arc power supplies supply an arc discharge voltage between the cathode of the arc evaporation source corresponding to the arc power supply and the vacuum vessel with the cathode as a negative side. The bias power supply for applying a negative pulse-like bias voltage on a base of a potential of the vacuum vessel to the holder and the substrate held by the holder.
    • 根据本发明的金属离子注入装置包括也用作阳极的真空容器,用于保持待处理衬底的保持器,多个电弧蒸发源,多个电弧电源和偏置电源。 多个电弧蒸发源中的每一个具有包括金属和金属化合物中的至少一种的阴极。 阴极通过阴极和也用作阳极的真空容器之间的电弧放电来蒸发阴极物质。 多个电弧电源中的每一个在与电弧电源相对应的电弧蒸发源的阴极和阴极之间的真空容器之间提供电弧放电电压作为负极。 用于将负脉冲状偏置电压施加到真空容器的电位到保持器和由保持器保持的基板的偏置电源。
    • 50. 发明授权
    • Coupling mechanisms for rotary fluid cylinders
    • 旋转液压缸连接机构
    • US5065792A
    • 1991-11-19
    • US595264
    • 1990-10-09
    • Koziro OhtaYoshihito KurogiYasuo Suzuki
    • Koziro OhtaYoshihito KurogiYasuo Suzuki
    • B23B31/30
    • B23B31/302Y10T137/86268Y10T137/86276
    • A coupling mechanism for a rotary fluid cylinder which comprises a rotary member and a fluid feeding member concentrically mounted on said rotary member, at least one fluid passage being formed for supplying fluid from the fluid feeding member to the rotary member even while the rotary member is rotating. The coupling mechanism comprises a pair of rolling bearings interposed between the fluid feeding member and the rotary member at the respective extreme ends of the fluid feeding member so as to allow relative rotation of the rotary member with respect to the fluid feeding member. A biasing member for applying a predetermined pre-load to the respective rolling bearing is provided. The applied pre-load acts on the rolling bearings in such a manner that the rolling bearings are biased to move away from each other in their axial direction.
    • 一种用于旋转液体缸的联接机构,其包括旋转构件和同心地安装在所述旋转构件上的流体供给构件,至少一个流体通道被形成用于将流体从流体供给构件供应到旋转构件,即使在旋转构件是 旋转。 联接机构包括一对滚动轴承,其在流体供给部件的相应末端处插入在流体供给部件和旋转部件之间,以允许旋转部件相对于流体供给部件相对旋转。 提供了用于将预定的预载荷施加到相应的滚动轴承的偏置构件。 所施加的预载荷以这样的方式作用在滚动轴承上,使得滚动轴承被偏压以在轴向方向上彼此远离。