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    • 41. 发明申请
    • Unsaturated ester substituted polymers with reduced halogen content
    • 具有降低的卤素含量的不饱和酯取代的聚合物
    • US20050107575A1
    • 2005-05-19
    • US10717295
    • 2003-11-19
    • Christine DeVisserTimothy Bender
    • Christine DeVisserTimothy Bender
    • G03F7/038C08F299/02C08G63/02C08G65/40C08G65/48H01L21/027
    • C08G65/40C08G65/48G03F7/0388
    • Polymers of the formula wherein x is 0 or 1, R1-4 are alkyl, aryl, arylalkyl, or alkylaryl groups, X1-4 are halogens, a′, b′, c′, and d′ are 0-4, UE is an unsaturated ester group, e, f, g, and h are 0-4, at least one of e, f, g, and h is ≧1 in at least some monomers, SE is a saturated ester group, i, j, k, and m are 0-4, at least one of i, j, k, and m is ≧1 in at least some monomers, a′+e+i≦4, b′+f+j≦4, c′+g+k≦4, d′+h+m≦4, RX represents the total number of haloalkyl groups in the polymer, the ratio of UE groups to SE groups to RX groups in the polymer is νε:σε:ρχwherein νε is from about 1 to about 99.99, wherein σε is from about 0.01 to about 99, wherein ρχ is from 0 to about 50, and wherein νε+σε+ρχ=100.
    • 下式的聚合物其中x为0或1,R1-4为烷基,芳基,芳基烷基或烷基芳基,X 1 - 4为卤素,a',b ',c'和d'为0-4,UE为不饱和酯基,e,f,g和h为0-4,e,f,g和h中的至少一个为> = 1 至少一些单体,SE是饱和酯基,i,j,k和m是0-4,在至少一些单体中,i,j,k和m中的至少一个为> = 1,a + e + i <= 4,b'+ f + j <= 4,c'+ g + k <= 4,d'+ h + m <= 4,RX表示聚合物中卤代烷基的总数, 聚合物中UE组与SE组与RX组的比例为<?in-line-formula description =“In-line Formulas”end =“lead”?> nuepsilon:sigmaepsilon:rhochi <?in-line-formula description = 其中nuepsilon为约1至约99.99,其中sigmaepsilon为约0.01至约99,其中rhochi为0至约50,并且其中nuepsilon + sigmaepsilon + rhochi = 100。