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    • 43. 发明申请
    • NEAR-FIELD RESISTIVITY MICROSCOPE
    • 近场电阻显微镜
    • WO1997010514A1
    • 1997-03-20
    • PCT/IL1996000106
    • 1996-09-10
    • YISSUM RESEARCH DEVELOPMENT COMPANY OF THE HEBREW UNIVERSITY OF JERUSALEMDAVIDOV, DanGOLOSOVSKY, Michael
    • YISSUM RESEARCH DEVELOPMENT COMPANY OF THE HEBREW UNIVERSITY OF JERUSALEM
    • G01R27/26
    • G01R27/02G01R1/06772Y10S977/862Y10S977/875Y10S977/89Y10S977/901
    • A microwave microscope comprising a microwave waveguide having a probe end positioned closely above the surface to probed such that the surface is in the near field of the microwave radiation. The end of the probe facing the surface is covered with a metallic foil or a conducting film deposited over a dielectric layer and having a rectangular slit formed therein. The long dimension of the slit is nearly resonant with the microwave, that is, just slightly longer than one-half of the microwave wavelength. The short dimension is substantially shorter than long dimension and is chosen such that the slitted end is transparent to the microwave. Thereby, substantial microwave power is emitted through the slit with fine resolution that is determined by the short dimension of the slit. The probe is scanned across the surface in the direction of the short slit dimension, and its resolution is approximately equal to the short slit dimension. Preferably, the end is convexly curved along the direction of the long slit dimension so that only a portion of the slit is in the near field, thereby reducing the effective lateral dimension.
    • 一种微波显微镜,包括微波波导,其具有位于表面附近的探针端,以被探测,使得表面处于微波辐射的近场中。 面向表面的探针的端部被沉积在电介质层上并且在其中形成有矩形狭缝的金属箔或导电膜覆盖。 狭缝的长尺寸几乎与微波共振,即略微长于微波波长的一半。 短尺寸基本上比长尺寸短,并且被选择成使得狭缝端对微波是透明的。 因此,通过狭缝的短尺寸确定的细分辨率通过狭缝发射大量的微波功率。 探针沿着短狭缝尺寸的方向扫描表面,其分辨率近似等于短狭缝尺寸。 优选地,端部沿着长狭缝尺寸的方向凸起地弯曲,使得仅狭缝的一部分处于近场,从而降低了有效的横向尺寸。