会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 44. 发明专利
    • METHOD FOR GROWING 4H TYPE SILICON CARBIDE SINGLE CRYSTAL
    • JPH07330493A
    • 1995-12-19
    • JP12646394
    • 1994-06-08
    • NIPPON STEEL CORP
    • KANETANI MASATOSHITAKAHASHI ATSUSHIOTANI NOBORU
    • C30B23/02C30B29/36
    • PURPOSE:To obtain a 4H type SiC single crystal by using the (0001) C face of 15R type SiC as a seed crystal in a sublimation recrystallization method of SiC. CONSTITUTION:The seed crystal S is produced by shaping and polishing the planar amorphous 15R type SiC single crystal and executing face decision by a steam oxidation method, then subjecting the single crystal to acid washing with HF and drying. The seed crystal is then mounted by directing the (0001) Si face of the seed crystal 5 toward the side of a crucible cap 3 and directing the (0001) C face as a crystal growth face 6 in a direction opposite to the crucible cap 3. SiC raw material powder 2 is packed into the crucible 1 and the crucible cap 3 holding the seed crystal 5 in the mounting part 4 is put on the crucible 1 packed with the SiC powder 2 and thereafter, the crucible is arranged in a vessel in which vacuum is maintainable. The inside of the system is evacuated to a high vacuum and an inert gaseous atmosphere of a pressure 10 to 20Torr is generated and thereafter, the crucible 1 is heated to sublimate the SiC powder 2 at 2300 to 2400 deg.C, by which the SiC crystal is grown at a crystal growth rate 0.6 to 1.2mm/ hour on the growth surface of the seed crystal kept at 2150 to 2250 deg.C slightly lower than the temp. of the SiC powder and the 4H type SiC single crystal is obtd.