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41. 发明申请

US20100231087A1 Micro oscillating element 有权
标题翻译：微振荡元件
公开(公告)号：US20100231087A1
公开(公告)日：2010-09-16
申请号：US12659975
申请日：2010-03-26
申请人： Norinao Kouma , Osamu Tsuboi , Hiromitsu Soneda , Satoshi Ueda , Ippei Sawaki
发明人： Norinao Kouma , Osamu Tsuboi , Hiromitsu Soneda , Satoshi Ueda , Ippei Sawaki
IPC分类号： H02N11/00
CPC分类号： H02N1/008 , G02B26/0841
摘要： A micro oscillating element includes a frame and an oscillation section connected to the frame via a torsional joining section. The oscillation section includes a movable functional section, an arm section and a first comb-tooth electrode. The arm section extends from the functional section. The first comb-tooth electrode includes first electrode teeth extending from the arm section in a direction intersecting the arm section. The micro oscillating element further includes a second comb-tooth electrode to cooperate with the first comb-tooth electrode for causing the oscillation section to oscillate about an oscillation axis defined by the torsional joining section. The second comb-tooth, electrode includes second electrode teeth extending from the frame in a direction intersecting the arm section.
摘要翻译：微振荡元件包括框架和经由扭转接合部分连接到框架的振荡部分。振荡部包括可动功能部，臂部和第一梳齿电极。臂部分从功能部分延伸。第一梳齿电极包括从臂部沿与臂部相交的方向延伸的第一电极齿。微振荡元件还包括第二梳齿电极，与第一梳齿电极配合，用于使振动部分围绕由扭转接合部分限定的摆动轴线摆动。第二梳齿电极包括从框架沿与臂部相交的方向延伸的第二电极齿。

42. 发明申请

US20090107949A1 Micro-oscillating element and method of making the same 有权
标题翻译：微振动元件及其制造方法
公开(公告)号：US20090107949A1
公开(公告)日：2009-04-30
申请号：US12292540
申请日：2008-11-20
申请人： Norinao Kouma , Osamu Tsuboi , Hiromitsu Soneda , Satoshi Ueda
发明人： Norinao Kouma , Osamu Tsuboi , Hiromitsu Soneda , Satoshi Ueda
IPC分类号： B44C1/22
CPC分类号： G02B26/0841 , B81B3/0062 , B81B2201/033 , B81B2201/047 , B81B2203/0109 , B81B2203/058
摘要： A micro-oscillating element includes a frame, a movable functional portion, and a torsional joint for joining the frame and the functional portion. The micro-oscillating element also includes first and second comb-tooth electrodes for generation of the driving force for the oscillating motion of the movable functional portion about the torsional joint. The first comb-tooth electrode includes a plurality of first electrode teeth each having a first conductor, an insulator and a second conductor laminated in the direction of the oscillating motion, where the first conductor and the second conductor are electrically connected with each other. The second comb-tooth electrode includes a plurality of second electrode teeth caused not to face the second conductor but to face the first conductor of the first electrode teeth during non-operation. The second electrode teeth are longer than the first conductor in the direction of the oscillating motion.
摘要翻译：微振动元件包括框架，可移动功能部分和用于连接框架和功能部分的扭转接头。微振动元件还包括用于产生用于可动功能部分围绕扭转接头的摆动运动的驱动力的第一和第二梳齿电极。第一梳齿电极包括多个第一电极齿，每个第一电极齿具有沿振荡运动方向层叠的第一导体，绝缘体和第二导体，其中第一导体和第二导体彼此电连接。第二梳齿电极包括在不操作期间不面向第二导体而是面对第一电极齿的第一导体的多个第二电极齿。第二电极齿在摆动运动方向上比第一导体长。

