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    • 44. 发明授权
    • Process for preparing fluorine-containing polymer and method of forming fine pattern using same
    • 制备含氟聚合物的方法和使用其形成精细图案的方法
    • US07163982B2
    • 2007-01-16
    • US10914203
    • 2004-08-10
    • Takayuki ArakiTetsuhiro KodaniTakuji Ishikawa
    • Takayuki ArakiTetsuhiro KodaniTakuji Ishikawa
    • C08F8/32
    • C08F12/20G03F7/0046G03F7/0395
    • There is provided a method of forming a fine pattern by using a practicable fluorine-containing polymer which has a high transparency to exposure light having a short wavelength such as F2 laser and can undergo resolution of a fine pattern. The method comprises (I) a step for preparing a fluorine-containing polymer (A) having OH group which has a structural unit derived from a fluorine-containing norbornene derivative having OH group, (II) a step for preparing a fluorine-containing polymer (B) having a protective group by reacting a compound represented by X—CH2OR, wherein X is Cl, Br or I; R is a hydrocarbon group having 1 to 30 carbon atoms in which a part or the whole of hydrogen atoms may be substituted with fluorine atoms, with the above-mentioned fluorine-containing polymer (A) having OH group in the presence of a base, (III) a step for preparing a resist composition comprising (a) the above-mentioned fluorine-containing polymer (B) having a protective group, (b) a photoacid generator and (c) a solvent, (IV) a step for forming a resist film comprising the above-mentioned resist composition on a substrate or on a given layer on the substrate, (V) a step for exposing by selectively irradiating a given area of the resist film with energy rays, and (VI) a step for subjecting the exposed resist film to developing to selectively remove the exposed portion of the resist film, thus forming a fine pattern.
    • 提供了通过使用对具有短波长的曝光光如F 2激光具有高透明度的可行的含氟聚合物来形成精细图案的方法,并且可以经历精细图案的分辨 。 该方法包括:(I)具有OH基的含氟聚合物(A)的制备步骤,其具有衍生自具有OH基的含氟降冰片烯衍生物的结构单元,(II)制备含氟聚合物的步骤 (B)通过使由X-CH 2 OR表示的化合物与其中X为Cl,Br或I的化合物反应而具有保护基; R是具有1至30个碳原子的烃基,其中一部分或全部氢原子可以被氟原子取代,上述含碱基的含氟聚合物(A)具有OH基团, (III)制备抗蚀剂组合物的步骤,包括(a)具有保护基的上述含氟聚合物(B),(b)光致酸产生剂和(c)溶剂,(IV)形成步骤 在基板上或基板上的给定层上包含上述抗蚀剂组合物的抗蚀剂膜,(V)通过用能量射线选择性地照射抗蚀剂膜的给定区域来曝光的步骤,以及(VI) 使曝光的抗蚀剂膜显影以选择性地除去抗蚀剂膜的暴露部分,从而形成精细图案。
    • 46. 发明授权
    • Composite nickel fine powder
    • 复合镍细粉
    • US06312622B1
    • 2001-11-06
    • US09699449
    • 2000-10-31
    • Yoshiharu ToshimaTakayuki ArakiYasuhide Yamaguchi
    • Yoshiharu ToshimaTakayuki ArakiYasuhide Yamaguchi
    • H01B102
    • H01G4/0085B22F1/02H01B1/02Y10T428/2991
    • Composite nickel fine powder comprises metal nickel fine particles, at least one member attached to the surface of the fine particles and selected from the group consisting of oxides and double oxides containing at least one metal element selected from the group consisting of the Groups 2 to 14 of the Periodic Table and whose atomic number falls within the range of from 12 to 82, and a saturated or unsaturated fatty acid supported on the surface of the nickel fine particles provided thereon with the oxide and/or double oxide attached thereto. The composite nickel fine powder is excellent in resistance to heat shrinkage, has a high tap density, and has characteristic properties suitable for use as a material for making a conductive paste.
    • 复合镍微粉末包含金属镍微粒,至少一个与微粒表面相连并且选自氧化物和二氧化物的组分,所述氧化物和双氧化物含有至少一种选自第2组至第14组的金属元素 的元素,其原子序数在12〜82的范围内,饱和或不饱和的脂肪酸负载在其上附着有氧化物和/或双氧化物的镍微粒表面上。 复合镍微粉末的耐热收缩性优异,具有高的振实密度,并且具有适用于制造导电浆料的特性。