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41. 发明授权

US08048687B2 Processing method for recovering a damaged low-k film of a substrate and storage medium 有权
标题翻译：用于回收基板和存储介质的损坏的低k膜的处理方法
公开(公告)号：US08048687B2
公开(公告)日：2011-11-01
申请号：US12791082
申请日：2010-06-01
申请人： Wataru Shimizu , Kazuhiro Kubota , Daisuke Hayashi
发明人： Wataru Shimizu , Kazuhiro Kubota , Daisuke Hayashi
IPC分类号： H01L21/00
CPC分类号： H01L21/76814 , H01L21/3105 , H01L21/76826 , Y10S438/935
摘要： There is provided a processing method for performing a recovery process on a damaged layer formed on a surface of a low-k film of a target substrate by introducing a processing gas containing a methyl group into a processing chamber. The method includes: increasing an internal pressure of the processing chamber up to a first pressure lower than a processing pressure for the recovery process by introducing a dilution gas into the processing chamber maintained in a depressurized state; then stopping the introduction of the dilution gas, and increasing the internal pressure of the processing chamber up to a second pressure as the processing pressure for the recovery process by introducing the processing gas into a region where the target substrate exists within the processing chamber; and performing the recovery process on the target substrate while the processing pressure is maintained.
摘要翻译：提供了一种处理方法，用于通过将含有甲基的处理气体引入处理室来对目标衬底的低k膜的表面上形成的损伤层进行恢复处理。该方法包括：通过将稀释气体引入维持在减压状态的处理室中，将处理室的内部压力提高到低于回收处理的处理压力的第一压力; 然后停止引入稀释气体，并且通过将处理气体引入到处理室内存在目标衬底的区域中，将处理室的内部压力提高到第二压力作为回收处理的处理压力; 并且在维持处理压力的同时对目标基板进行恢复处理。

42. 发明申请

US20110207864A1 POLYORGANOSILOXANE COMPOSITION AND CURED PRODUCTION THEREOF 有权
标题翻译：聚硅氧烷组合物及其固化生产
公开(公告)号：US20110207864A1
公开(公告)日：2011-08-25
申请号：US13124492
申请日：2009-10-22
申请人： Shuhei Nakamura , Hiroaki Cho , Yasunori Ashida , Yasushi Murakami , Wataru Shimizu
发明人： Shuhei Nakamura , Hiroaki Cho , Yasunori Ashida , Yasushi Murakami , Wataru Shimizu
IPC分类号： C08K5/11 , C08K5/07
CPC分类号： C08G79/00 , C08G77/16 , C08G79/14 , C08K5/0091 , C08K5/057 , C08K5/07 , C08K5/10 , C08K5/11 , C08L83/06 , C08L83/04
摘要： Disclosed are: a polyorganosiloxane composition which can be cured into a product having high strength and has little influence on the environment; and a cured product of the polyorganosiloxane composition. Specifically disclosed are: a polyorganosiloxane composition comprising (A) a polyorganosiloxane in which at least one end in the molecule is modified with a silanol, (B) a titanium alkoxide in an amount of 0.01 to 2 moles relative to 1 mole of the polyorganosiloxane, and (C) an α-hydroxycarbonyl compound or a hydroxycarboxylic acid ester in an amount of 0.01 to 2 moles relative to 1 mole of the polyorganosiloxane; and a cured product of the polyorganosiloxane composition.
摘要翻译：公开了一种聚有机硅氧烷组合物，其可以固化成具有高强度并且对环境影响很小的产品; 和聚有机硅氧烷组合物的固化产物。具体公开的是：聚有机硅氧烷组合物，其包含（A）聚有机硅氧烷，其中分子中的至少一个末端用硅烷醇改性，（B）相对于1摩尔聚有机硅氧烷0.01至2摩尔量的钛醇盐，和（C）相对于1摩尔聚有机硅氧烷为0.01〜2摩尔的α-羟基羰基化合物或羟基羧酸酯; 和聚有机硅氧烷组合物的固化产物。

