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    • 41. 发明申请
    • DISPLAY DEVICE
    • 显示设备
    • US20120168785A1
    • 2012-07-05
    • US13390716
    • 2010-08-05
    • Keiichi TanakaSatoru Kishimoto
    • Keiichi TanakaSatoru Kishimoto
    • H01L33/08
    • H01L51/5281G02F1/133512G02F1/136286H01L27/3276H05B33/12
    • The present invention provides a display device using a copper wiring and having high display properties in which without preventing a higher aperture ratio of the pixel, coloring of a screen due to reflected light of external light produced within the display device can be prevented. The display device according to the present invention is a display device including a plurality of pixel regions, wherein each of the pixel regions includes a copper wiring containing copper or an alloy thereof, and a red-colored layer and a colored layer of another color; and an area of the copper wiring is smaller in the pixel region including the red-colored layer than in the pixel region including the colored layer of another color, the area of the copper wiring reflecting incident light entering from the display surface side of the display device.
    • 本发明提供了一种使用铜布线并具有高显示特性的显示装置,其中不会妨碍像素的较高的开口率,可以防止由于在显示装置内产生的外部光的反射光引起的屏幕着色。 根据本发明的显示装置是包括多个像素区域的显示装置,其中每个像素区域包括包含铜或其合金的铜布线,以及红色层和另一种颜色的着色层; 并且在包括红色层的像素区域中的铜布线的面积比包括另一种颜色的着色层的像素区域小,反射从显示器的显示表面侧入射的光的铜布线的面积 设备。
    • 43. 发明申请
    • RESIDUE REMOVING LIQUID COMPOSITION AND METHOD FOR CLEANING SEMICONDUCTOR ELEMENT USING SAME
    • 残留液体组合物的清除方法及使用其清洗半导体元件的方法
    • US20110256483A1
    • 2011-10-20
    • US13057338
    • 2009-07-07
    • Kyoko KamataKeiichi TanakaHiroshi Matsunaga
    • Kyoko KamataKeiichi TanakaHiroshi Matsunaga
    • G03F7/20C11D7/60
    • H01L21/02071C11D7/10C11D7/244C11D7/261C11D7/34C11D7/5004C11D7/5013C11D7/5022C11D11/0047H01L21/02063
    • Provided are a residue removing liquid composition capable of completely removing a resist residue and a titanium (Ti)-derived residue that remains after dry etching and ashing in via hole formation in a production process for a semiconductor substrate having metal wiring of aluminium (Al) or an Al alloy, at a low temperature in a short time, not corroding parts of an interlayer insulating material, a wiring material and others, and a cleaning method for semiconductor devices using it.The residue removing liquid composition contains (A) ammonium fluoride, (B) methanesulfonic acid, (C) a carbon-carbon triple bond-having compound, (D) a water-soluble organic solvent, and (E) water, wherein the content of (A), (C), (D) and (E) in the residue removing liquid composition is from 0.005 to 2% by mass, from 0.1 to 10% by mass, from 60 to 75% by mass and from 5 to 38% by mass, respectively, and (B) is contained in an amount of from 0.9 to 1.5 times (by mol) the amount of (A).
    • 本发明提供一种残留物除去液体组合物,其能够在具有铝(Al)金属配线的半导体基板的制造工序中完全除去抗蚀剂残渣和残留在通孔形成中的干法蚀刻和灰化之后残留的钛(Ti) 或Al合金,在短时间内的低温下,不会腐蚀层间绝缘材料的部分,布线材料等,以及使用它的半导体器件的清洁方法。 除去残渣的液体组合物含有(A)氟化铵,(B)甲磺酸,(C)具有碳 - 碳三键的化合物,(D)水溶性有机溶剂和(E)水, 残渣除去液组合物中的(A),(C),(D)和(E)为0.005〜2质量%,0.1〜10质量%,60〜75质量% 38质量%,(B)的含量为(A)的量的0.9〜1.5倍(摩尔)。
    • 46. 发明申请
    • STAGE APPARATUS AND ALIGNER
    • 阶段装置和对准器
    • US20100141923A1
    • 2010-06-10
    • US12525084
    • 2008-01-25
    • Youichi MotomuraToshiyuki KonoKeiichi Tanaka
    • Youichi MotomuraToshiyuki KonoKeiichi Tanaka
    • G03B27/58
    • F16F15/02F16F2224/0275G03F7/70716G03F7/70766
    • There is provided a stage apparatus at low cost by constituting a counter mass constituting a movable portion of the stage apparatus at low cost.In a stage apparatus used for fabrication or for inspection, by fastening two pieces of first frames (1) and two pieces of second frames (2) by bolts in a positional relationship of making the first frames (1) and the second frames (2) respectively opposed to each other, a counter mass constituting a movable portion of the stage apparatus is constituted, by attaching ceramic-made air pads (4) to air pad attaching faces respectively formed at upper faces and lower faces of two pieces of the first frames (1) on both sides in a length direction, four air bearings are constituted at four corners of the counter mass of the stage apparatus, and the counter mass is floated up by the four air bearings.
    • 通过以低成本构成构成舞台装置的可动部分的计数器块,以低成本提供了舞台装置。 在用于制造或检查的平台装置中,通过以使第一框架(1)和第二框架(2)的位置关系用螺栓紧固两个第一框架(1)和两个第二框架(2) ),通过将陶瓷制的气垫(4)附接到分别形成在两个第一部分的两个第一部分的上表面和下表面上的气垫安装面,构成台架装置的可移动部分的反质量块 在长度方向两侧的框架(1)中,四个空气轴承构成在平台装置的反质量块的四个角处,并且对质量由四个空气轴承浮起。