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41. 发明授权

US08142670B2 Micro-oscillating element and method of making the same 有权
标题翻译：微振动元件及其制造方法
公开(公告)号：US08142670B2
公开(公告)日：2012-03-27
申请号：US12292540
申请日：2008-11-20
申请人： Norinao Kouma , Osamu Tsuboi , Hiromitsu Soneda , Satoshi Ueda
发明人： Norinao Kouma , Osamu Tsuboi , Hiromitsu Soneda , Satoshi Ueda
IPC分类号： B44C1/22 , C25F3/00
CPC分类号： G02B26/0841 , B81B3/0062 , B81B2201/033 , B81B2201/047 , B81B2203/0109 , B81B2203/058
摘要： A micro-oscillating element includes a frame, a movable functional portion, and a torsional joint for joining the frame and the functional portion. The micro-oscillating element also includes first and second comb-tooth electrodes for generation of the driving force for the oscillating motion of the movable functional portion about the torsional joint. The first comb-tooth electrode includes a plurality of first electrode teeth each having a first conductor, an insulator and a second conductor laminated in the direction of the oscillating motion, where the first conductor and the second conductor are electrically connected with each other. The second comb-tooth electrode includes a plurality of second electrode teeth caused not to face the second conductor but to face the first conductor of the first electrode teeth during non-operation. The second electrode teeth are longer than the first conductor in the direction of the oscillating motion.
摘要翻译：微振动元件包括框架，可移动功能部分和用于连接框架和功能部分的扭转接头。微振动元件还包括用于产生用于可动功能部分围绕扭转接头的摆动运动的驱动力的第一和第二梳齿电极。第一梳齿电极包括多个第一电极齿，每个第一电极齿具有沿振荡运动方向层叠的第一导体，绝缘体和第二导体，其中第一导体和第二导体彼此电连接。第二梳齿电极包括在不操作期间不面向第二导体而是面对第一电极齿的第一导体的多个第二电极齿。第二电极齿在摆动运动方向上比第一导体长。

42. 发明授权

US07536068B2 Micro movable element and optical switching device 失效
标题翻译：微动元件和光开关元件
公开(公告)号：US07536068B2
公开(公告)日：2009-05-19
申请号：US11385657
申请日：2006-03-22
申请人： Hiromitsu Soneda , Xiaoyu Mi , Hisao Okuda , Osamu Tsuboi , Norinao Kouma , Satoshi Ueda
发明人： Hiromitsu Soneda , Xiaoyu Mi , Hisao Okuda , Osamu Tsuboi , Norinao Kouma , Satoshi Ueda
IPC分类号： G02B6/26
CPC分类号： G02B6/357 , G02B6/3518 , G02B6/3556 , G02B6/3584 , Y10S359/90
摘要： A micro movable element includes a micro movable substrate, a package base and an electroconductive connector. The micro movable substrate is provided with a micro movable unit that includes a frame, a pivotally movable portion, a torsion connector connecting the frame and the movable portion, and an actuator to generate driving force for the pivotal motion of the movable portion. The package base includes an internal interconnect structure. The electroconductive connector is provided between the micro movable substrate and the package base for electrically connecting the actuator and the internal interconnect structure to each other.
摘要翻译：微型可移动元件包括微型可移动基板，封装基座和导电连接器。微型可移动基板设置有微型可动单元，其包括框架，可枢转运动部分，连接框架和可移动部分的扭转连接器以及用于产生用于可动部分的枢转运动的驱动力的致动器。封装基座包括内部互连结构。导电连接器设置在微移动基板和封装基座之间，用于将致动器和内部互连结构彼此电连接。

43. 发明申请

US20060180883A1 Micro-oscillating element and method of making the same 有权
公开(公告)号：US20060180883A1
公开(公告)日：2006-08-17
申请号：US11352200
申请日：2006-02-13
申请人： Norinao Kouma , Osamu Tsuboi , Hiromitsu Soneda , Satoshi Ueda
发明人： Norinao Kouma , Osamu Tsuboi , Hiromitsu Soneda , Satoshi Ueda
IPC分类号： H01L29/84 , H01L21/00
CPC分类号： G02B26/0841 , B81B3/0062 , B81B2201/033 , B81B2201/047 , B81B2203/0109 , B81B2203/058
摘要： A micro-oscillating element includes a frame, a movable functional portion, and a torsional joint for joining the frame and the functional portion. The micro-oscillating element also includes first and second comb-tooth electrodes for generation of the driving force for the oscillating motion of the movable functional portion about the torsional joint. The first comb-tooth electrode includes a plurality of first electrode teeth each having a first conductor, an insulator and a second conductor laminated in the direction of the oscillating motion, where the first conductor and the second conductor are electrically connected with each other. The second comb-tooth electrode includes a plurality of second electrode teeth caused not to face the second conductor but to face the first conductor of the first electrode teeth during non-operation. The second electrode teeth are longer than the first conductor in the direction of the oscillating motion.

