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41. 发明授权

US5120509A Method and apparatus for reducing defects in SOI structures 失效
标题翻译：减少SOI结构缺陷的方法和装置
公开(公告)号：US5120509A
公开(公告)日：1992-06-09
申请号：US608559
申请日：1990-11-02
申请人： Paul M. Zavracky , Thomas P. Ford , Lisa P. Allen
发明人： Paul M. Zavracky , Thomas P. Ford , Lisa P. Allen
IPC分类号： C30B13/00 , C30B13/16
CPC分类号： C30B29/06 , C30B13/16
摘要： A method and apparatus for reducing branching, reducing defects, and improving the overall surface morphology of silicon on insulator (SOI) structures produced by Zone Melting and Recrystallization (ZMR) is described. A special heater for use in preparing SOI structures formed by ZMR comprises a graphite mass having corrugations extending along one or more side walls and which may be periodic. The heater provides concentrated regions of heat which vary periodically across the length of the molten zone of the SOI structure. Alternatively, the heater comprises a stationary lower heater member upon which the wafer is placed and a movable upper heater member having corrugations. ZMR is achieved by translating the corrugated upper heater member past the wafer. In yet another alternative, a well known strip heater having a uniformly shaped movable upper member is improved by replacing the upper member with a movable upper heater member having corrugations.
摘要翻译：描述了通过区域熔融和重结晶（ZMR）产生的减少分支，减少缺陷和改善绝缘体上硅（SOI）结构的整体表面形态的方法和装置。用于制备由ZMR形成的SOI结构的专用加热器包括具有沿着一个或多个侧壁延伸并且可以是周期性的波纹的石墨块。加热器提供在SOI结构的熔融区域的长度上周期性变化的集中区域。或者，加热器包括固定的下部加热器构件，晶片被放置在该下部加热器构件上，以及具有波纹的可移动上部加热器构件。通过将波纹状上部加热器部件平移通过晶片来实现ZMR。在另一替代方案中，通过用具有波纹的可移动的上部加热器构件替换上部构件，改进了具有均匀形状的可移动上部构件的公知的带式加热器。

42. 发明授权

US5074952A Zone-melt recrystallization method and apparatus 失效
标题翻译：区熔融重结晶方法和装置
公开(公告)号：US5074952A
公开(公告)日：1991-12-24
申请号：US372098
申请日：1989-06-28
申请人： Paul M. Zavracky , Jack P. Salerno , Matthew M. Zavracky
发明人： Paul M. Zavracky , Jack P. Salerno , Matthew M. Zavracky
IPC分类号： C30B13/16 , C30B13/28
CPC分类号： C30B13/16 , C30B13/28 , Y10T117/1008 , Y10T117/108 , Y10T117/1088
摘要： The improved zone-melt recrystallization apparatus is comprised of a heating element having a plurality of individually controllable heating elements. The elements are heated in sequence to generate a melted zone within a semiconductor material which is translated across the material by heating then cooling adjacent heating elements to recrystallize the material.
摘要翻译：改进的区域 - 熔融重结晶装置由具有多个可单独控制的加热元件的加热元件组成。这些元件被依次加热以在半导体材料内产生熔融区，该熔融区通过加热然后冷却相邻的加热元件而使材料翻转过材料，从而使材料重结晶。

43. 发明授权

US5034199A Zone melt recrystallization apparatus 失效
标题翻译：区域熔融重结晶装置
公开(公告)号：US5034199A
公开(公告)日：1991-07-23
申请号：US120015
申请日：1987-11-13
申请人： Paul M. Zavracky , Kevin J. O'Connos
发明人： Paul M. Zavracky , Kevin J. O'Connos
IPC分类号： C30B13/00 , C30B13/24 , C30B13/32 , C30B29/06 , C30B31/12 , H01L21/00 , H01L21/20 , H01L21/324
CPC分类号： H01L21/67115 , C30B13/00 , C30B13/24 , C30B13/32 , C30B31/12 , Y10S117/90 , Y10S117/911 , Y10T117/108
摘要： The improved zone-melt recrystallization apparatus is comprised of a port system for providing a thermal barrier between the recrystallization chamber and the loader assembly. A bellows system is used to lift a plurality of pins that support a silicon wafer being recrystallized. Flexure supports are designed to constrain the motion of the pins within the desired direction of motion of the wafer.
摘要翻译：改进的区域 - 熔融重结晶装置包括用于在再结晶室和装载机组件之间提供热障的端口系统。波纹管系统用于提升支撑待重结晶的硅晶片的多个销。弯曲支撑被设计成将销的运动约束在晶片的期望的运动方向上。