43. 发明申请

US20090209111A1 Method for fabricating semiconductor device 有权
标题翻译：制造半导体器件的方法
公开(公告)号：US20090209111A1
公开(公告)日：2009-08-20
申请号：US12379195
申请日：2009-02-13
申请人： Wataru Shimizu , Ikuo Kurachi
发明人： Wataru Shimizu , Ikuo Kurachi
IPC分类号： H01L21/31 , H01L21/26
CPC分类号： H01L21/2686 , H01L29/66772 , H01L2924/0002 , H01L2924/00
摘要： A method for fabricating a semiconductor device, according to the present invention includes the steps of: preparing an SOI substrate, which comprises a semiconductor supporting layer, an oxide layer formed on the semiconductor supporting layer and an SOI layer formed on the oxide layer; forming a semiconductor device on the SOI layer; forming a passivation layer over the SOI substrate, the passivation layer allowing a UV light to pass through it; and applying a UV light to the SOI substrate after the step of forming the semiconductor device is completed.
摘要翻译：根据本发明的制造半导体器件的方法包括以下步骤：制备SOI衬底，其包括半导体支撑层，形成在半导体支撑层上的氧化物层和形成在氧化物层上的SOI层; 在SOI层上形成半导体器件; 在所述SOI衬底上形成钝化层，所述钝化层允许UV光穿过所述钝化层; 并且在形成半导体器件的步骤完成后，向SOI衬底施加UV光。

44. 发明授权

US07551184B2 Information processing apparatus and information processing method, and program 有权
标题翻译：信息处理装置和信息处理方法及程序
公开(公告)号：US07551184B2
公开(公告)日：2009-06-23
申请号：US11462524
申请日：2006-08-04
申请人： Wataru Shimizu
发明人： Wataru Shimizu
IPC分类号： G09G5/00 , G06F3/00 , G06F3/048
CPC分类号： G06F3/0481
摘要： There is disclosed a highly convenient user interface which can suitably perform enlarged display of a designated object and suitably allow the user to operate original objects occluded under the object which undergoes the enlarged display or the like. An arbitrary position on a reduced image displayed on a screen of a display unit is designated using a pointer. A pointer sensing unit determines whether or not the designated position falls within the display range of the reduced image, and an enlarged image corresponding to the reduced image is displayed at a position according to the designated position of the pointer within that region.
摘要翻译：公开了一种非常方便的用户界面，其可以适当地执行指定对象的放大显示，并且适当地允许用户操作封闭在经历放大显示等的对象下的原始对象。使用指针指定在显示单元的画面上显示的缩小图像上的任意位置。指针感测单元确定指定位置是否落在缩小图像的显示范围内，并且与缩小图像相对应的放大图像被显示在根据该区域内指针的指定位置的位置。

45. 发明授权

US07097700B2 Water-soluble complex dye, recording fluid and recording method 有权
公开(公告)号：US07097700B2
公开(公告)日：2006-08-29
申请号：US11024302
申请日：2004-12-29
申请人： Wataru Shimizu
发明人： Wataru Shimizu
IPC分类号： C09D11/02 , C09B45/00
CPC分类号： C09D11/328 , C09B45/18 , C09B45/22 , C09B45/24 , C09B45/34 , C09B67/0083 , C09D11/40
摘要： A water-soluble complex dye capable of forming an image having light resistance, ozone resistance and high saturation; a water-based recording fluid, particularly an ink jet recording fluid, employing such a dye; and an ink jet recording method, are presented.

46. 发明授权

US06737517B2 Metal chelated azo dyestuff for inkjet recording and recording liquid for inkjet and inkjet recording method using same 有权
标题翻译：用于喷墨记录和记录液体的金属螯合偶氮染料用于喷墨和喷墨记录方法
公开(公告)号：US06737517B2
公开(公告)日：2004-05-18
申请号：US10216290
申请日：2002-08-12
申请人： Wataru Shimizu
发明人： Wataru Shimizu
IPC分类号： C09B4524
CPC分类号： C09D11/328 , C09B45/24
摘要： A metal chelated azo dyestuff containing at least one hydrophilic group and having formula (1): wherein M is a metal; A, B and C are each independently a substituted or unsubstituted aromatic ring; D is an aromatic ring optionally substituted by a group other than an azo group; m is 0 or 1; n is an integer from 0 to 3; p is an integer from 0 to 2; q is an integer from 1 to 3; with the proviso that in the event of a plurality of B's, they are the same or different; R1 and R2 are each independently hydrogen or a substituent group; M is tridentate or of higher coordination; and optionally a metal ion coordinated to A and B, B and B in the event of plural B's separated by azo or B and C, in the form of the structure: —O—M—O—.
摘要翻译：含有至少一个亲水基团并具有式（1）的金属螯合偶氮染料：其中M是金属; A，B和C各自独立地为取代或未取代的芳环; D是任选被除偶氮基以外的基团取代的芳香环; m为0或1; n为0〜3的整数。 p是从0到2的整数; q是1至3的整数; 条件是在多个B的情况下，它们是相同的或不同的; R1和R2各自独立地为氢或取代基; M是三位或更高的协调; 并且任选地在多个B被偶氮或B和C分隔的情况下与A和B，B和B配位的金属离子，结构为：-O-M-O-。

