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    • 42. 发明授权
    • Semiconductor transistors having reduced channel widths and methods of fabricating same
    • 具有减小的沟道宽度的半导体晶体管及其制造方法
    • US07351637B2
    • 2008-04-01
    • US11400842
    • 2006-04-10
    • Jesse Berkley Tucker
    • Jesse Berkley Tucker
    • H01L21/336H01L21/8222H01L21/425
    • H01L29/66068H01L21/046H01L29/7827
    • A method of forming a channel in a semiconductor device including forming an opening in a masking layer to expose a portion of an underlying semiconductor layer through the opening is provided. The method further includes disposing a screening layer and implanting a first type of ions in the portion of the underlying semiconductor layer through the screening layer and through the opening in the masking layer. A second type of ions are implanted in the portion of the underlying semiconductor layer through the screening layer and through the opening in the masking layer at an oblique ion implantation angle wherein a lateral spread of second type ions is greater than a lateral spread of first type ions. Semiconductor devices fabricated in accordance to above said method is also provided.
    • 提供一种在半导体器件中形成通道的方法,包括在掩模层中形成开口以通过开口暴露下面的半导体层的一部分。 该方法还包括设置屏蔽层并且通过屏蔽层和穿过屏蔽层中的开口将下一半导体层的部分中的第一类型的离子注入。 第二类型的离子通过屏蔽层注入到下面的半导体层的部分中,并以斜离子注入角通过掩模层中的开口,其中第二类型离子的横向扩展大于第一类型的横向扩展 离子。 还提供了根据上述方法制造的半导体器件。