43. 发明授权

US07459331B2 Micro mirror unit and method of making the same 有权
标题翻译：微镜单元及其制作方法
公开(公告)号：US07459331B2
公开(公告)日：2008-12-02
申请号：US11589075
申请日：2006-10-30
申请人： Yoshihiro Mizuno , Satoshi Ueda , Osamu Tsuboi , Ippei Sawaki , Hisao Okuda , Norinao Kouma , Hiromitsu Soneda , Fumio Yamagishi
发明人： Yoshihiro Mizuno , Satoshi Ueda , Osamu Tsuboi , Ippei Sawaki , Hisao Okuda , Norinao Kouma , Hiromitsu Soneda , Fumio Yamagishi
IPC分类号： H01L21/00
CPC分类号： G02B26/0841 , B81B2201/045 , B81B2203/0136 , B81C1/00182 , B81C2203/0109 , Y10S359/904
摘要： A micro mirror unit includes a moving part carrying a mirror portion, a frame and torsion bars connecting the moving part to the frame. The moving part, the frame and the torsion bars are formed integral from a material substrate. The frame includes a portion thicker than the moving part.
摘要翻译：微镜单元包括承载镜部分的移动部分，框架和将移动部件连接到框架的扭杆。移动部件，框架和扭杆从材料基板形成为一体。框架包括比移动部分更厚的部分。

44. 发明授权

US07161274B2 Micro-oscillation element having two rotational axes that are non-orthogonal to each other 失效
标题翻译：微振动元件具有彼此不正交的两个旋转轴
公开(公告)号：US07161274B2
公开(公告)日：2007-01-09
申请号：US10790762
申请日：2004-03-03
申请人： Osamu Tsuboi , Norinao Kouma , Hisao Okuda , Hiromitsu Soneda , Mi Xiaoyu , Satoshi Ueda , Ippei Sawaki , Yoshitaka Nakamura
发明人： Osamu Tsuboi , Norinao Kouma , Hisao Okuda , Hiromitsu Soneda , Mi Xiaoyu , Satoshi Ueda , Ippei Sawaki , Yoshitaka Nakamura
IPC分类号： H02N1/00 , G02B26/08
CPC分类号： H02N1/008
摘要： A micro-oscillation element includes a movable main section, a first frame and a second frame, and a first connecting section that connects the movable main section and the first frame and defines a first axis of rotation for a first rotational operation of the movable main section with respect to the first frame. The element further includes a second connecting section that connects the first frame and the second frame and defines a second axis of rotation for a second rotational operation of the first frame and the movable main section with respect to the second frame. A first drive mechanism is provided for generating a driving force for the first rotational operation. A second drive mechanism is provided for generating a driving force for the second rotational operation. The first axis of rotation and the second axis of rotation are not orthogonal.
摘要翻译：微振荡元件包括可移动主体部分，第一框架和第二框架，以及第一连接部分，其连接可移动主体部分和第一框架，并且限定第一旋转轴线用于可移动主体的第一旋转操作相对于第一帧的截面。元件还包括第二连接部分，其连接第一框架和第二框架并且限定第二旋转轴线用于第一框架和可移动主体部分相对于第二框架的第二旋转操作。第一驱动机构被提供用于产生用于第一旋转操作的驱动力。提供第二驱动机构用于产生用于第二旋转操作的驱动力。第一旋转轴线和第二旋转轴线不正交。

45. 发明申请

US20060233487A1 Micro movable element and optical switching device 失效
公开(公告)号：US20060233487A1
公开(公告)日：2006-10-19
申请号：US11385657
申请日：2006-03-22
申请人： Hiromitsu Soneda , Xiaoyu Mi , Hisao Okuda , Osamu Tsuboi , Norinao Kouma , Satoshi Ueda
发明人： Hiromitsu Soneda , Xiaoyu Mi , Hisao Okuda , Osamu Tsuboi , Norinao Kouma , Satoshi Ueda
IPC分类号： G02B6/26
CPC分类号： G02B6/357 , G02B6/3518 , G02B6/3556 , G02B6/3584 , Y10S359/90
摘要： A micro movable element includes a micro movable substrate, a package base and an electroconductive connector. The micro movable substrate is provided with a micro movable unit that includes a frame, a pivotally movable portion, a torsion connector connecting the frame and the movable portion, and an actuator to generate driving force for the pivotal motion of the movable portion. The package base includes an internal interconnect structure. The electroconductive connector is provided between the micro movable substrate and the package base for electrically connecting the actuator and the internal interconnect structure to each other.