44. 发明授权

US06906849B1 Micro-mirror element 有权
标题翻译：微镜元件
公开(公告)号：US06906849B1
公开(公告)日：2005-06-14
申请号：US10711516
申请日：2004-09-23
申请人： Xiaoyu Mi , Hiromitsu Soneda , Satoshi Ueda , Ippei Sawaki
发明人： Xiaoyu Mi , Hiromitsu Soneda , Satoshi Ueda , Ippei Sawaki
IPC分类号： B81B3/00 , B81B7/00 , G02B26/08 , G02B26/00 , G01C19/00 , G02B7/182 , H01L29/84
CPC分类号： B81B7/0006 , B81B2201/042 , G02B26/0841
摘要： A micro-mirror element includes a micro-mirror substrate, a wiring substrate and an electroconductive spacer disposed between the two substrates. The micro-mirror substrate is formed integral with a frame, a moving portion having a mirror portion, and a torsion bar connecting the frame to the moving portion. The wiring substrate is provided with a wiring pattern. The electroconductive spacer separates the micro-mirror substrate from the wiring substrate and also electrically connects the frame to the wiring pattern. The wiring substrate has a surface that faces the micro-mirror substrate. A detector is provided on this surface for detecting the pivot angle of the mirror portion.
摘要翻译：微镜元件包括微镜基板，布线基板和设置在两个基板之间的导电间隔件。微镜基板与框架一体形成，具有镜部分的移动部分和将框架连接到移动部分的扭杆。布线基板设置有布线图案。导电间隔件将微镜基板与布线基板分开，并且还将框架电连接到布线图案。布线基板具有面向微镜基板的表面。在该表面上设置检测器，用于检测镜部分的枢转角度。

45. 发明授权

US07755824B2 Micromirror unit with torsion connector having nonconstant width 有权
标题翻译：具有扭曲连接器的微镜单元具有不恒定的宽度
公开(公告)号：US07755824B2
公开(公告)日：2010-07-13
申请号：US12219010
申请日：2008-07-15
申请人： Osamu Tsuboi , Satoshi Ueda , Yoshihiro Mizuno , Ippei Sawaki , Hisao Okuda
发明人： Osamu Tsuboi , Satoshi Ueda , Yoshihiro Mizuno , Ippei Sawaki , Hisao Okuda
IPC分类号： G02B26/08
CPC分类号： G02B26/085 , G02B26/0841 , Y10S359/904
摘要： A micromirror unit is provided which includes a frame, a mirror forming base upon which a mirror surface is formed, and a torsion connector which includes a first end connected to the mirror forming base and a second end connected to the frame. The torsion connector defines a rotation axis about which the mirror forming base is rotated relative to the frame. The torsion connector has a width measured in a direction which is parallel to the mirror surface and perpendicular to the rotation axis. The width of the torsion connector is relatively great at the first end. The width becomes gradually smaller from the first end toward the second end.
摘要翻译：提供了一种微镜单元，其包括框架，形成有镜面的反射镜形成基座以及连接到反射镜形成基座的第一端和连接到框架的第二端的扭转连接器。扭转连接器限定了旋转轴线，镜子形成基座围绕该轴线相对于框架旋转。扭转连接器具有在与镜面平行且垂直于旋转轴线的方向上测量的宽度。第一端扭转连接器的宽度相对较大。宽度从第一端朝向第二端逐渐变小。