44. 发明授权

US4989934A Monolithic integrated transceiver of III-V devices on silicon 失效
标题翻译： III-V器件的单片集成收发器
公开(公告)号：US4989934A
公开(公告)日：1991-02-05
申请号：US431561
申请日：1989-11-03
申请人： Paul M. Zavracky , Matthew M. Zavracky , John C. C. Fan , Jack P. Salerno
发明人： Paul M. Zavracky , Matthew M. Zavracky , John C. C. Fan , Jack P. Salerno
IPC分类号： G02B6/42 , H01L33/00
CPC分类号： G02B6/423 , G02B6/4202 , G02B6/4204 , G02B6/4246 , H01L33/0066 , G02B6/4231
摘要： An monolithic integrated transceiver formed on an Si substrate comprising: a III-V compound light source, a III-V compound light detector and a pyramidal groove formed in the substrate for aligning an optical fiber with said transmitter.
摘要翻译：形成在Si衬底上的单片集成收发器，包括：III-V复合光源，III-V复合光检测器和形成在衬底中用于使光纤与所述发射器对准的金字塔形槽。

45. 发明授权

US4959515A Micromechanical electric shunt and encoding devices made therefrom 失效
标题翻译：由其制造的微机电分流器和编码装置
公开(公告)号：US4959515A
公开(公告)日：1990-09-25
申请号：US12092
申请日：1987-02-06
申请人： Paul M. Zavracky , Richard H. Morrison, Jr.
发明人： Paul M. Zavracky , Richard H. Morrison, Jr.
IPC分类号： B81B3/00 , G06K19/067 , H01H1/00 , H01H59/00
CPC分类号： H01H59/0009 , G06K19/067 , H01H1/0036
摘要： A micromechanical electric shunt is fabricated by micromachining according to recent IC fabrication procedures. A plurality of such shunts is incorporated on a single substrate to form novel process station or post identification or signature encoding apparatus for use on a telecommunications bus or the equivalent. Such identification of signature encoding apparatus may be configured for conventional binary coding. Both frequency and current derivative mode apparatus are disclosed.
摘要翻译：根据最近的IC制造程序通过微加工制造微机电分流器。多个这样的分流器被并入单个基板上以形成用于在电信总线上或其等效物上使用的新的处理站或站点标识或签名编码设备。签名编码装置的这种识别可以被配置用于传统的二进制编码。公开了频率和电流导数模式装置。

46. 发明授权

US07242527B2 Optical system using total internal reflection images 有权
标题翻译：光学系统采用全内反射图像
公开(公告)号：US07242527B2
公开(公告)日：2007-07-10
申请号：US11386466
申请日：2006-03-22
申请人： Mark B. Spitzer , Noa M. Rensing , Paul M. Zavracky
发明人： Mark B. Spitzer , Noa M. Rensing , Paul M. Zavracky
IPC分类号： G02B27/14 , G02B27/30 , G09G5/00
CPC分类号： G02B27/0172 , G02B6/00 , G02B2027/0123
摘要： An optical system for a head mounted display includes a light pipe having two parallel surfaces along which modes can travel by total internal reflection. An illumination element allows selection of modes so that the desired modes can be transmitted along the light pipe, either axially or by total internal reflection.
摘要翻译：用于头戴式显示器的光学系统包括具有两个平行表面的光管，模式可以沿着该平行表面通过全内反射行进。照明元件允许选择模式，使得期望的模式可沿轴向或全内反射传输。

47. 发明授权

US06381022B1 Light modulating device 失效
标题翻译：光调制装置
公开(公告)号：US06381022B1
公开(公告)日：2002-04-30
申请号：US09626678
申请日：2000-07-27
申请人： Paul M. Zavracky
发明人： Paul M. Zavracky
IPC分类号： G01B902
CPC分类号： G02B26/001 , G01J3/0256 , G01J3/10 , G01J3/26
摘要： The present invention relates to microfabricated spectrometers including methods of making and using same. Microspectrometers can be formed in a single chip in which detectors and light sources can be monolithically integrated. The microspectrometer can be integrated into a sensor system to measure the optical and physical properties of solids and fluids.
摘要翻译：本发明涉及微制造的光谱仪，其包括制造和使用它们的方法。显微光谱仪可以在单个芯片中形成，其中检测器和光源可以单片集成。显微光谱仪可以集成到传感器系统中，以测量固体和流体的光学和物理性能。

