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    • 43. 发明授权
    • Mosfet structure with substrate coupled source
    • Mosfet结构与衬底耦合源
    • US4794432A
    • 1988-12-27
    • US7034
    • 1987-01-27
    • Hamza YilmazKing OwyangRobert G. Hodgins
    • Hamza YilmazKing OwyangRobert G. Hodgins
    • H01L29/10H01L29/417H01L29/78H01L27/02
    • H01L29/7816H01L29/1087H01L29/1095H01L29/4175H01L29/7802H01L29/42368
    • A disclosed MOSFET cell has a source region formed at the top surface of a semiconductor substrate. The top surface source region is electrically coupled to a conductive region at a bottom portion of the substrate by means of a vertical conduit which projects through the substrate from the top surface to the conductive region. A current exchanger is provided extending over the top surface of the substrate and coupling a top surface portion of the vertical conduit to the source region. The current exchanger makes ohmic contact with the source region and with the conduit region and shorts the two regions together such that majority carrier current of the conduit region will be "converted" into majority carrier current of the source region and electrical continuity between the source region and the conductive region of the substrate is established. Respective source regions of multiple MOSFET cells may be interconnected in accordance with this method through a longitudinally extending conductive layer which is typically formed near the bottom surface of semiconductor substrates.
    • 所公开的MOSFET单元具有形成在半导体衬底的顶表面处的源极区域。 顶表面源区域通过垂直导管电耦合到衬底的底部的导电区域,该垂直导管从衬底从顶表面突出到导电区域。 提供了一种电流交换器,其在衬底的顶表面上延伸并将垂直导管的顶表面部分耦合到源区。 电流交换器与源极区域和导管区域形成欧姆接触并且将两个区域一起短路,使得导管区域的多数载流子电流将被“转换”为源极区域的多数载流子电流,并且源极区域之间的电连续性 并且建立基板的导电区域。 根据该方法,多个MOSFET单元的各个源极区域可以通过纵向延伸的导电层互连,该导电层通常形成在半导体衬底的底表面附近。