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    • 41. 发明授权
    • Registration detection system
    • 注册检测系统
    • US07873206B2
    • 2011-01-18
    • US11661398
    • 2005-10-17
    • Makoto Takagi
    • Makoto Takagi
    • G06K9/00
    • G03F7/70525G03F7/70633G03F9/7088H01L21/67253
    • A registration detection system performing registration-detecting each substrate in a lot without lowering an original throughput of a lithography system and maintaining high accuracy usable for the correction of an exposure process. Therefore, registration detection 5 system includes: the first detection apparatus installed on a pathway to a collection in a transport container of substrates taken out of transport container, after passing at least exposure process and a development process, registration-detects substrates after passing development process, according to stipulated criteria, and outputs results of registration detection for use in correction of exposure process; the second detection apparatus outside 10 the pathway, and registration-detecting substrate when substrate after passing the first detection apparatus and collected in the transport container is taken out of transport container again; and a correction unit comparing detection results by the first and the second detection apparatuses to correct registration detection criteria in the first detection apparatus.
    • 一种登记检测系统,其执行对批次检查每个基板的注册,而不降低光刻系统的原始吞吐量并保持可用于曝光处理的校正的高精度。 因此,登记检测系统5包括:第一检测装置,在通过至少曝光处理和显影处理的至少曝光处理和显影处理之后,安装在通过运送容器取出的基板的运送容器的收集路径中,通过显影处理 根据规定的标准,输出用于曝光过程校正的登记检测结果; 第二检测装置10的路径,以及登记检测基板,当基板经过第一检测装置并收集在运输容器中之后,再次从运输容器中取出; 以及校正单元,其将由所述第一和第二检测装置的检测结果进行比较,以校正所述第一检测装置中的登记检测标准。
    • 43. 发明授权
    • Apparatus and method for placing a component
    • 用于放置部件的装置和方法
    • US06529791B1
    • 2003-03-04
    • US09520729
    • 2000-03-08
    • Makoto Takagi
    • Makoto Takagi
    • G06F1900
    • G06F17/5072
    • Candidate locations in which each of the components is to be placed are assumed. Initially, all the cells on a printed circuit board are the candidates. The range of candidates for the location of each component is narrowed down in some way (for example, the farthest cell from a fixed component is excluded from candidates for the location in which a component that directly relates to the fixed component is to be placed). An approximation problem is created from an original placement problem and a solution that optimizes the approximation problem is find. This solution is a feasible solution of the original placement problem as well. The process of narrowing down the candidates and solving the approximation problem is repeated until one candidate (or more than one candidate having an equal evaluation value) is found ultimately to determine the placement of the component.
    • 假设要放置每个组件的候选位置。 最初,印刷电路板上的所有单元都是候选者。 每个组件的位置的候选范围以某种方式缩小(例如,从固定分量的最远的单元被排除在与要固定分量直接相关的组件的位置的候选位置之外) 。 从原始放置问题创建近似问题,并找到优化近似问题的解决方案。 该解决方案也是原始放置问题的可行解决方案。 重复缩小候选者和解决近似问题的过程,直到最终找到一个候选者(或具有相同评估值的多个候选者)来确定部件的位置为止。
    • 44. 发明授权
    • Image/forming apparatus including an organic substance at low pressure
    • 包括低压有机物的图像形成装置
    • US5998924A
    • 1999-12-07
    • US831295
    • 1997-04-01
    • Keisuke YamamotoMakoto Takagi
    • Keisuke YamamotoMakoto Takagi
    • H01J9/02H01J19/68H01J1/30
    • H01J9/027H01J2329/00
    • An image-forming apparatus includes an electron source including one or more than one electron-emitting devices on a substrate, each electron-emitting device having a pair of oppositely disposed device electrodes, an electroconductive film connected to the pair of device electrodes and an electron-emitting region formed in part of the electroconductive film accompanied by a carbonaceous film which contains carbon or carbon compound as principal ingredient and is formed on and in a vicinity of the electron-emitting region, and an image-forming member for forming an image by emitting light when irradiated with electron beams emitted from the electron source. The electron source and the image-forming member are contained in a vacuum envelope, and an organic substance exists in the vacuum envelope to show a partial pressure of the organic substance greater than 1.times.10.sup.-6 Pa and a total pressure lower than 1.times.10.sup.-3 Pa. The organic substance is so selected that it shows a mean absorption time shorter than the drive period of the electron source.
    • 一种图像形成装置包括一个电子源,它包括一个或多于一个电子发射器件的衬底,每个电子发射器件具有一对相对设置的器件电极,连接到一对器件电极的导电膜和一个电子 伴随着含有碳或碳化合物作为主要成分并形成在电子发射区之上和附近的含碳膜的部分导电膜上的发光区域,以及用于形成图像的图像形成部件 当从电子源发射的电子束照射时发光。 电子源和图像形成构件包含在真空外壳中,有机物质存在于真空外壳中,以显示有机物质的分压大于1×10 -6 Pa,总压力低于1×10 -3 Pa 选择有机物质,其显示比电子源的驱动周期短的平均吸收时间。