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    • 42. 发明专利
    • THERMAL TYPE FLOW SENSOR
    • JPH04285818A
    • 1992-10-09
    • JP7405291
    • 1991-03-13
    • NGK INSULATORS LTD
    • YAJIMA YASUHITO
    • G01F1/68G01F1/692G01F15/04G01P5/12
    • PURPOSE:To enable accurate detection of a flow rate being little dependent on temperature even when the temperature of a fluid changes, by selecting a temperature-compensating resistor and a heating resistor so that a resistance temperature coefficient value of the former resistor is made to be a lower value in a prescribed range than a resistance temperature coefficient of the latter. CONSTITUTION:In regard to a sensor which is provided in a fluid passage and has a heating resistor RH of platinum detecting the flow rate of a fluid and a temperature-compensating resistor RC of platinum detecting the temperature of the fluid, a resistance value of the resistor RH at 0 deg.C is made to be rHo (OMEGA) and a resistance value rH (OMEGA) of the resistor RC is expressed by a function of a temperature T( deg.C), rH=rHo(1+alphaT+betaT ). Besides, the resistance value of the resistor RC at 0 deg.C is made to be rCo (OMEGA) and the resistance value rC (OMEGA) of the resistor RC is expressed by a function of the temperature T( deg.C), rC= rCo(1+alphaT+betaT ). The value of a first-degree term coefficient alpha of the resistance temperature coefficient of the resistor RC is made to be lower than the value of the first-degree term coefficient alpha of the resistance temperature coefficient of the resistor RH.
    • 46. 发明专利
    • STRAIN DETECTOR
    • JPS63293432A
    • 1988-11-30
    • JP13087887
    • 1987-05-27
    • NGK INSULATORS LTD
    • YAJIMA YASUHITOSHIBATA KAZUYOSHIMASE SHUNZO
    • G01L9/04G01B7/16G01L9/00
    • PURPOSE:To detect strain in a higher temperature atmosphere by using a material consisting of an excellent basic conductor component with specific high temperature resistance temperature characteristics and a specific dielectric material for a resistance body formed on a ceramic base. CONSTITUTION:A circuit pattern 4 is provided on the ceramic base 2 to form a pattern forming body 6. Then a filmy resistance body part 4a constituted by including the specific base conductor component in the specific dielectric material and a circuit pattern 4 consisting of a conductor part 4b made of a normal conductor material are formed on the calcined or uncalcined base 2. Namely, the resistance body part 4a which constitutes the pattern 4 contains one kind of compound powder selected in a group of Ti, Zr, etc. as basic components in the dielectric material made of specific glass, etc. Further, the resistance body part 4a is connected to external equipment, etc., from the base 2 by a conductor part 4b which does not vary in resistance value owing to the deformation of the base body 2. Thus, strain is detected in a higher temperature atmosphere.
    • 47. 发明专利
    • PRESSURE DETECTOR
    • JPS63292032A
    • 1988-11-29
    • JP12936087
    • 1987-05-26
    • NGK INSULATORS LTD
    • YAJIMA YASUHITO
    • G01L9/04B28B1/00B28B7/34G01L9/00
    • PURPOSE:To improve breakdown strength and detecting accuracy, by baking a ceramic diaphragm, which is deformed in correspondence with pressure, and a ceramic fixing table, which fixes the periphery of the diaphragm as a unitary body. CONSTITUTION:All of the following parts comprise ceramic molded bodies: a plate shaped or film shaped molded ceramic member 2; a space forming member 4, in which a specified circular space 6 is formed at the central part; a plate shaped or block shaped, fixing-table forming member 8 having a through hole 10 at the central part. When these parts are laminated so as to form a unitary body, the space 6 and the through hole 10 are tightly filled with inserting bodies 12 and 14, which have the approximately same sizes as the respective space and holes and comprise sublimating material. The unitary laminated body is baked in accordance with an ordinary baking method. Thus a unitary baked body 20 is obtained. A bridge circuit is formed on one surface of a diaphragm part 16 of the baked body 20. The diaphragm part 16 is deformed in correspondence with pressure, which is applied on the part 16. Then, pressure to be measured can be detected based on the change in resistance value of a resistor due to the deformation.