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41. 发明授权

US5986299A Semiconductor integrated circuit device having multi-level wiring capacitor structures 失效
标题翻译：具有多电平布线电容器结构的半导体集成电路器件
公开(公告)号：US5986299A
公开(公告)日：1999-11-16
申请号：US962730
申请日：1997-11-03
申请人： Yoshitaka Nakamura , Nobuyoshi Kobayashi , Takuya Fukuda , Masayoshi Saito
发明人： Yoshitaka Nakamura , Nobuyoshi Kobayashi , Takuya Fukuda , Masayoshi Saito
IPC分类号： H01L23/522 , H01L21/768 , H01L21/822 , H01L21/8242 , H01L21/8246 , H01L27/04 , H01L27/105 , H01L27/108 , H01L29/76 , H01L29/94 , H01L31/119
CPC分类号： H01L27/10844 , H01L21/768 , H01L27/105 , H01L27/10808 , H01L27/10852
摘要： A semiconductor integrated circuit device of the invention is provided with a memory cell array portion and a peripheral circuit portions. In the memory cell array portion, a plurality of plugs which penetrate each of a plurality of interlayer insulating films and the sides of which are almost vertical are directly connected in sequence. In the peripheral circuit portion, a plurality of plugs are mutually connected through contact pads for wiring.
摘要翻译：本发明的半导体集成电路器件具有存储单元阵列部分和外围电路部分。在存储单元阵列部分中，贯穿多个层间绝缘膜中的每一个并且其侧面几乎垂直的多个插头依次直接连接。在外围电路部分中，多个插头通过用于布线的接触垫相互连接。

42. 发明授权

US5658811A Method of manufacturing a semiconductor device 失效
标题翻译：制造半导体器件的方法
公开(公告)号：US5658811A
公开(公告)日：1997-08-19
申请号：US405836
申请日：1995-03-17
申请人： Shinichiro Kimura , Hiromasa Noda , Nobuyoshi Kobayashi , Yasushi Goto , Tokuo Kure
发明人： Shinichiro Kimura , Hiromasa Noda , Nobuyoshi Kobayashi , Yasushi Goto , Tokuo Kure
IPC分类号： H01L21/28 , H01L21/336 , H01L21/8234 , H01L21/8238 , H01L27/092 , H01L29/06 , H01L29/10 , H01L29/423 , H01L29/45 , H01L29/49 , H01L29/78 , H01L21/265
CPC分类号： H01L29/66583 , H01L21/28079 , H01L21/823412 , H01L21/823807 , H01L27/0921 , H01L29/1083 , H01L29/41783 , H01L29/42376 , H01L29/456 , H01L29/495 , H01L29/66537 , H01L29/7833 , H01L29/0638
摘要： A method of manufacturing a semiconductor device is disclosed. After an insulating film having an opening is formed on a first thin tungsten film, an impurity is introduced into the substrate through the opening to form a punch-through stopper between a source and a drain. Then, on the first tungsten film inside the opening, a second tungsten film is selectively deposited to form a gate electrode. With this method, it is possible to easily fabricate high-speed MOSFETs whose channel length is less than half a micron.
摘要翻译：公开了制造半导体器件的方法。在第一薄钨膜上形成具有开口的绝缘膜之后，通过开口将杂质引入到基板中，以在源极和漏极之间形成穿通塞。然后，在开口内的第一钨膜上，选择性地沉积第二钨膜以形成栅电极。利用这种方法，可以容易地制造通道长度小于一半的高速MOSFET。

43. 发明授权

US5314839A Solid state device fabrication method including a surface treatment step with a neutral particle beam with an energy between 10ev and 100ev 失效
标题翻译：固态器件制造方法包括具有10ev至100ev之间能量的中性粒子束的表面处理步骤
公开(公告)号：US5314839A
公开(公告)日：1994-05-24
申请号：US756274
申请日：1991-09-06
申请人： Tatsumi Mizutani , Takashi Yunogami , Kenetsu Yokokawa , Nobuyoshi Kobayashi
发明人： Tatsumi Mizutani , Takashi Yunogami , Kenetsu Yokokawa , Nobuyoshi Kobayashi
IPC分类号： H01L21/00 , H01L21/3105 , H01L21/314 , H01L21/316 , H01L21/26
CPC分类号： H01L21/67132 , H01L21/3105 , H01L21/314 , Y10S148/076
摘要： To improve the characteristics of oxides and other insulators formed by conventional techniques, particularly to improve its density, relative dielectric constant, resistance to acid, resistance to reduction and other characteristics, and to provide solid state devices or socharacteristics, the surfaces of the silicon oxide insulator, or the like, is irradiated with electrically neutral particles.
摘要翻译：为了改善通过常规技术形成的氧化物和其它绝缘体的特性，特别是提高其密度，相对介电常数，耐酸性，耐还原性等特性，以及提供固态器件或特性，氧化硅表面绝缘体等被电中性粒子照射。