46. 发明授权

US07031041B2 Micro-oscillating element provided with torsion bar 有权
标题翻译：微振动元件设有扭杆
公开(公告)号：US07031041B2
公开(公告)日：2006-04-18
申请号：US11053880
申请日：2005-02-10
申请人： Xiaoyu Mi , Osamu Tsuboi , Satoshi Ueda , Ippei Sawaki
发明人： Xiaoyu Mi , Osamu Tsuboi , Satoshi Ueda , Ippei Sawaki
IPC分类号： G02B26/08
CPC分类号： G02B26/0841 , B81B3/007 , B81B2201/0235 , B81B2201/033 , B81B2201/042 , B81B2203/0109 , B81B2203/0154 , B81B2203/058
摘要： A micro-oscillating element is provided with a frame (113) and a oscillating member (111) connected with the frame (113) via a connector (112). Each connector (112) includes two torsion bars (112a), each torsion bar (112a) being constructed so that the rigidity becomes relatively high toward the frame (113) and relatively low toward the oscillating member (111) by forming a plurality of holes (112b).
摘要翻译：微振动元件设置有经由连接器（112）与框架（113）连接的框架（113）和摆动构件（111）。每个连接器（112）包括两个扭杆（112a），每个扭杆（112a）被构造成使得刚性通过形成多个相对于框架（113）而相对较低朝着摆动构件（111）变得相对较高的孔（112b）。

47. 发明授权

US06887396B2 Micromirror unit and method of making the same 有权
标题翻译：微镜单元及其制作方法
公开(公告)号：US06887396B2
公开(公告)日：2005-05-03
申请号：US09950710
申请日：2001-09-13
申请人： Osamu Tsuboi , Satoshi Ueda , Yoshihiro Mizuno , Ippei Sawaki , Fumio Yamagishi
发明人： Osamu Tsuboi , Satoshi Ueda , Yoshihiro Mizuno , Ippei Sawaki , Fumio Yamagishi
IPC分类号： B81B3/00 , B81C1/00 , G02B26/08 , G11B7/09 , C03C15/00
CPC分类号： B81C1/00142 , B81B3/0078 , B81B2201/042 , B81B2201/045 , B81B2203/0136 , B81B2203/0181 , B81B2203/058 , B81C1/00396 , G02B26/0841 , Y10S359/904
摘要： A method is provided for making a micromirror unit which includes a frame, a mirror forming base, and bridges connecting the frame to the mirror forming base. The method includes the following steps. First, a first mask pattern is formed on a substrate for masking portions of the substrate which are processed into the frame and the mirror forming base. Then, a second mask pattern is formed on the substrate for masking portions of the substrate which are processed into the bridges. Then, the substrate is subjected to a first etching process with the first and the second mask patterns present as masking means. Then, the second mask pattern is removed selectively. Then, the substrate is subjected to a second etching process with the first mask pattern present as masking means. Finally, the first mask pattern is removed.
摘要翻译：提供了一种用于制造微镜单元的方法，该微镜单元包括框架，反射镜形成基座和将框架连接到反射镜形成基座的桥。该方法包括以下步骤。首先，在基板上形成第一掩模图案，以掩蔽基板的被加工成框架和反射镜形成基座的部分。然后，在衬底上形成第二掩模图案，用于掩蔽加工成桥的衬底部分。然后，以第一和第二掩模图形作为掩模装置对基板进行第一蚀刻处理。然后，选择性地去除第二掩模图案。然后，以第一掩模图案作为掩模装置对基板进行第二蚀刻处理。最后，删除第一个掩模图案。

48. 发明申请

US20080285109A1 Micromirror unit with torsion connector having nonconstant width 有权
公开(公告)号：US20080285109A1
公开(公告)日：2008-11-20
申请号：US12219010
申请日：2008-07-15
申请人： Osamu Tsuboi , Satoshi Ueda , Yoshihiro Mizuno , Ippei Sawaki , Hisao Okuda
发明人： Osamu Tsuboi , Satoshi Ueda , Yoshihiro Mizuno , Ippei Sawaki , Hisao Okuda
IPC分类号： G02B26/08
CPC分类号： G02B26/085 , G02B26/0841 , Y10S359/904
摘要： A micromirror unit is provided which includes a frame, a mirror forming base upon which a mirror surface is formed, and a torsion connector which includes a first end connected to the mirror forming base and a second end connected to the frame. The torsion connector defines a rotation axis about which the mirror forming base is rotated relative to the frame. The torsion connector has a width measured in a direction which is parallel to the mirror surface and perpendicular to the rotation axis. The width of the torsion connector is relatively great at the first end. The width becomes gradually smaller from the first end toward the second end.

