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41. 发明授权

US5207437A Ceramic electrostatic wafer chuck 失效
标题翻译：陶瓷静电晶片卡盘
公开(公告)号：US5207437A
公开(公告)日：1993-05-04
申请号：US784291
申请日：1991-10-29
申请人： Michael S. Barnes , Dennis K. Coultas , John C. Forster , John H. Keller
发明人： Michael S. Barnes , Dennis K. Coultas , John C. Forster , John H. Keller
IPC分类号： B23Q3/15 , H01L21/683 , H02N13/00
CPC分类号： B23Q3/15 , H01L21/6831 , Y10T279/23
摘要： An electrostatic chuck for semiconductor wafers comprised of a multilayered ceramic, including a back-side-metal layer pattern adjacent the upper wafer receiving surface for generating an electrostatic force. Intermediate via layers connect the pattern to a back-side-metal layer at the bottom of the chuck to which power leads can be connected. A number of small passages, extending from the bottom of the chuck to its upper surface, allow helium heat transfer without the need for surface grooves.
摘要翻译：一种用于半导体晶片的静电卡盘，包括多层陶瓷，其包括邻近上晶片接收表面的背侧金属层图案，用于产生静电力。中间通孔层将图案连接到可连接电源线的卡盘底部的背侧金属层。从卡盘的底部延伸到其上表面的许多小通道允许氦热传递而不需要表面凹槽。

42. 发明授权

US5189446A Plasma wafer processing tool having closed electron cyclotron resonance 失效
标题翻译：具有闭合电子回旋共振的等离子体晶片加工工具
公开(公告)号：US5189446A
公开(公告)日：1993-02-23
申请号：US702654
申请日：1991-05-17
申请人： Michael S. Barnes , John C. Forster , John H. Keller
发明人： Michael S. Barnes , John C. Forster , John H. Keller
IPC分类号： H01J37/32
CPC分类号： H01J37/32192 , H01J37/32678
摘要： A cylindrical plasma reaction chamber is equipped with a pair of axially separated solenoid coils and a multipole magnet structure extending between the coil pair. An axially-directed magnetic field and a transverse cusp field are respectively provided by the coils and the magnet. A working gas is contained within the chamber and is excited by applied microwave energy. The strengths of the two magnetic fields and the microwave frequency value are selected to produce a substantially closed electron cyclotron resonance (ECR) zone of proper size. This ECR zone is located axially between the solenoid fields. Baffling is used to separate the closed plasma ECR zone from the workpiece region of the chamber. A semiconductor wafer is positioned within the workpiece region to intercept most plasma particles which follow the axially directed magnetic lines passing through the ECR zone. Few of the particles from the closed ECR zone travel to destinations other than the wafer.
摘要翻译：圆柱形等离子体反应室配备有一对轴向分离的电磁线圈和在线圈对之间延伸的多极磁体结构。分别由线圈和磁体提供轴向磁场和横向尖点场。工作气体包含在室内，并被施加的微波能量激发。选择两个磁场的强度和微波频率值以产生具有适当尺寸的基本闭合的电子回旋共振（ECR）区域。该ECR区位于电磁场之间。 Baffling用于将封闭的等离子体ECR区域与腔室的工件区域分开。半导体晶片位于工件区域内，以拦截大部分遵循经过ECR区的轴向定向磁线的等离子体颗粒。来自闭合的ECR区域的少量颗粒行进到晶片以外的目的地。

43. 发明授权

US09430090B2 Switch system for outputting multimedia content to a digital sign 有权
标题翻译：用于将多媒体内容输出到数字标牌的开关系统
公开(公告)号：US09430090B2
公开(公告)日：2016-08-30
申请号：US13750857
申请日：2013-01-25
申请人： Michael S. Barnes
发明人： Michael S. Barnes
IPC分类号： G09G5/00 , G06F3/042 , H04N21/81
CPC分类号： G06F3/042 , G09G5/006 , G09G2380/06 , H04N21/8186
摘要： The present invention extends to a switch system for selecting multimedia content from one or various source inputs to be provided to a digital display. The switch system of the present invention provides a compact, convenient, and simple to use solution for updating a digital display in many environments. The switch system employs an IR touch screen for receiving user input. Based on the user input received by the IR touch screen, control signals are generated that control the position of a switch for selecting a source of content for display.
摘要翻译：本发明延伸到用于从要提供给数字显示器的一个或多个源输入中选择多媒体内容的开关系统。本发明的开关系统提供了在许多环境中更新数字显示器的紧凑，方便和易于使用的解决方案。开关系统采用IR触摸屏来接收用户输入。基于由IR触摸屏接收的用户输入，产生控制信号，控制用于选择用于显示的内容源的开关的位置。