44. 发明授权

US4807015A Semiconductor device having electrodes and or interconnections of refractory metal film containing silicon oxide 失效
$Semiconductor device having electrodes and or interconnections of refractory metal film containing silicon oxide$
标题翻译：具有含有氧化硅的难熔金属膜的电极和相互连接的半导体装置
公开(公告)号：US4807015A
公开(公告)日：1989-02-21
申请号：US48968
申请日：1987-05-13
申请人： Nobuyoshi Kobayashi , Nobuo Hara , Seiichi Iwata , Naoki Yamamoto
发明人： Nobuyoshi Kobayashi , Nobuo Hara , Seiichi Iwata , Naoki Yamamoto
IPC分类号： H01L29/78 , H01L21/266 , H01L21/28 , H01L21/3205 , H01L23/52 , H01L23/532 , H01L29/423 , H01L29/43 , H01L29/45 , H01L29/49 , H01L23/48
CPC分类号： H01L21/32051 , H01L21/266 , H01L23/53257 , H01L29/43 , H01L29/456 , H01L29/495 , H01L29/4966 , H01L2924/0002
摘要： A semiconductor device which is provided with an electrode and/or an interconnection made of a refractory metal film containing silicon oxide is disclosed. A refractory metal film containing silicon oxide has high capability of blocking penetration of ions and is suitable for being employed as a mask for forming a source and a drain of an MOS transistor by ion-implantation and as it has strong adhesion with an insulation film improves reliability of a semiconductor device.
摘要翻译：公开了一种半导体器件，其具有由包含氧化硅的难熔金属膜构成的电极和/或互连。含有氧化硅的难熔金属膜具有较高的阻挡离子渗透的能力，适合用作通过离子注入形成MOS晶体管的源极和漏极的掩模，并且与绝缘膜具有很强的粘附性半导体器件的可靠性。

45. 发明授权

US08451698B2 Optical disk reproducing device and optical disk recording and reproducing device 有权
标题翻译：光盘再现装置和光盘记录和再现装置
公开(公告)号：US08451698B2
公开(公告)日：2013-05-28
申请号：US12801260
申请日：2010-06-01
申请人： Nobuyuki Asai , Nobuyoshi Kobayashi , Yuji Gendai , Kazumasa Nishimoto , Masaaki Ishihara , Satoshi Kato
发明人： Nobuyuki Asai , Nobuyoshi Kobayashi , Yuji Gendai , Kazumasa Nishimoto , Masaaki Ishihara , Satoshi Kato
IPC分类号： G11B7/00 , G11B5/09 , G11B27/36
CPC分类号： G11B7/0945 , G11B7/0941 , G11B2007/0006
摘要： An optical disk reproducing device includes: a signal reproducing section configured to read and decode information recorded on an optical disk by an optical pickup unit, and reproduce the information, wherein the signal reproducing section includes a gain controlled amplifier circuit configured to amplify an radio frequency signal generated from a light receiving element, an automatic gain control circuit configured to control a gain of the gain controlled amplifier circuit, and a signal processing section configured to derive a part of an automatic gain control value generated in the automatic gain control circuit, and generate a control signal for adjusting one of an optical system path and a detection system path for controlling the optical pickup unit.
摘要翻译：一种光盘再现装置，包括：信号再现部，被配置为通过光学拾取单元读取和解码记录在光盘上的信息，并再现信息，其中信号再现部分包括增益控制放大器电路，其被配置为放大射频从受光元件产生的信号，被配置为控制增益控制放大器电路的增益的自动增益控制电路，以及被配置为导出在自动增益控制电路中生成的自动增益控制值的一部分的信号处理部，以及生成用于调整光学系统路径和检测系统路径之一以控制光学拾取单元的控制信号。

