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    • 42. 发明申请
    • PHOTOLITHOGRAPHY SYSTEM
    • 光刻系统
    • US20090040485A1
    • 2009-02-12
    • US12185202
    • 2008-08-04
    • Takashi OkuyamaYoshinori Kobayashi
    • Takashi OkuyamaYoshinori Kobayashi
    • G03B27/42G03B27/54
    • G03F7/70508G03F7/70275G03F7/70291G03F7/704
    • A photolithography system has at least one spatial light modulator, a scanning mechanism configured to move an exposure area relative to a target object in a scanning direction, a plurality of memories (1st to Nth memories), a data processor, and exposure controller. The exposure area is defined as a projection area of the spatial light modulator. The plurality of memories corresponds to a plurality of partial exposure areas that is defined by dividing the exposure area. The data processor successively writes exposure data into each memory in accordance with the timing of an exposure, and the exposure controller controls the plurality of light modulating elements on the basis of the relative position of the exposure area. The data processor writes newly generated exposure data into the first memory, and shifts exposure data stored in the 1st to (N−1)st memories to the 2nd to Nth memories, respectively.
    • 光刻系统具有至少一个空间光调制器,被配置为沿扫描方向相对于目标物体移动曝光区域的扫描机构,多个存储器(第1至第N存储器),数据处理器和曝光控制器。 曝光区域被定义为空间光调制器的投影区域。 多个存储器对应于通过划分曝光区域限定的多个部分曝光区域。 数据处理器根据曝光的定时将曝光数据连续地写入每个存储器,并且曝光控制器基于曝光区域的相对位置控制多个光调制元件。 数据处理器将新产生的曝光数据写入第一存储器,并将存储在第1至第(N-1)个存储器中的曝光数据分别移位到第2至第N存储器。
    • 47. 发明授权
    • Data processing apparatus
    • 数据处理装置
    • US06952787B2
    • 2005-10-04
    • US10772352
    • 2004-02-06
    • Mitsuaki OshimaYoshihiro GoharaYoshinori KobayashiShozo FujiwaraTsuyoshi Uemura
    • Mitsuaki OshimaYoshihiro GoharaYoshinori KobayashiShozo FujiwaraTsuyoshi Uemura
    • G06F1/32
    • G06F1/3218G06F1/3203G06F1/3265G06F1/3287G06F1/3293Y02D10/122Y02D10/153Y02D10/171
    • A data processing apparatus has a first processing unit for processing an input data, a second processing unit responsive to the data processed by the first processing unit for executing a processing dependent on the data and producing a display data, and a display unit having a display drive unit and a display device for displaying the display data. The second also selectively inactivated and activated under control of the first processing unit to reduce power consumption in the second processing unit. The display drive unit is also selectively inactivated and activated under control of the first processing unit to reduce power consumption in the display unit. The display device has a memory function that maintains its display image even when supply of a display drive signal from the display drive unit is stopped, so that a latest image before inactivation of the second processing unit and/or the display drive unit for power consumption reduction is visible by an operator during the inactivated and low power consumption state of the apparatus.
    • 数据处理装置具有用于处理输入数据的第一处理单元,响应于由第一处理单元处理的数据执行取决于数据的处理并产生显示数据的第二处理单元和具有显示器的显示单元 驱动单元和用于显示显示数据的显示装置。 第二处理单元在第一处理单元的控制下也选择性地停用和激活第二处理单元,以减少第二处理单元的功耗。 显示驱动单元还在第一处理单元的控制下被选择性地禁用和激活,以减少显示单元中的功耗。 显示装置具有即使在停止来自显示驱动单元的显示驱动信号的供给时也保持其显示图像的存储功能,从而在停止第二处理单元和/或显示驱动单元的功率消耗之前的最新图像 在设备的失活和低功耗状态期间,操作者可以看到减少。