46. 发明申请

US20060203319A1 Method of making comb-teeth electrode pair 有权
标题翻译：梳齿电极对的制作方法
公开(公告)号：US20060203319A1
公开(公告)日：2006-09-14
申请号：US11371089
申请日：2006-03-09
申请人： Norinao Kouma , Osamu Tsuboi , Hiromitsu Soneda , Satoshi Ueda
发明人： Norinao Kouma , Osamu Tsuboi , Hiromitsu Soneda , Satoshi Ueda
IPC分类号： G02B26/08
CPC分类号： B81C1/00547 , B81B2201/033
摘要： A pair of comb-teeth electrodes are made from a material substrate including a first conduction layer, a second conduction layer and an intervening insulation layer. The paired electrodes includes first and second comb-teeth electrodes. The first comb-teeth electrode is composed of a first conductor derived from the first conduction layer, a second conductor derived from the second conduction layer and an insulator derived from the insulation layer. The second comb-teeth electrode is derived from the second conduction layer.
摘要翻译：一对梳齿电极由包括第一导电层，第二导电层和中间绝缘层的材料基板制成。成对电极包括第一和第二梳齿电极。第一梳齿电极由衍生自第一导电层的第一导体，源自第二导电层的第二导体和源自绝缘层的绝缘体构成。第二梳齿电极源自第二导电层。

47. 发明申请

US20060119216A1 Micro oscillating element 审中-公开
标题翻译：微振荡元件
公开(公告)号：US20060119216A1
公开(公告)日：2006-06-08
申请号：US11271959
申请日：2005-11-14
申请人： Norinao Kouma , Osamu Tsuboi , Hiromitsu Soneda , Satoshi Ueda , Ippei Sawaki
发明人： Norinao Kouma , Osamu Tsuboi , Hiromitsu Soneda , Satoshi Ueda , Ippei Sawaki
IPC分类号： G02B26/08 , G02B26/00 , H02N1/00
CPC分类号： H02N1/008 , G02B26/0841
摘要： A micro oscillating element includes a frame and an oscillation section connected to the frame via a torsional joining section. The oscillation section includes a movable functional section, an arm section and a first comb-tooth electrode. The arm section extends from the functional section. The first comb-tooth electrode includes first electrode teeth extending from the arm section in a direction intersecting the arm section. The micro oscillating element further includes a second comb-tooth electrode to cooperate with the first comb-tooth electrode for causing the oscillation section to oscillate about an oscillation axis defined by the torsional joining section. The second comb-tooth electrode includes second electrode teeth extending from the frame in a direction intersecting the arm section.
摘要翻译：微振荡元件包括框架和经由扭转接合部分连接到框架的振荡部分。振荡部包括可动功能部，臂部和第一梳齿电极。臂部分从功能部分延伸。第一梳齿电极包括从臂部沿与臂部相交的方向延伸的第一电极齿。微振荡元件还包括与第一梳齿电极配合的第二梳齿电极，用于使振动部分围绕由扭转接合部分限定的摆动轴线振荡。第二梳齿电极包括从框架沿与臂部相交的方向延伸的第二电极齿。

