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    • 41. 发明授权
    • Helical scan type magnetic tape reproduction apparatus and magnetic tape reproduction method
    • 螺旋扫描型磁带再现装置和磁带复制方法
    • US07477475B2
    • 2009-01-13
    • US11747464
    • 2007-05-11
    • Toshiyuki HiroseHideki NonoyamaOsamu NakamuraAkira ItouYoshinori Saito
    • Toshiyuki HiroseHideki NonoyamaOsamu NakamuraAkira ItouYoshinori Saito
    • G11B5/584
    • G11B5/534G11B5/588
    • Disclosed herein is a helical scan type magnetic tape reproduction apparatus, including: a helical scan type reproduction head capable of moving in the track widthwise direction by displacement of said actuator itself; target time decision means for measuring a period of time from a reference point of time with regard to each of a plurality of markers recorded in a dispersed relationship at predetermined positions on the tracks in advance to the marker by a predetermined number of times, averaging the measurement time periods of the markers and storing the average time periods; and tracking control means for measuring actual time periods from the reference time points with regard to the markers and performing updating control of a control voltage to be applied to said actuator for said reproduction head in accordance with time information of the differences between the target time periods and the actual time periods.
    • 这里公开了一种螺旋扫描型磁带再现装置,包括:能够通过所述致动器本身的位移沿轨道宽度方向移动的螺旋扫描型再现头; 目标时间决定装置,用于相对于在轨道上的预定位置以分散关系记录的多个标记中的每一个,从参考时间点预先指定预定次数来测量一段时间, 标记的测量时间段并存储平均时间段; 以及跟踪控制装置,用于根据标记的参考时间点测量实际时间段,并根据目标时间段之间的差异的时间信息执行要施加到所述再现头的所述致动器的控制电压的更新控制 和实际时间段。
    • 48. 发明申请
    • Method for manufacturing semiconductor device, semiconductor device, and laser irradiation apparatus
    • 半导体器件,半导体器件和激光照射设备的制造方法
    • US20070099440A1
    • 2007-05-03
    • US11637914
    • 2006-12-13
    • Shunpei YamazakiOsamu NakamuraHironobu Shoji
    • Shunpei YamazakiOsamu NakamuraHironobu Shoji
    • H01L21/00
    • H01L21/02686C30B1/023C30B1/08C30B29/06H01L21/02683H01L21/2026
    • [Object]It is an object of the present invention to provide a laser irradiation apparatus being able to crystallize the semiconductor film homogeneously while suppressing the variation of the crystallinity in the semiconductor film and the unevenness of the state of the surface thereof. It is another object of the present invention to provide a method for manufacturing a semiconductor device using the laser irradiation apparatus which can suppress the variation of on-current, mobility, and threshold of TFT, and to further provide a semiconductor device manufactured with the manufacturing method. [Solution]A method for manufacturing a semiconductor device comprising the steps of adding the first noble gas to the semiconductor film formed over the insulating surface with the ion doping method and irradiating the semiconductor film with the first noble gas added therein with the laser light in an atmosphere of second noble gas, wherein the magnetic field is applied to the semiconductor film with the first noble gas added when the laser light is irradiated.
    • 本发明的目的是提供一种激光照射装置,其能够在抑制半导体膜中的结晶性的变化和其表面状态的不均匀的同时,均匀地结晶半导体膜。 本发明的另一个目的是提供一种使用能够抑制TFT的导通电流,迁移率和阈值的变化的激光照射装置的半导体器件的制造方法,并且进一步提供利用制造制造的半导体器件 方法。 [解决方案]一种半导体器件的制造方法,其特征在于,包括以下步骤:通过离子掺杂法将形成在绝缘表面上的半导体膜添加第一稀有气体,并将其中添加有激光的第一稀土气体照射到半导体膜 第二惰性气体的气氛,其中当照射激光时,将第一稀有气体施加到半导体膜上。