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    • 42. 发明申请
    • METHOD AND SYSTEM FOR PROVIDING MAGNETIC JUNCTIONS HAVING IMPROVED CHARACTERISTICS
    • 用于提供具有改进特性的磁性结的方法和系统
    • US20140022839A1
    • 2014-01-23
    • US13553965
    • 2012-07-20
    • Chang-Man ParkDustin William EricksonMohamad Towfik Krounbi
    • Chang-Man ParkDustin William EricksonMohamad Towfik Krounbi
    • G11C11/14C23F1/00
    • G11C11/161H01L43/08H01L43/12
    • A method and apparatus provide a magnetic memory including magnetic junctions on a substrate. The apparatus include an RIE chamber and an ion milling chamber. The chambers are coupled such that the magnetic memory is movable between the chambers without exposing the magnetic memory to ambient. The method provides magnetic junction layers and a hard mask layer on the magnetic junction layers. A hard mask is formed from the hard mask layer using an RIE. The magnetic junction layers are ion milled after the RIE and without exposing the magnetic memory to an ambient after the RIE. The ion milling defines at least part of each magnetic junction. A magnetic junction may be provided. The magnetic junction includes pinned, nonmagnetic spacer, and free layers. The free layer has a width of not more than twenty nanometers and is switchable when a write current is passed through the magnetic junction.
    • 一种方法和装置提供包括在基底上的磁结的磁存储器。 该装置包括RIE室和离子研磨室。 这些室被耦合,使得磁存储器可以在室之间移动,而不将磁存储器暴露于环境。 该方法在磁结层上提供磁结层和硬掩模层。 使用RIE从硬掩模层形成硬掩模。 在RIE之后,磁结层被离子研磨,并且在RIE之后没有将磁存储器暴露在环境中。 离子铣削限定了每个磁结的至少一部分。 可以提供磁结。 磁结包括固定的,非磁性的隔离层和自由层。 自由层具有不超过二十纳米的宽度,并且当写入电流通过磁性结时可自由切换。