49. 发明授权

US08693083B2 Micromirror unit and method of making the same 有权
标题翻译：微镜单元及其制作方法
公开(公告)号：US08693083B2
公开(公告)日：2014-04-08
申请号：US13336190
申请日：2011-12-23
申请人： Osamu Tsuboi , Satoshi Ueda , Yoshihiro Mizuno , Ippei Sawaki , Fumio Yamagishi
发明人： Osamu Tsuboi , Satoshi Ueda , Yoshihiro Mizuno , Ippei Sawaki , Fumio Yamagishi
IPC分类号： G02B26/00
CPC分类号： B81C1/00142 , B81B3/0078 , B81B2201/042 , B81B2201/045 , B81B2203/0136 , B81B2203/0181 , B81B2203/058 , B81C1/00396 , G02B26/0841 , Y10S359/904
摘要： A method is provided for making a micromirror unit which includes a frame, a mirror forming base, and bridges connecting the frame to the mirror forming base. The method includes the following steps. First, a first mask pattern is formed on a substrate for masking portions of the substrate which are processed into the frame and the mirror forming base. Then, a second mask pattern is formed on the substrate for masking portions of the substrate which are processed into the bridges. Then, the substrate is subjected to a first etching process with the first and the second mask patterns present as masking means. Then, the second mask pattern is removed selectively. Then, the substrate is subjected to a second etching process with the first mask pattern present as masking means. Finally, the first mask pattern is removed.
摘要翻译：提供了一种用于制造微镜单元的方法，该微镜单元包括框架，反射镜形成基座和将框架连接到反射镜形成基座的桥。该方法包括以下步骤。首先，在基板上形成第一掩模图案，以掩蔽基板的被加工成框架和反射镜形成基座的部分。然后，在衬底上形成第二掩模图案，用于掩蔽加工成桥的衬底部分。然后，以第一和第二掩模图形作为掩模装置对基板进行第一蚀刻处理。然后，选择性地去除第二掩模图案。然后，以第一掩模图案作为掩模装置对基板进行第二蚀刻处理。最后，删除第一个掩模图案。

50. 发明申请

US20120105936A1 MICROMIRROR UNIT AND METHOD OF MAKING THE SAME 有权
标题翻译：微机单元及其制造方法
公开(公告)号：US20120105936A1
公开(公告)日：2012-05-03
申请号：US13336190
申请日：2011-12-23
申请人： Osamu Tsuboi , Satoshi Ueda , Yoshihiro Mizuno , Ippei Sawaki , Fumio Yamagishi
发明人： Osamu Tsuboi , Satoshi Ueda , Yoshihiro Mizuno , Ippei Sawaki , Fumio Yamagishi
IPC分类号： G02B26/00
CPC分类号： B81C1/00142 , B81B3/0078 , B81B2201/042 , B81B2201/045 , B81B2203/0136 , B81B2203/0181 , B81B2203/058 , B81C1/00396 , G02B26/0841 , Y10S359/904
摘要： A method is provided for making a micromirror unit which includes a frame, a mirror forming base, and bridges connecting the frame to the mirror forming base. The method includes the following steps. First, a first mask pattern is formed on a substrate for masking portions of the substrate which are processed into the frame and the mirror forming base. Then, a second mask pattern is formed on the substrate for masking portions of the substrate which are processed into the bridges. Then, the substrate is subjected to a first etching process with the first and the second mask patterns present as masking means. Then, the second mask pattern is removed selectively. Then, the substrate is subjected to a second etching process with the first mask pattern present as masking means. Finally, the first mask pattern is removed.
摘要翻译：提供了一种用于制造微镜单元的方法，该微镜单元包括框架，反射镜形成基座和将框架连接到反射镜形成基座的桥。该方法包括以下步骤。首先，在基板上形成第一掩模图案，以掩蔽基板的被加工成框架和反射镜形成基座的部分。然后，在衬底上形成第二掩模图案，用于掩蔽加工成桥的衬底部分。然后，以第一和第二掩模图形作为掩模装置对基板进行第一蚀刻处理。然后，选择性地去除第二掩模图案。然后，以第一掩模图案作为掩模装置对基板进行第二蚀刻处理。最后，删除第一个掩模图案。

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