48. 发明授权

US06261494B1 Method of forming plastically deformable microstructures 有权
标题翻译：形成塑性变形微结构的方法
公开(公告)号：US06261494B1
公开(公告)日：2001-07-17
申请号：US09176789
申请日：1998-10-22
申请人： Paul M. Zavracky , Rick H. Morrison , Keith Warner , Nicol E. McGruer
发明人： Paul M. Zavracky , Rick H. Morrison , Keith Warner , Nicol E. McGruer
IPC分类号： C04B3500
CPC分类号： G02B26/0841 , B81B3/0021 , B81B2201/042 , G01P15/0802
摘要： A method of creating plastically deformed devices which have a three dimensional aspect. Micromechanical structures are created from a material which is plastically deformable and then a section of the structure is bent to an out-of-plane position and can be maintained there without being supported by other mechanical devices such as latches or hinges. The bending of the structures may be done mechanically, by electrostatic forces or by magnetic forces. The bending can also be done in a batch mode where a plurality of devices are bent at the same time as part of the same process. Fuses can be utilized to allow only a predetermined number of devices to be bent in batch mode. The fuses are later blown, thereby providing a plurality of devices which are relatively parallel to the substrate as well as a plurality of devices which are generally out-of-plane with respect to the substrate.
摘要翻译：一种产生具有三维方面的塑性变形装置的方法。微机械结构由塑性变形的材料制成，然后将结构的一部分弯曲到平面外的位置，并且可以保持在其上，而不被诸如闩锁或铰链的其它机械装置支撑。结构的弯曲可以通过静电力或磁力机械地进行。弯曲也可以以分批模式进行，其中多个装置同时作为相同工艺的一部分而弯曲。可以使用保险丝来仅允许以批量模式弯曲预定数量的装置。熔丝随后被吹制，从而提供多个与基板相对平行的装置，以及多个相对于基板超出平面的装置。

49. 发明授权

US6147756A Microspectrometer with sacrificial layer integrated with integrated circuit on the same substrate 失效
标题翻译：具有牺牲层的显微光谱仪与集成电路集成在同一基板上
公开(公告)号：US6147756A
公开(公告)日：2000-11-14
申请号：US232391
申请日：1994-04-25
申请人： Paul M. Zavracky , John R. Martin
发明人： Paul M. Zavracky , John R. Martin
IPC分类号： G01J3/26 , G01B9/02
CPC分类号： G01J3/26 , G01J3/0256
摘要： The present invention relates to microfabricated spectrometers including methods of making and using same. Microspectrometers can be formed in a single chip in which detectors and light sources can be monolithically integrated. The microspectrometer can be integrated into a sensor system to measure the optical and physical properties of solids and fluids.
摘要翻译：本发明涉及微制造的光谱仪，其包括制造和使用它们的方法。显微光谱仪可以在单个芯片中形成，其中检测器和光源可以单片集成。显微光谱仪可以集成到传感器系统中，以测量固体和流体的光学和物理性质。

50. 发明授权

US5909280A Method of monolithically fabricating a microspectrometer with integrated detector 失效
标题翻译：用集成检测器单片制造显微光谱仪的方法
公开(公告)号：US5909280A
公开(公告)日：1999-06-01
申请号：US197112
申请日：1994-02-16
申请人： Paul M. Zavracky
发明人： Paul M. Zavracky
IPC分类号： G01J3/10 , G01J3/26 , G02B26/00 , G01B9/02
CPC分类号： G02B26/001 , G01J3/10 , G01J3/26 , G01J3/0256
摘要： The present invention relates to microfabricated spectrometers including methods of making and using same. Microspectrometers can be formed in a single chip in which detectors and light sources can be monolithically integrated. The microspectrometer can be integrated into a sensor system to measure the optical and physical properties of solids and fluids.
摘要翻译：本发明涉及微制造的光谱仪，其包括制造和使用它们的方法。显微光谱仪可以在单个芯片中形成，其中检测器和光源可以单片集成。显微光谱仪可以集成到传感器系统中，以测量固体和流体的光学和物理性质。

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