专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

41. 发明专利

JPH11297495A PLASMA DEVICE 失效
公开(公告)号：JPH11297495A
公开(公告)日：1999-10-29
申请号：JP9798098
申请日：1998-04-09
申请人： OMI TADAHIRO , ULTLA CLEAN TECHNOLOGY KAIHATS
发明人： OMI TADAHIRO , HIRAYAMA MASAKI , NITTA TAKEHISA
IPC分类号： H05H1/46 , H01L21/205 , H01L21/302 , H01L21/3065
摘要： PROBLEM TO BE SOLVED: To maintain high plasma density, even if a processing object is diametrically enlarged by directly connecting an electrode to an electric power supply means by a conductor, without arranging a matching circuit constituting a distributed constant line and a matching box between the electrode and the electric power supply means in the matching circuit. SOLUTION: A plasma device is constituted by directly connecting an electrode 107 and an electric power supply means 101 by a conductor 105 to reduce power loss supplied to the electrode from the electric power supply means, except for a matching circuit constituting a distributed constant line and a matching box almost decided in characteristic impedance. The output of the electric power supply means 101 is connected directly to the electrode 107 via the conductor 105 so that a processing object 108 is arranged on the electrode 107. A multistage high frequency amplifier 103 uses an electric circuit constituted of plural bipolar transistors, an inductor, a capacitor and a DC power source, and the matching circuit 104 does not use a semi-fixed variable capacitor but rather uses a variable capacitor.

42. 发明专利

JPH11260780A EQUIPMENT AND METHOD FOR SPIN CLEANING 失效
公开(公告)号：JPH11260780A
公开(公告)日：1999-09-24
申请号：JP33906798
申请日：1998-11-30
申请人： OMI TADAHIRO , ULTLA CLEAN TECHNOLOGY KAIHATS
发明人： OMI TADAHIRO , NITTA TAKEHISA , NAKAMORI MITSUNORI
IPC分类号： B08B3/02 , H01L21/304
摘要： PROBLEM TO BE SOLVED: To eliminate bounce of cleaning liquid to a cleaning tank inner wall and prevent contamination of a substrate, by installing a lid swingably to a substrate, equipping the lid with nozzles supplying cleaning liquid, and protruding tips of the nozzles from the lower surface of the lid. SOLUTION: This equipment is provided with a means 11 rotatably holding a substrate 1 in a cleaning tank 8, and a lid 2 which has nozzles supplying cleaning liquid and is arranged above the substrate 1. The lid 2 is installed swingably to the substrate 1, and provided with nozzles 4 supplying cleaning liquid. Tips of the nozzles 4 are protruded from the lower surface of the lid 2. The means 11 holding the substrate 1 consists of a rotating shaft 12 and a susceptor 13 fixed to the shaft 12. The lid 2 is fixed to the rotating shaft 10 via a bar 6, and swings in accordance with the rotation of the rotating shaft 10. The lid 2 is arranged so as not to protrude from the substrate 1 at the time of swinging. Further a heater 3 is installed in the upper part of the lid 2.