44. 发明授权

US09157145B2 Processing tool with combined sputter and evaporation deposition sources 有权
标题翻译：具有组合溅射和蒸发沉积源的加工工具
公开(公告)号：US09157145B2
公开(公告)日：2015-10-13
申请号：US12512010
申请日：2009-07-29
申请人： D. Guy Eristoff , Michael S. Barnes , Arthur C. Wall , Terry Bluck
发明人： D. Guy Eristoff , Michael S. Barnes , Arthur C. Wall , Terry Bluck
IPC分类号： C23C18/54 , C23C14/34 , C23C14/22 , C23C14/24 , C23C14/56
CPC分类号： C23C14/22 , C23C14/24 , C23C14/34 , C23C14/568
摘要： A substrate processing system particularly suitable for fabricating solar cells. The system has a front end module transporting cassettes, each cassette holding a preset number of substrates therein; a loading module coupled to the front end module and having mechanism for loading substrates from the cassettes onto carriers; and a plurality of processing chambers coupled to each other in series, each having tracks for transporting the carriers directly from one chamber to the next; wherein selected chambers of the plurality of processing chambers comprise at least one combination source having a sputtering module and an evaporation module arranged linearly in the direction of travel of the carriers.
摘要翻译：特别适用于制造太阳能电池的基板处理系统。系统具有运送盒的前端模块，每个盒在其中保持预设数量的基板; 耦合到所述前端模块并具有用于将所述盒从所述盒装载到载体上的机构的装载模块; 以及串联连接的多个处理室，每个处理室具有用于将载体从一个室直接传送到下一个的轨道; 其中所述多个处理室中的所选择的腔室包括至少一个组合源，其具有溅射模块和沿所述载体行进方向线性布置的蒸发模块。

45. 发明申请

US20140043296A1 Switch System for Outputting Multimedia Content to a Digital Sign 有权
标题翻译：用于将多媒体内容输出到数字标牌的开关系统
公开(公告)号：US20140043296A1
公开(公告)日：2014-02-13
申请号：US13750857
申请日：2013-01-25
申请人： Michael S. Barnes
发明人： Michael S. Barnes
IPC分类号： G06F3/042
CPC分类号： G06F3/042 , G09G5/006 , G09G2380/06 , H04N21/8186
摘要： The present invention extends to a switch system for selecting multimedia content from one or various source inputs to be provided to a digital display. The switch system of the present invention provides a compact, convenient, and simple to use solution for updating a digital display in many environments. The switch system employs an IR touch screen for receiving user input. Based on the user input received by the IR touch screen, control signals are generated that control the position of a switch for selecting a source of content for display.
摘要翻译：本发明延伸到用于从要提供给数字显示器的一个或多个源输入中选择多媒体内容的开关系统。本发明的开关系统提供了在许多环境中更新数字显示器的紧凑，方便和易于使用的解决方案。开关系统采用IR触摸屏来接收用户输入。基于由IR触摸屏接收的用户输入，产生控制信号，控制用于选择用于显示的内容源的开关的位置。

46. 发明申请

US20120224116A1 MENU DISPLAY CABINET 审中-公开
公开(公告)号：US20120224116A1
公开(公告)日：2012-09-06
申请号：US13366114
申请日：2012-02-03
申请人： Michael S. Barnes
发明人： Michael S. Barnes
IPC分类号： G02F1/13357 , F21V21/00
CPC分类号： G09F7/18 , G09F9/30 , G09F13/04 , G09F15/0012 , G09F2007/1843 , G09F2007/1891
摘要： A modular display for housing both digital and static display is disclosed herein. The modular display includes a cabinet having an external frame and a display chassis. The display chassis is shaped and sized so that it can be selectively inserted into and selectively coupled to the external frame of the cabinet. Both a static display chassis and a digital display chassis serve as display chassis that can interchanged within the modular display. The static display chassis housing includes a static light source and a static display. The digital display chassis housing includes a digital display.
摘要翻译：本文公开了一种用于容纳数字和静态显示器的模块化显示器。模块化显示器包括具有外部框架和显示器底盘的机壳。显示器底盘的形状和尺寸使得其可选择性地插入并选择性地联接到机壳的外框。静态显示器机箱和数字显示器机箱均可用作可在模块化显示屏内互换的显示器机箱。静态显示器底盘壳体包括静态光源和静态显示器。数字显示机壳体包括数字显示器。

47. 发明申请

US20110216263A1 VENTED MENU DISPLAY CABINET 审中-公开
标题翻译：显示菜单显示柜
公开(公告)号：US20110216263A1
公开(公告)日：2011-09-08
申请号：US12984493
申请日：2011-01-04
申请人： Michael S. Barnes
发明人： Michael S. Barnes
IPC分类号： G02F1/1333
CPC分类号： G02F1/1333
摘要： The invention relates to a display cabinet system that includes a lamp assembly that is hingedly attached to a chassis body. The chassis body is coupled to an LCD display unit and is contained within a cabinet body. A cabinet cooling system is included with the display cabinet system which includes air intake vents, air exhaust vents and air channels throughout the interior of the display cabinet. One of the air channel of the cabinet cooling system is between the LCD display unit and the lamp assembly.
摘要翻译：本发明涉及一种显示柜系统，其包括铰接地附接到底盘主体的灯组件。底盘主体连接到LCD显示单元并且被包含在机壳主体内。显示柜系统包括机柜冷却系统，包括进气口，排风口和整个橱柜内部的空气通道。机柜冷却系统的空气通道之一在LCD显示单元和灯组件之间。