47. 发明授权

US06433337B1 Method for detecting carrier profile 失效
标题翻译：检测载体轮廓的方法
公开(公告)号：US06433337B1
公开(公告)日：2002-08-13
申请号：US09472814
申请日：1999-12-28
申请人： Wataru Shimizu
发明人： Wataru Shimizu
IPC分类号： G01N2300
CPC分类号： G01R31/311 , G01R31/2831
摘要： The object is to provide a method capable of detecting the carrier profile with ease and without any limitation. The method for detecting the carrier profile 100 includes a measurement step 110, the first analysis step 120, and the second analysis 130. In the measurement step 100, a p-n junction portion 150 (FIG. 2) to which a bias voltage is applied, is irradiated with laser beams P1 (FIG. 2) capable of moving the irradiation position thereof, thereby detecting the relation between the irradiation position and the OBIC generated in the p-n junction portion. In the first analysis step 120, there is detected, based on the relation as detected in the measurement step 110, the relation between the expanded width of a depletion layer generated in the p-n junction portion and the bias voltage. In the second analysis step 130, there is detected, based on the relation as detected in the first analysis step 120, a carrier profile in the p-n junction portion.
摘要翻译：本发明的目的是提供能够容易且无任何限制地检测载体轮廓的方法。用于检测载体轮廓100的方法包括测量步骤110，第一分析步骤120和第二分析130.在测量步骤100中，施加偏置电压的pn结部分150（图2）用能够移动其照射位置的激光束P1（图2）照射，从而检测在pn结部分产生的照射位置与OBIC之间的关系。在第一分析步骤120中，基于在测量步骤110中检测到的关系，检测在p-n结部分中产生的耗尽层的扩展宽度与偏置电压之间的关系。在第二分析步骤130中，基于第一分析步骤120中检测到的关系，检测p-n结部分中的载体轮廓。

48. 发明授权

US5440024A 3-cyano-5-nitrothiophene type monoazo dyes and mixtures thereof 失效
标题翻译： 3-氰基-5-硝基噻吩型单偶氮染料及其混合物
公开(公告)号：US5440024A
公开(公告)日：1995-08-08
申请号：US90311
申请日：1993-07-13
申请人： Kiyoshi Himeno , Toshio Hihara , Wataru Shimizu
发明人： Kiyoshi Himeno , Toshio Hihara , Wataru Shimizu
IPC分类号： C09B29/00 , C09B29/42 , C09B67/22 , D06P3/54 , C09B29/033 , C09B29/33 , C09B29/36 , D06P1/18
CPC分类号： C09B67/0051 , C09B29/0059 , C09B29/3639
摘要： A monoazo disperse dye for dyeing polyester fibers of the following formula (I): ##STR1## wherein one of R.sup.1 and R.sup.2 is ##STR2## wherein W is hydrogen, halogen, C.sub.1 -C.sub.2 alkyl or alkoxy, the other of R.sup.1 and R.sup.2 is C.sub.1 -C.sub.4 alkyl, or C.sub.2 -C.sub.4 alkyl substituted by cyano, halogen, hydroxy, hydroxyalkoxy, C.sub.1 -C.sub.4 alkoxy, hydroxyalkoxyalkoxy, acetoxalkoxy, acyloxyalkoxyalkoxy alkoxyalkoxy, alkoxycarbonyloxy or acetoxy, and Y is hydrogen or halogen.
摘要翻译：用于染色下式（I）的聚酯纤维的单偶氮分散染料：其中R 1和R 2之一是其中W是氢，卤素，C 1 -C 2烷基或烷氧基，R 1中的另一个或被氰基，卤素，羟基，羟基烷氧基，C 1 -C 4烷氧基，羟基烷氧基烷氧基，乙酰氧基烷氧基，酰氧基烷氧基烷氧基烷氧基，烷氧基羰基氧基或乙酰氧基取代的C 2 -C 4烷基，Y为氢或卤素。