43. 发明专利

JPH11117915A ORIFICE FOR PRESSURE TYPE FLOW CONTROL DEVICE AND MANUFACTURE THEREOF 失效
公开(公告)号：JPH11117915A
公开(公告)日：1999-04-27
申请号：JP23016097
申请日：1997-08-27
申请人： OMI TADAHIRO , TOKYO ELECTRON LTD , FUJIKIN KK
发明人： OMI TADAHIRO , KAGATSUME SATORU , SUGIYAMA KAZUHIKO , FUKADA OSAMU , OZAWA SUSUMU , SATO YOSHIHIRO , DOI RYOSUKE , UNO TOMIO , NISHINO KOJI , FUKUDA HIROYUKI , IKEDA SHINICHI , YAMAJI MICHIO
IPC分类号： B23P15/00 , B05B1/00 , B23P15/16 , F15D1/08
摘要： PROBLEM TO BE SOLVED: To attain pressure flow control of high accuracy by providing an inlet tapered part, a short throttle parallel part, a short tapered part and a parallel diameter-enlarged part continuously in this order. SOLUTION: An orifice for a pressure type flow control device is composed of an orifice A, an inlet tapered part 1, a throttle parallel part 2, a tapered diameter-enlarged part 3 and a parallel diameter-enlarged part 4. As a concrete example, it is confirmed that linearity between a flow rate and primary pressure P1 is ensured over a range of the flow characteristic P2 /P1 of the orifice (a parallel diameter-enlarged part inner diameter (ϕ2 =0.2 mm) A being P2 /P1 =0.633 (P1 =3.0 kgf/cm abs, P2 =1.89 kgf/cm abs), that is, in spite of a form of the orifice A based on machining of only deburring by an R-cutting tool, a drill and a center drill, the linear characteristic of any orifice A is held to a point of P2 /P1 =0.633 so as to attain flow control of high accuracy.

44. 发明专利

JPH1176445A FIRE FIGHTING METHOD AND DEVICE IN CLEAN ROOM 失效
公开(公告)号：JPH1176445A
公开(公告)日：1999-03-23
申请号：JP14117598
申请日：1998-05-22
申请人： OMI TADAHIRO , SHINKO TECHNOS KK , HITACHI PLANT ENG & CONSTR CO
发明人： OMI TADAHIRO , SHIRAI YASUYUKI , IMAI SHOJI , FUKUDA MUNEHARU , NISHIMURA YOUTAROU , KASAI MASATAKA
IPC分类号： A62C3/00 , A62C99/00 , F24F7/06 , A62C39/00
摘要： PROBLEM TO BE SOLVED: To quickly perform initial fire fighting, protect life of persons in a clean room, and further prevent devices disposed in the clean room from being contaminated to the utmost. SOLUTION: When a fire occurs in a clean room including a clean chamber 30, the supply of air-conditioned air to the interior of a ceiling chamber 18 from an external air conditioner 14 is stopped and only the air circulation of the ceiling chamber 18 and the clean chamber is continued in the state of intercepting a supply path for oxygen. Under the condition of continuing such air circulation, while the air in the clean chamber 30 is discharged, fire fighting gas comprising carbon dioxide and inert gas is emitted into the ceiling chamber 18. The fire fighting gas emitted in the ceiling chamber 18 is jetted into the clean chamber 30 through a HEPA filter 28 disposed in the ceiling surface 26 by air circulation. Thus, oxygen concentration in the clean chamber 30 is quickly lowered so as to perform quick fire fighting.

45. 发明专利

JPH10296653A GASKET ATTACHING/REMOVING TOOL 失效
公开(公告)号：JPH10296653A
公开(公告)日：1998-11-10
申请号：JP10573497
申请日：1997-04-23
申请人： OMI TADAHIRO , FUJIKIN KK
发明人： OMI TADAHIRO , SHINOHARA TSUTOMU , TOSHI YUJI , YAMAJI MICHIO , KISO HIDENORI
IPC分类号： B25B27/14 , F16J15/00
摘要： PROBLEM TO BE SOLVED: To improve workability when putting a gasket between two jointing members, and improve cleanness of a fluid joint constituted of the gasket and the joint members. SOLUTION: This gasket attaching/removing tool 80 is provided with a clamp 81 of broadening truncated-cone shaped which retains a retainer 33 for retaining a gasket 32, a body for retaining it at its front end, a sliding shaft 83 supported against the body so as to be movable in the axial direction, and a clamp diameter-shrinking member 88 formed at the front end of the sliding shaft 83. When the sliding shaft 83 is moved toward shaft front end, the clamp diameter-shrinking member 88 is also moved toward the shaft front end. A plurality of movable members 91 which form the clamp 8 move inward in the diametrical direction, therefore, the diameter of the retainer retaining recessed part 92 of the clamp 81 becomes smaller, and the retainer 33 is retained by the clamp 81 from the outside in the diametrical direction.

