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    • 45. 发明授权
    • Optical lens, and optical pickup and optical disc apparatus using such lens
    • 光学透镜,以及使用这种透镜的光学拾取和光盘装置
    • US06188528B1
    • 2001-02-13
    • US09343553
    • 1999-06-30
    • Takatoshi YamadaNorio Fukasawa
    • Takatoshi YamadaNorio Fukasawa
    • G02B302
    • G11B7/1374
    • An optical lens composed of a transparent material, wherein one surface thereof on a light source side is a convex aspherical surface of rotation symmetry defined by a function relative to the radial distance from an optical axis. The aspherical surface is shaped to be a curved one without any stepped region with regard to the radial direction in the defined area, and has a portion where the derivatives of the function are discontinuous at a predetermined radial position. Although not equipped with an iris diaphragm, this optical lens is capable of eliminating an incident light beam outside the optical effective surface thereof without deteriorating the optical characteristics.
    • 由透明材料构成的光学透镜,其中在光源侧的一个表面是由相对于从光轴的径向距离的函数限定的旋转对称的凸非球面。 该非球面成形为相对于限定区域的径向方向没有任何台阶状的弯曲形状,并且具有功能的导数在预定的径向位置处不连续的部分。 虽然没有配备虹膜光阑,但是该光学透镜能够消除光学有效表面外的入射光束而不损害光学特性。
    • 46. 发明授权
    • Polishing pad and method of producing semiconductor device
    • 抛光垫及半导体装置的制造方法
    • US08845852B2
    • 2014-09-30
    • US10536621
    • 2003-11-27
    • Masahiko NakamoriTetsuo ShimomuraTakatoshi YamadaKazuyuki OgawaAtsushi KazunoMasahiro Watanabe
    • Masahiko NakamoriTetsuo ShimomuraTakatoshi YamadaKazuyuki OgawaAtsushi KazunoMasahiro Watanabe
    • C23F1/00B24B37/20B24B37/013
    • B24B37/205B24B37/013
    • A polishing pad enabling a highly precise optical endpoint sensing during the polishing process and thus having excellent polishing characteristics (such as surface uniformity and in-plane uniformity) is disclosed. A polishing pad enabling to obtain the polishing profile of a large area of a wafer is also disclosed. A polishing pad of a first invention comprises a light-transmitting region having a transmittance of not less than 50% over the wavelength range of 400 to 700 nm. A polishing pad of a second invention comprises a light-transmitting region having a thickness of 0.5 to 4 mm and a transmittance of not less than 80% over the wavelength range of 600 to 700 nm. A polishing pad of a third invention comprises a light-transmitting region arranged between the central portion and the peripheral portion of the polishing pad and having a length (D) in the diametrical direction which is three times or more longer than the length (L) in the circumferential direction.
    • 公开了一种抛光垫,其能够在抛光过程中进行高精度的光学终点感测,因此具有优异的抛光特性(例如表面均匀性和面内均匀性)。 还公开了能够获得大面积晶片的抛光轮廓的抛光垫。 第一发明的抛光垫包括在400〜700nm的波长范围内具有不小于50%透射率的透光区域。 第二发明的抛光垫包括在600至700nm的波长范围内具有0.5至4mm厚度的透光区域和不小于80%的透光率。 第三发明的抛光垫包括布置在抛光垫的中心部分和周边部分之间的透光区域,其沿直径方向的长度(D)比长度(L)长三倍或更长, 在圆周方向。
    • 47. 发明授权
    • Phase difference element and method for manufacturing the same
    • 相位差元件及其制造方法
    • US08842365B2
    • 2014-09-23
    • US13473100
    • 2012-05-16
    • Nobuyuki KoikeMasatoshi SasakiNaoki HanashimaAkio TakadaTakatoshi Yamada
    • Nobuyuki KoikeMasatoshi SasakiNaoki HanashimaAkio TakadaTakatoshi Yamada
    • G02B1/10G02B1/11
    • G02B1/115
    • A phase difference element capable of reducing reflection of incident light and a manufacturing method for the phase difference element are disclosed. The phase difference element includes a transparent substrate 11, an interface anti-reflection film group 12 and an obliquely vapor deposited film 13. The interface anti-reflection film group is composed by one or more of alternately high and low refractive index films, with the film thicknesses of the respectively films being equal to or less than the wavelength of light in use. The obliquely vapor deposited film is formed by a plurality of layers of a dielectric material. These layers are alternately obliquely vapor deposited from two directions differing by 180° from each other. The refractive index of the interface anti-reflection film group 12 is higher than the refractive index of the transparent substrate 11 and lesser than that of the obliquely vapor deposited film 13.
    • 公开了能够减少入射光反射的相位差元件和相位差元件的制造方法。 相位差元件包括透明基板11,界面防反射膜组12和倾斜气相沉积膜13.界面抗反射膜组由交替高和低折射率膜中的一个或多个组成,其中 各膜的膜厚度等于或小于使用的光的波长。 倾斜蒸镀膜由多层电介质材料形成。 这些层从彼此相差180°的两个方向交替倾斜蒸镀。 界面抗反射膜组12的折射率高于透明基板11的折射率,并且小于倾斜气相沉积膜13的折射率。
    • 49. 发明申请
    • PHASE DIFFERENCE ELEMENT AND METHOD FOR MANUFACTURING THE SAME
    • 相差元件及其制造方法
    • US20120293732A1
    • 2012-11-22
    • US13473100
    • 2012-05-16
    • Nobuyuki KoikeMasatoshi SasakiNaoki HanashimaAkio TakadaTakatoshi Yamada
    • Nobuyuki KoikeMasatoshi SasakiNaoki HanashimaAkio TakadaTakatoshi Yamada
    • G02F1/1335B05D5/06G02B1/11
    • G02B1/115
    • A phase difference element capable of reducing reflection of incident light and a manufacturing method for the phase difference element are disclosed. The phase difference element includes a transparent substrate 11, an interface anti-reflection film group 12 and an obliquely vapor deposited film 13. The interface anti-reflection film group is composed by one or more of alternately high and low refractive index films, with the film thicknesses of the respectively films being equal to or less than the wavelength of light in use. The obliquely vapor deposited film is formed by a plurality of layers of a dielectric material. These layers are alternately obliquely vapor deposited from two directions differing by 180° from each other. The refractive index of the interface anti-reflection film group 12 is higher than the refractive index of the transparent substrate 11 and lesser than that of the obliquely vapor deposited film 13 (FIG. 1).
    • 公开了能够减少入射光反射的相位差元件和相位差元件的制造方法。 相位差元件包括透明基板11,界面防反射膜组12和倾斜气相沉积膜13.界面抗反射膜组由交替高和低折射率膜中的一个或多个组成,其中 各膜的膜厚度等于或小于使用的光的波长。 倾斜蒸镀膜由多层电介质材料形成。 这些层从彼此相差180°的两个方向交替倾斜蒸镀。 界面抗反射膜组12的折射率高于透明基板11的折射率,并且小于倾斜气相沉积膜13(图1)的折射率。