46. 发明授权

US07965604B2 Method of, and apparatus for, recording address information to disc medium 有权
标题翻译：将地址信息记录到盘介质的方法和装置
公开(公告)号：US07965604B2
公开(公告)日：2011-06-21
申请号：US12183789
申请日：2008-07-31
申请人： Shoei Kobayashi , Nobuyoshi Kobayashi , Tamotsu Yamagami , Shinichiro Iimura
发明人： Shoei Kobayashi , Nobuyoshi Kobayashi , Tamotsu Yamagami , Shinichiro Iimura
IPC分类号： G11B7/00
CPC分类号： G11B27/24 , G11B7/0053 , G11B7/24082 , G11B20/1833 , G11B27/19
摘要： In step S1, the address generator generates address information composed of a sync signal which is recorded on an optical disc, address data and an error correction code for the address data, pre-encodes and supplies it to a modulator. At the same time, a carrier signal generator generates a carrier signal which is to carry the address information, and supplies it to the modulator. In step S2, the modulator makes MSK modulation of the carrier signal supplied from the carrier signal generator on the basis of the pre-encoded address information supplied from the address generator, and supplies a resultant MSK modulation signal to a wobbling unit. In step S3, the wobbling unit forms, on the optical disc, a spiral groove wobbled adaptively to the MSK modulation signal supplied from the modulator. In this optical disc, a given address can be accessed quickly and accurately.
摘要翻译：在步骤S1中，地址发生器产生由记录在光盘上的同步信号，地址数据和地址数据的纠错码组成的地址信息，并对其进行编码并将其提供给调制器。同时，载波信号发生器产生携带地址信息的载波信号，并将其提供给调制器。在步骤S2中，调制器根据从地址发生器提供的预先编码的地址信息，对从载波信号发生器提供的载波信号进行MSK调制，并将得到的MSK调制信号提供给摆动单元。在步骤S3中，摆动单元在光盘上形成自适应于从调制器提供的MSK调制信号摆动的螺旋槽。在该光盘中，可以快速准确地访问给定的地址。

47. 发明申请

US20110019512A1 Optical disk reproducing device and optical disk recording and reproducing device 有权
标题翻译：光盘再现装置和光盘记录和再现装置
公开(公告)号：US20110019512A1
公开(公告)日：2011-01-27
申请号：US12801260
申请日：2010-06-01
申请人： Nobuyuki Asai , Nobuyoshi Kobayashi , Yuji Gendai , Kazumasa Nishimoto , Masaaki Ishihara , Satoshi Kato
发明人： Nobuyuki Asai , Nobuyoshi Kobayashi , Yuji Gendai , Kazumasa Nishimoto , Masaaki Ishihara , Satoshi Kato
IPC分类号： G11B7/00
CPC分类号： G11B7/0945 , G11B7/0941 , G11B2007/0006
摘要： An optical disk reproducing device includes: a signal reproducing section configured to read and decode information recorded on an optical disk by an optical pickup unit, and reproduce the information, wherein the signal reproducing section includes a gain controlled amplifier circuit configured to amplify an radio frequency signal generated from a light receiving element, an automatic gain control circuit configured to control a gain of the gain controlled amplifier circuit, and a signal processing section configured to derive a part of an automatic gain control value generated in the automatic gain control circuit, and generate a control signal for adjusting one of an optical system path and a detection system path for controlling the optical pickup unit.
摘要翻译：一种光盘再现装置，包括：信号再现部，被配置为通过光学拾取单元读取和解码记录在光盘上的信息，并再现信息，其中信号再现部分包括增益控制放大器电路，其被配置为放大射频从受光元件产生的信号，被配置为控制增益控制放大器电路的增益的自动增益控制电路，以及被配置为导出在自动增益控制电路中生成的自动增益控制值的一部分的信号处理部，以及生成用于调整光学系统路径和检测系统路径之一以控制光学拾取单元的控制信号。

48. 发明申请

US20100080100A1 TRACKING ERROR SIGNAL DETECTION APPARATUS AND OPTICAL DISC APPARATUS 失效
标题翻译：跟踪错误信号检测装置和光盘装置
公开(公告)号：US20100080100A1
公开(公告)日：2010-04-01
申请号：US12569002
申请日：2009-09-29
申请人： Osamu Hosokawa , Nobuyoshi Kobayashi
发明人： Osamu Hosokawa , Nobuyoshi Kobayashi
IPC分类号： G11B27/36 , H03M1/12
CPC分类号： G11B7/0906 , G11B7/094 , G11B2220/2537
摘要： A DPD tracking error signal detection apparatus includes the following. Four differentiators remove DC components and differentiate four signal with varying differential phases. The signals are then sampled and quantized by four A/D converters, and output to a non-inverting unit and an inverting unit. A phase inverter/compositor then leaves as-is or phase-inverts the output signals, according to a control signal. The non-inverting and the inverting unit each include two Hilbert transformers that phase-shift the output from the A/D converters, two delay units that delay the output of the other A/D converters to match the delay of the Hilbert transformers, two cross-correlators that calculate the cross-correlation between pairs of Hilbert transformers and delay units, and an adding unit that combines the cross-correlator results and outputs the combined result to the phase inverter/compositor.
摘要翻译： DPD跟踪误差信号检测装置包括以下。四个微分器去除直流分量并区分具有变化差分相位的四个信号。然后，信号由四个A / D转换器采样和量化，并输出到同相单元和反相单元。相位逆变器/合成器然后根据控制信号原样或相位反相输出信号。非反相和反相单元各自包括两个希尔伯特变换器，它们相移来自A / D转换器的输出，两个延迟单元延迟其他A / D转换器的输出以匹配希尔伯特变压器的延迟，两个计算希尔伯特变换器和延迟单元对之间的互相关的交叉相关器，以及组合交叉相关器结果并将组合结果输出到相位逆变器/合成器的加法单元。