46. 发明专利

JPH10283793A SEMICONDUCTOR CIRCUIT 失效
公开(公告)号：JPH10283793A
公开(公告)日：1998-10-23
申请号：JP2117398
申请日：1998-02-02
申请人： SHIBATA SUNAO , OMI TADAHIRO
发明人： YAMASHITA YUICHIRO , SHIBATA SUNAO , OMI TADAHIRO
IPC分类号： G11C16/04 , G11C11/56 , G11C27/00 , H01L21/8247 , H01L27/10 , H01L27/115 , H01L29/788 , H01L29/792
摘要： PROBLEM TO BE SOLVED: To store a plurality of analog multiple-value data accurately by using a circuit with a small area by terminating the writing of an analog signal when the output of a memory cell reaches a value that is obtained by adding a difference between two standard voltages to a desired voltage. SOLUTION: A dummy memory cell 102 (dummy cell) for canceling an offset that is located close to a memory cell 103 of a target (target cell) and has the same structure as that of the target cell 103 is provided. Data are written to the target cell 103 after the dummy cell 102. Then, data are written to the target cell 103 with a voltage Vst of a standard voltage generation circuit 104 and an output voltage Vwr of the dummy cell as two standard voltages. In this case, when output Vout of the target cell 103 satisfies a relationship of Vout = (writing target voltage) + Vst - Vwr, the writing is completed, thus reducing the deviation of an offset voltage and writing data accurately.

47. 发明专利

JPH10257352A SEMICONDUCTOR ARITHMETIC CIRCUIT 失效
公开(公告)号：JPH10257352A
公开(公告)日：1998-09-25
申请号：JP8187697
申请日：1997-03-15
申请人： SHIBATA SUNAO , OMI TADAHIRO
发明人： SHIBATA SUNAO , OMI TADAHIRO
IPC分类号： H04N5/14 , H04N5/208 , H04N5/21
摘要： PROBLEM TO BE SOLVED: To enable noise removal, edge enhancement processing and edge detection processing by means of the averaging processing of an image in a simple circuit by adding a first, a second and a third signal voltages to the input terminal of an amplifier circuit by means of a specified procedure. SOLUTION: An N-channel MOS transistor 101 and a P-channel MOS transistor 102 constitute a push-pull amplifier, that is, a CMOS-system source follower circuit 103. An array corresponding to nine pixels is taken out from a two-dimensional photosensor array. A switch 105 is closed, and the pixel value V of a center is inputted to the input terminal 104 of the source follower circuit 103 and peripheral pixel values V1 -V8 are inputted to input gate electrodes 106a-106c. After that, the switch 105 is opened. Then, all the same prescribed values are inputted to the electrode 106. The voltage appears in an output terminal 107 becomes larger, when the pixel value of the center is larger than the peripheral ones and becomes smaller, when it is smaller so as to enhance an edge.

48. 发明专利

JPH10227368A FLUID CONTROL DEVICE 失效
公开(公告)号：JPH10227368A
公开(公告)日：1998-08-25
申请号：JP2999697
申请日：1997-02-14
申请人： OMI TADAHIRO , FUJIKIN KK
发明人： OMI TADAHIRO , TOSHI YUJI , YAMAJI MICHIO , TANAKA RINMEI , HIRAO YOSHIYUKI , KAWANO YUJI , HIROSE TAKASHI , YOKOYAMA KOSUKE , KURAMOCHI MICHIO , HATANO MASAYUKI , IKEDA SHINICHI
IPC分类号： F16K27/00 , C23C16/44 , C23C16/455 , C30B25/14 , F15B13/00 , F15B13/08 , H01L21/205
摘要： PROBLEM TO BE SOLVED: To provide a fluid control device which attains integration without increasing number of kinds of opening/closing valves as main components. SOLUTION: A breaking and releasing unit 91 arranged on a port of a fluid controller is selected from a breaking and releasing unit 91 provided with one two-port valve 101, a breaking and releasing unit 92 provided with one two-port valve 101 and one three-port valve 102, a breaking and releasing unit 93 provided with one two-port valve 101 and two three-port valves 102, a breaking and releasing unit 94 provided with two three-port valves 102, a breaking and releasing unit 95 provided with three three-port valves 102. Valve bodies 101a of the two-port valves 101 of the breaking and releasing units 91, 92, 93 have the same shape each provided with an inlet 103 and an outlet 104 on the lower surface. Valve bodies 102a of the three-port valves 102 of the breaking and releasing units 92, 93, 94, 95 have the same shape each provided with an inlet 107 and an outlet 106 always communicated with each other, and a sub-outlet 105 on the lower surface.

