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    • 49. 发明授权
    • Nonvolatile semiconductor memory and process of producing the same
    • 非易失性半导体存储器及其制造方法
    • US08148216B2
    • 2012-04-03
    • US12974873
    • 2010-12-21
    • Fumitaka AraiRiichiro Shirota
    • Fumitaka AraiRiichiro Shirota
    • H01L21/71
    • H01L29/792G11C16/0483H01L27/11524H01L27/11529H01L27/11556H01L29/7926
    • A nonvolatile semiconductor memory of an aspect of the present invention comprises a semiconductor substrate, a pillar-shaped semiconductor layer extending in the vertical direction with respect to the surface of the semiconductor substrate, a plurality of memory cells arranged in the vertical direction on the side surface of the semiconductor layer and having a charge storage layer and a control gate electrode, a first select gate transistor arranged on the semiconductor layer at an end of the memory cells on the side of the semiconductor substrate, and a second select gate transistor arranged on the semiconductor layer on the other end of the memory cells opposite to the side of the semiconductor substrate, wherein the first select gate transistor includes a diffusion layer in the semiconductor substrate and is electrically connected to the pillar-shaped semiconductor layer by way of the diffusion layer that serves as the drain region.
    • 本发明的一个方面的非易失性半导体存储器包括半导体衬底,相对于半导体衬底的表面在垂直方向上延伸的柱状半导体层,沿着垂直方向排列的多个存储单元 具有电荷存储层和控制栅电极的第一选择栅晶体管,布置在半导体衬底侧的存储单元的端部的半导体层上的第一选择栅极晶体管和布置在半导体层上的第二选择栅晶体管 存储单元的与半导体衬底侧相反的另一端的半导体层,其中第一选择栅晶体管包括在半导体衬底中的扩散层,并通过扩散电连接到柱状半导体层 作为漏极区域的层。