49. 发明申请

US20090014414A1 SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING SYSTEM, AND COMPUTER-READABLE STORAGE MEDIUM 有权
标题翻译：基板处理方法，基板处理系统和计算机可读存储介质
公开(公告)号：US20090014414A1
公开(公告)日：2009-01-15
申请号：US11870641
申请日：2007-10-11
申请人： Kazuhiro Tomioka , Nobuyoshi Kobayashi , Isamu Sakuragi , Kazuhiro Kubota
发明人： Kazuhiro Tomioka , Nobuyoshi Kobayashi , Isamu Sakuragi , Kazuhiro Kubota
IPC分类号： B44C1/22 , C23F1/08
CPC分类号： H01L21/31138 , G03F7/427 , H01L21/31058 , H01L21/76814 , H01L21/76831
摘要： A substrate processing method includes preparing a substrate having a low-k interlayer dielectric film as a to-be-etched film and a photoresist film, formed on the low-k interlayer insulating film, serving as an etching mask with a predetermined circuit pattern; etching the low-k interlayer insulating film through the photoresist film to form grooves and/or holes in the low-k interlayer insulating film; ashing the photoresist film by using hydrogen radicals generated by bring a hydrogen-containing gas into contact with a catalyst of a high temperature; and recovering damage to the low-k interlayer insulating film due to the ashing by supplying a specific recovery gas. The method further includes recovering damage to the low-k interlayer insulating film due to the etching by supplying a specific recovery gas.
摘要翻译：基板处理方法包括：在低k层间绝缘膜上形成具有预定电路图案的蚀刻掩模的低k层间绝缘膜作为被蚀刻膜和光致抗蚀剂膜的基板; 通过光致抗蚀剂膜蚀刻低k层间绝缘膜，以在低k层间绝缘膜中形成凹槽和/或孔; 使用通过使含氢气体与高温催化剂接触而产生的氢自由基来使光致抗蚀剂膜发生灰化; 并且通过供给特定的回收气体，由于灰化而恢复对低k层间绝缘膜的损坏。该方法还包括通过提供特定的回收气体来回收由于蚀刻而导致的低k层间绝缘膜的损坏。

50. 发明申请

US20080291794A1 METHOD OF, AND APPARATUS FOR, RECORDING ADDRESS INFORMATION TO DISC MEDIUM 有权
标题翻译：用于记录DISC介质的地址信息的方法和装置
公开(公告)号：US20080291794A1
公开(公告)日：2008-11-27
申请号：US12183789
申请日：2008-07-31
申请人： Shoei Kobayashi , Nobuyoshi Kobayashi , Tamotsu Yamagami , Shinichiro Iimura
发明人： Shoei Kobayashi , Nobuyoshi Kobayashi , Tamotsu Yamagami , Shinichiro Iimura
IPC分类号： G11B5/09
CPC分类号： G11B27/24 , G11B7/0053 , G11B7/24082 , G11B20/1833 , G11B27/19
摘要： In step S1, the address generator generates address information composed of a sync signal which is recorded on an optical disc, address data and an error correction code for the address data, pre-encodes and supplies it to a modulator. At the same time, a carrier signal generator generates a carrier signal which is to carry the address information, and supplies it to the modulator. In step S2, the modulator makes MSK modulation of the carrier signal supplied from the carrier signal generator on the basis of the pre-encoded address information supplied from the address generator, and supplies a resultant MSK modulation signal to a wobbling unit. In step S3, the wobbling unit forms, on the optical disc, a spiral groove wobbled adaptively to the MSK modulation signal supplied from the modulator. In this optical disc, a given address can be accessed quickly and accurately.
摘要翻译：在步骤S1中，地址发生器产生由记录在光盘上的同步信号，地址数据和地址数据的纠错码组成的地址信息，并对其进行编码并将其提供给调制器。同时，载波信号发生器产生携带地址信息的载波信号，并将其提供给调制器。在步骤S2中，调制器根据从地址发生器提供的预先编码的地址信息，对从载波信号发生器提供的载波信号进行MSK调制，并将得到的MSK调制信号提供给摆动单元。在步骤S3中，摆动单元在光盘上形成自适应于从调制器提供的MSK调制信号摆动的螺旋槽。在该光盘中，可以快速准确地访问给定的地址。

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