49. 发明专利

JPH10205636A SHUT-OFF RELEASING UNIT 失效
公开(公告)号：JPH10205636A
公开(公告)日：1998-08-04
申请号：JP27847397
申请日：1997-10-13
申请人： OMI TADAHIRO , FUJIKIN KK
发明人： OMI TADAHIRO , KAWANO YUJI , HIRAO YOSHIYUKI , TANAKA HISASHI , MASUDA HISAYA , MINAMI YUKIO , HATANO MASAYUKI , TANAKA SHIGEAKI , YAMAJI MICHIO , KARATO YUJI , KURAMOCHI MICHIO , IKEDA SHINICHI , ITOI SHIGERU , KASHIWA MICHIHIRO
IPC分类号： F16K27/00 , F15B13/00 , F15B13/08 , F17D1/02
摘要： PROBLEM TO BE SOLVED: To easily cope with a specification change such as an increase or a decrease in the number of valves and a change in a valve fitting position, and maintain a proper sealing function at each joint of component members of a shut-off releasing unit. SOLUTION: A valve mounting base 28 having two valves 6 and 7 mounted side by side unidirectionally so as to be detachable from an upper level, is formed out of an inflow passage forming member 30 having a passage communicated to the inlet 62 of the valve 6 laid at one end, a communication passage forming member 31 having a communication passage 31a for communicating the adjacent outlet 63 and inlet 68 of the valves 6 and 7 to each other, an outflow passage forming member 33 having a passage 33a communicated to the outlet 69 of the valve 7 laid at the other end, and an auxiliary passage forming member 32 having a passage communicated to the auxiliary-inlet and outlet port 70 of the valve 7.

50. 发明专利

JPH09324874A METHOD FOR CONTROLLING PIPING WORK 失效
公开(公告)号：JPH09324874A
公开(公告)日：1997-12-16
申请号：JP14002996
申请日：1996-06-03
申请人： OMI TADAHIRO , FUJIKIN KK
发明人： OMI TADAHIRO , DOI RYOSUKE , IDETA EIJI , FUKUDA HIROYUKI , TOSHI YUJI , IKEDA SHINICHI
IPC分类号： F16L13/02 , B23K9/095 , B23K31/12 , F16L1/00
摘要： PROBLEM TO BE SOLVED: To provide a method for controlling a piping work capable of preventing an accident of piping caused by improper piping work. SOLUTION: A system for welding operation for a pipe to which a method for controlling a piping work is applied is comprised of an automatic welding machine 1 for performing a welding of a pipe in response to a predetermined condition, a welding data output device 2 for outputting a set value of welding condition and an actual welding data of the welding machine 1, a welding data processing device 3 for discriminating whether or not an output value of the welding data output device 2 is appropriate and for storing welding data as well as its result of discrimination, and a host computer 4. Welding operation is carried out by the welding machine 1 so as to discriminate if the welding is properly carried out and at the same time a set value of welding condition, actual welding data and the result of discrimination are transmitted to the host computer 4 through LANs 11, 14 and stored in the host computer 4.

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式