48. 发明授权

US07038830B2 Micro-oscillation element 有权
标题翻译：微振荡元件
公开(公告)号：US07038830B2
公开(公告)日：2006-05-02
申请号：US10926053
申请日：2004-08-26
申请人： Osamu Tsuboi , Norinao Kouma , Hisao Okuda , Hiromitsu Soneda , Satoshi Ueda , Ippei Sawaki , Yoshitaka Nakamura
发明人： Osamu Tsuboi , Norinao Kouma , Hisao Okuda , Hiromitsu Soneda , Satoshi Ueda , Ippei Sawaki , Yoshitaka Nakamura
IPC分类号： G02B26/08 , G02B26/00
CPC分类号： G02B26/0841
摘要： A micro-oscillation element includes a frame, a movable functional part, a driving mechanism, a beam extending from the functional part to the driving mechanism, and a torsion connector for connecting the frame and the beam to each other. The connector defines a rotational axis about which the functional part rotates. The rotational axis crosses the longitudinal direction of the beam. The beam is shorter than the functional part in the longitudinal direction of the rotational axis.
摘要翻译：微振荡元件包括框架，可动功能部件，驱动机构，从功能部件延伸到驱动机构的梁，以及用于将框架和梁彼此连接的扭转连接器。连接器限定了功能部件绕其旋转的旋转轴线。旋转轴线与梁的纵向方向交叉。光束比旋转轴的纵向方向上的功能部分短。

49. 发明申请

US20050277217A1 Method for manufacturing micro-structural unit 有权
公开(公告)号：US20050277217A1
公开(公告)日：2005-12-15
申请号：US11207871
申请日：2005-08-22
申请人： Norinao Kouma , Osamu Tsuboi , Hisao Okuda , Hiromitsu Soneda , Mi Xiaoyu , Satoshi Ueda , Ippei Sawaki , Yoshitaka Nakamura
发明人： Norinao Kouma , Osamu Tsuboi , Hisao Okuda , Hiromitsu Soneda , Mi Xiaoyu , Satoshi Ueda , Ippei Sawaki , Yoshitaka Nakamura
IPC分类号： B81C1/00 , B81B3/00 , H01L21/00 , H01L29/84
CPC分类号： B81C1/00626 , B81B2201/0235 , B81B2201/042 , B81B2203/0136 , B81B2203/04
摘要： A method for manufacturing a micro-structural unit is provided. By the method, micro-machining is performed on a material substrate including first through third conductive layers and two insulating layers, one of which is interposed between the first and the second conductive layers, and the other between the second and the third conductive layers. The method includes several etching steps performed on the layers of the material substrate that are different in thickness.

50. 发明申请

US20050200986A1 Micro-actuation element provided with torsion bars 有权
标题翻译：配有扭杆的微动元件
公开(公告)号：US20050200986A1
公开(公告)日：2005-09-15
申请号：US11101519
申请日：2005-04-08
申请人： Osamu Tsuboi , Yoshihiro Mizuno , Satoshi Ueda , Ippei Sawaki , Hisao Okuda , Fumio Yamagishi , Hiromitsu Soneda , Norinao Kouma
发明人： Osamu Tsuboi , Yoshihiro Mizuno , Satoshi Ueda , Ippei Sawaki , Hisao Okuda , Fumio Yamagishi , Hiromitsu Soneda , Norinao Kouma
IPC分类号： G02B26/08 , H02N1/00
CPC分类号： G02B26/0841 , G02B26/085 , H02N1/008
摘要： The micro-actuation element (X1) includes a movable unit (111), a frame (112) and a coupler (113) for connecting these, where the unit, the frame and the coupler are integrally formed in a material substrate having a multi-layer structure that consists of electroconductive layers (110a-110c), such as a core conduction layer (110b), and insulation layers (110d, 110e) intervening between the electroconductive layers (110a-110c). The movable unit (111) includes a first structure originating in the core conduction layer (110b). The frame (112) includes a second structure originating in the core conduction layer (110b). The coupler (113) includes a plurality of electrically separated torsion bars (113a, 113b) that originate in the core conduction layer (110b) and are connected continuously to the first structure and the second structure.
摘要翻译：微致动元件（X 1）包括可移动单元（111），框架（112）和用于连接它们的耦合器（113），其中单元，框架和耦合器一体形成在具有由导电层（110a-110c），例如芯导电层（110b）和介于导电层（110a-110c）之间的绝缘层（110d，110e））组成的多层结构，。可移动单元（111）包括源于芯导电层（110b）的第一结构。框架（112）包括源于芯导电层（110b）的第二结构。耦合器（113）包括多个电分离的扭力杆（113a，113b），其产生在芯导电层（110b）中并连续地连接到第一结构和第二结构。

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