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    • 41. 发明申请
    • PROJECTION OPTICAL SYSTEM
    • 投影光学系统
    • US20070297047A1
    • 2007-12-27
    • US11751139
    • 2007-05-21
    • Hiroyuki YuukiTakashi Kato
    • Hiroyuki YuukiTakashi Kato
    • G02B17/08
    • G02B17/0892G03F7/70225G03F7/70275G03F7/70941
    • At least one exemplary embodiment is directed to a projection optical system that projects an image of a pattern of a first object onto a second object includes a first image forming optical system, a second image forming optical system, and a light-shielding member. The first image forming optical system forms an intermediate image of the pattern, and includes a concave mirror and a reflecting mirror. The concave mirror has a reflecting surface opposing the second object. The reflecting mirror directs light from the first object to the concave mirror. The second image forming optical system forms an image of the intermediate image onto the second object, and includes a lens. The light-shielding member is disposed between the concave mirror and the lens.
    • 至少一个示例性实施例涉及将第一物体的图案的图像投影到第二物体上的投影光学系统,包括第一成像光学系统,第二成像光学系统和遮光构件。 第一成像光学系统形成图案的中间图像,并且包括凹面镜和反射镜。 凹面镜具有与第二物体相对的反射面。 反射镜将来自第一物体的光引导到凹面镜。 第二成像光学系统将中间图像的图像形成到第二物体上,并且包括透镜。 遮光构件设置在凹面镜和透镜之间。
    • 44. 发明申请
    • Error correction signal generating device and orthogonal modulator equipped with the error correction signal generating device
    • 纠错信号发生装置和配有纠错信号发生装置的正交调制器
    • US20070030922A1
    • 2007-02-08
    • US10571529
    • 2004-09-09
    • Takashi Kato
    • Takashi Kato
    • H04L27/20
    • H04L27/364
    • An offset errors of a quadrature modulator is corrected. A device including a first correction signal output unit (50) for outputting a first correction signal based upon a local signal (phase: 0°) from a 180°-phase amplifier (27) or a phase shift local signal (phase: 180°) from a 180°-phase amplifier (23), a second correction signal output unit (60) for outputting a second correction signal based upon an orthogonal local signal (phase: 90°) from a 180°-phase amplifier (37) or an orthogonal phase shift local signal (phase: 270°) from a 180°-phase amplifier (33), and a correction signal output unit (70) for outputting a correction signal based upon the first and second correction signals, wherein a correction signal is further added to outputs from an I signal mixer (42) and a Q signal mixer (44) by an adder (46) resulting in correcting offset errors of the quadrature modulation.
    • 校正正交调制器的偏移误差。 一种装置,包括第一校正信号输出单元(50),用于基于来自180°相位放大器(27)的本地信号(相位:0°)或相移本地信号(相位:180°)输出第一校正信号 ),用于基于来自180°相位放大器(37)的正交本地信号(相位:90°)输出第二校正信号的第二校正信号输出单元(60),或者 来自180°相位放大器(33)的正交相移本地信号(相位:270°)和用于基于第一和第二校正信号输出校正信号的校正信号输出单元(70),其中校正信号 进一步通过加法器(46)从I信号混合器(42)和Q信号混合器(44)输出,导致校正正交调制的偏移误差。
    • 47. 发明授权
    • Projection optical system, exposure apparatus, and device manufacturing method
    • 投影光学系统,曝光装置和装置制造方法
    • US07053986B2
    • 2006-05-30
    • US11267858
    • 2005-11-03
    • Takashi KatoChiaki Terasawa
    • Takashi KatoChiaki Terasawa
    • G03B27/54G03B27/42
    • G02B17/0892G02B13/143G02B17/08G03F7/70225G03F7/70275
    • A projection optical system projects an image of a first object onto a second object. A first imaging optical system forms a first intermediate image of the first object, and is a refractive optical system. A second imaging optical system forms a second intermediate image of the first object, and includes two mirrors, one of the two being concave. A third imaging optical system forms an image of the first object onto the second object, and includes a lens. The first, second and third imaging optical systems are arranged along an optical path from the first object in this order. The system satisfies the expression 0.80
    • 投影光学系统将第一物体的图像投射到第二物体上。 第一成像光学系统形成第一物体的第一中间图像,并且是折射光学系统。 第二成像光学系统形成第一物体的第二中间图像,并且包括两个反射镜,两个反射镜之一是凹形的。 第三成像光学系统在第二物体上形成第一物体的图像,并且包括透镜。 第一,第二和第三成像光学系统沿着从第一物体的光路依次排列。 该系统满足表达式0.80 <|β1beta2<2.0,其中β1和β2分别是第一和第二成像光学系统的近轴放大率。 第一成像光学系统和凹面镜具有共同的直线光轴。
    • 50. 发明申请
    • Optical unit, image taking apparatus and optical finder
    • 光学单元,摄像设备和光学取景器
    • US20060050412A1
    • 2006-03-09
    • US11214756
    • 2005-08-31
    • Yoshihiro ItoNobuaki NagoTakashi KatoHitoshi Miyano
    • Yoshihiro ItoNobuaki NagoTakashi KatoHitoshi Miyano
    • G02B13/02
    • G02B15/00G02F1/167G02F1/29
    • An optical unit capable of freely changing the refractive power and operating with a reduced deterioration in performance, an image taking apparatus having an image taking lens using the optical unit, and an optical finder using the optical unit. The optical unit includes a lens body having an electromagnetic field generator which changes the focal length of the lens body by moving, by an electromagnetic force, a dispersoid which is dispersed in a light-transmissive dispersion medium enclosed in a container, which is light-transmissive, and which has a refractive index different from the refractive index of the dispersion medium. The optical unit also includes a focal length changing section which changes the focal length of the lens body in three steps by controlling an electromagnetic field generated by the electromagnetic field generator.
    • 一种光学单元,其能够自由地改变屈光度并且降低性能的降低,具有使用该光学单元的摄像镜头的摄像装置以及使用该光学单元的光学取景器。 光学单元包括具有电磁场发生器的透镜体,其通过电磁力移动分散在包围在容器中的透光分散介质中的分散体来改变透镜体的焦距, 透射性,折射率不同于分散介质的折射率。 光学单元还包括焦距改变部分,其通过控制由电磁场发生器产生的电磁场,三个步骤改变透镜体的焦距。