49. 发明授权

US4612503A Rotation speed detection device having a rotation angle detector of inductive type 失效
标题翻译：具有感应式旋转角度检测器的转速检测装置
公开(公告)号：US4612503A
公开(公告)日：1986-09-16
申请号：US311277
申请日：1981-10-14
申请人： Wataru Shimizu , Akira Yamashita
发明人： Wataru Shimizu , Akira Yamashita
IPC分类号： G01B7/30 , G01D5/243 , G01B7/14 , G01P3/42 , G08C19/16
CPC分类号： G01D5/243 , G01B7/30
摘要： A detection head unit comprises a stator and a rotor. The stator has four poles disposed circumferentially at an interval of 90.degree.. The poles have primary coils and secondary coils wound thereon. Two radially opposing poles constitute a pole pair. The primary coils wound on the poles constituting the pole pair are connected in series and in opposite phase with each other and one pole pair is excited by a sine wave signal and the other pole pair by a cosine wave signal. The rotor is of such a configuration, e.g. an eccentric rotor, as to change reluctance of the respective stator poles in accordance with a rotation angle and change reluctance in a differential manner between the two poles constituting the pole pair. An output signal resulting by phase shifting the sine wave signal applied to the primary coil in accordance with a rotation angle of the rotor is provided by a secondary coil. The rotation angle is detected by measuring phase difference between the reference signal and the output signal of the secondary coil. The rotation speed can be detected by detecting difference in frequency or period between the reference signal and the output signal. Further, acceleration in rotation can be detected by detecting an amount of change in the rotation speed. The detection device of a high resolution can be obtained by providing teeth of a certain pitch on the periphery of the rotor and teeth corresponding to the rotor teeth on the stator poles.
摘要翻译：检测头单元包括定子和转子。定子有四个磁极，以90°的间隔圆周设置。极具有初级线圈和二次线圈缠绕在其上。两个径向相对的极构成极对。缠绕在构成极对的极点上的初级线圈串联连接并且彼此相反，并且一个极对被正弦波信号激励，另一个极对被余弦波信号激励。转子具有这样的构造，例如，偏心转子，以根据旋转角度改变各个定子极的磁阻，并且以构成极对的两极之间的差动方式改变磁阻。由次级线圈提供通过根据转子的旋转角度相移施加到初级线圈的正弦波信号而产生的输出信号。通过测量参考信号和次级线圈的输出信号之间的相位差来检测旋转角度。可以通过检测参考信号和输出信号之间的频率或周期的差异来检测转速。此外，可以通过检测转速的变化量来检测旋转加速度。高分辨率的检测装置可以通过在转子周边设置一定间距的齿和与定子极上的转子齿对应的齿来获得。

50. 发明授权

US4556886A Phase shift type linear position detection device 失效
标题翻译：相移型线性位置检测装置
公开(公告)号：US4556886A
公开(公告)日：1985-12-03
申请号：US348674
申请日：1982-02-16
申请人： Wataru Shimizu , Akira Yamashita
发明人： Wataru Shimizu , Akira Yamashita
IPC分类号： G01B7/02 , G01D5/243 , G01D5/245 , G08C19/06 , G01B7/14
CPC分类号： G01D5/243 , G01B7/02
摘要： About a bobbin, there are wound primary coils in axially displaced locations and wound also is a secondary coil. A core is linearly slidably provided in the bobbin. The primary coils are individually excited by AC signals which are out of phase with each other, e.g. a sine wave signal and a cosine wave signal. The secondary coil thereupon produces an output signal resulting from phase shifting the applied sine or cosine wave signal in accordance with a linear position of the core. Accordingly, the linear position can be detected by measuring phase difference between a reference AC signal and the output signal of the secondary coil. Likewise, velocity and acceleration change may be determined using the position change data.
摘要翻译：关于绕线筒，在轴向移位的位置上缠绕有初级线圈，并且绕组也是次级线圈。芯线可线性地设置在线轴中。初级线圈由彼此异相的AC信号单独激发，例如，正弦波信号和余弦波信号。次级线圈随后产生根据芯线的线性位置相移所施加的正弦或余弦波信号而产生的输出信号。因此，可以通过测量参考AC信号和次级线圈的输出信号之间的相位差来检测线性位置。同样，可以使用位置变化数据来确定速度和加速度变化。

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