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    • 48. 发明授权
    • Thin-film solar cell manufacturing apparatus and manufacturing method
    • 薄膜太阳能电池制造装置及制造方法
    • US6036822A
    • 2000-03-14
    • US009689
    • 1998-01-20
    • Takeshi IkeyaKenji SatoKazuhiro ToyodaTakeshi Kamiya
    • Takeshi IkeyaKenji SatoKazuhiro ToyodaTakeshi Kamiya
    • C23C14/18C25D7/12H01L31/032C23C14/34
    • C23C14/185C25D7/126H01L31/0322Y02E10/541Y02P70/521
    • A base is provided with a gas outlet pipe and a gas inlet pipe. A bell jar is placed on top of the base with an O-ring interposed between them. Thin-film solar cells and a Se powder are placed in a recess formed in a lower heating jig, and the lower heating jig is positioned on the base. An upper heating jig is placed on top of the lower heating jig. The upper heating jig is vertically moved by a vertically actuating mechanism. The upper and lower heating jigs are heated with a heater so as to react Se with the thin-film solar cells, whereby a CuInSe.sub.2 alloy film is formed. In a method of manufacturing a thin-film solar cell, a molybdenum layer and a copper layer are formed on a substrate by sputtering. A selenium-dispersed indium layer is formed on the copper layer in a solution, which includes indium ions and dispersed selenium colloid, by electrodeposition. The thus formed selenium-dispersed indium layer and the selenium are heated in a sealed container. Alternatively, a conductive substrate is plated in a solution comprising copper ions and selenium ions, so that a copper-selenium layer is formed on the conductive substrate. The thus plated substrate is further plated in a solution comprising indium ions and selenium ions, so that an indium-selenium layer is formed on the copper-selenium layer. As a result, a pre-cursor is completed. Then, this precursor is subjected to heat treatment.
    • 底座设有气体出口管和进气管。 将钟罩放置在基座的顶部,其间插入有O形环。 将薄膜太阳能电池和Se粉末放置在形成在下加热夹具中的凹部中,并且下加热夹具位于基座上。 上加热夹具放置在下加热夹具的顶部。 上部加热夹具通过垂直致动机构垂直移动。 上加热夹具和下加热夹具用加热器加热以使Se与薄膜太阳能电池反应,由此形成CuInSe 2合金膜。 在制造薄膜太阳能电池的方法中,通过溅射在衬底上形成钼层和铜层。 通过电沉积在包含铟离子和分散的硒胶体的溶液中的铜层上形成硒分散的铟层。 如此形成的硒分散铟层和硒在密封容器中加热。 或者,将导电基板电镀在包含铜离子和硒离子的溶液中,使得在导电基板上形成铜 - 硒层。 将如此镀敷的衬底进一步镀在包含铟离子和硒离子的溶液中,使得在硒 - 硒层上形成铟 - 硒层。 结果,完成了前置光标。 然后,对该前体进行热处理。