48. 发明授权

US07901539B2 Apparatus and methods for transporting and processing substrates 有权
标题翻译：用于运输和处理基板的装置和方法
公开(公告)号：US07901539B2
公开(公告)日：2011-03-08
申请号：US11523101
申请日：2006-09-19
申请人： Terry Bluck , Kevin P Fairbairn , Michael S. Barnes , Christopher T. Lane
发明人： Terry Bluck , Kevin P Fairbairn , Michael S. Barnes , Christopher T. Lane
IPC分类号： C23F1/00 , H01L21/306 , C23C16/00 , C23C14/00
CPC分类号： H01L21/67184 , H01L21/67173 , H01L21/67196 , H01L21/67201 , H01L21/67745
摘要： There is described apparatus and methods for transporting and processing substrates including wafers as to efficiently produce at reasonable costs improved throughput as compared to systems in use today. A key element is the use of a transport chamber along the sides of processing chambers for feeding substrates into a controlled atmosphere through a load lock and then along a transport chamber as a way of reaching processing chambers and then out of the controlled atmosphere following processing in the processing chambers.
摘要翻译：描述了与目前使用的系统相比，用于运输和处理包括晶片的基板以便以合理的成本有效地生产提高的生产量的装置和方法。关键要素是沿着处理室的侧面使用传送室，用于通过装载锁定将基板输送到受控气氛中，然后沿着传送室作为到达处理室的方式，然后在受控气氛中进行处理处理室。

49. 发明申请

US20100024731A1 PROCESSING TOOL WITH COMBINED SPUTTER AND EVAPORATION DEPOSITION SOURCES 有权
标题翻译：具有组合式喷雾器和蒸发沉积源的加工工具
公开(公告)号：US20100024731A1
公开(公告)日：2010-02-04
申请号：US12512010
申请日：2009-07-29
申请人： D. Guy ERISTOFF , Michael S. Barnes , Arthur C. Wall , Terry Bluck
发明人： D. Guy ERISTOFF , Michael S. Barnes , Arthur C. Wall , Terry Bluck
IPC分类号： C23C16/54 , C23C14/34
CPC分类号： C23C14/22 , C23C14/24 , C23C14/34 , C23C14/568
摘要： A substrate processing system particularly suitable for fabricating solar cells. The system has a front end module transporting cassettes, each cassette holding a preset number of substrates therein; a loading module coupled to the front end module and having mechanism for loading substrates from the cassettes onto carriers; and a plurality of processing chambers coupled to each other in series, each having tracks for transporting the carriers directly from one chamber to the next; wherein selected chambers of the plurality of processing chambers comprise at least one combination source having a sputtering module and an evaporation module arranged linearly in the direction of travel of the carriers.
摘要翻译：特别适用于制造太阳能电池的基板处理系统。系统具有运送盒的前端模块，每个盒在其中保持预设数量的基板; 耦合到所述前端模块并具有用于将所述盒从所述盒装载到载体上的机构的装载模块; 以及串联连接的多个处理室，每个处理室具有用于将载体从一个室直接传送到下一个的轨道; 其中所述多个处理室中的所选择的腔室包括至少一个组合源，其具有溅射模块和沿所述载体行进方向线性布置的蒸发模块。

50. 发明申请

US20090191030A1 APPARATUS AND METHODS FOR TRANSPORTING AND PROCESSING SUBSTRATES 有权
标题翻译：用于运输和处理基板的装置和方法
公开(公告)号：US20090191030A1
公开(公告)日：2009-07-30
申请号：US12368241
申请日：2009-02-09
申请人： Terry Bluck , Kevin P. Fairbairn , Michael S. Barnes , Christopher T. Lane
发明人： Terry Bluck , Kevin P. Fairbairn , Michael S. Barnes , Christopher T. Lane
IPC分类号： H01L21/677
CPC分类号： H01L21/67745 , C23C14/568 , C23C16/54 , C23C16/545 , H01L21/67167 , H01L21/67173 , H01L21/67184 , H01L21/67196 , H01L21/67201 , H01L21/67709
摘要： There is described apparatus and methods for transporting and processing substrates including wafers as to efficiently produce at reasonable costs improved throughput as compared to systems in use today. A linear transport chamber includes linear tracks and robot arms riding on the linear tracks to linearly transfer substrates along the sides of processing chambers for feeding substrates into a controlled atmosphere through a load lock and then along a transport chamber as a way of reaching processing chambers.
摘要翻译：描述了与目前使用的系统相比，用于运输和处理包括晶片的基板以便以合理的成本有效地生产提高的生产量的装置和方法。线性传送室包括线性轨道和机器人手臂，该线性轨道和机器人臂骑在线性轨道上，以沿着处理室的侧面线性地传送衬底，用于通过负载锁定将衬底馈送到受控气氛中，然后沿着运送室作为到达处理室的方式。

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