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    • 42. 发明申请
    • PRESSURE GAUGE
    • 压力计
    • US20100154553A1
    • 2010-06-24
    • US12601077
    • 2008-06-04
    • Kim Phan LeJozef T. M. Van Beek
    • Kim Phan LeJozef T. M. Van Beek
    • G01L9/06G01L9/12
    • G01L21/22G01L9/0022H03H9/02259H03H9/2452H03H2009/02496
    • A pressure/vacuum sensor and method, comprising: driving a MEMS piezoresistive resonator (8) into resonant vibration, applying Joule heating to the resonator (8); and sensing a variable parameter that varies in response to the tendency of the resonant frequency (fo) to depend upon the temperature of the resonator (8), the temperature thereof depending upon the pressure. The variable parameter may be the resonant frequency of the resonator (8), or a change therein, or may be derived from a feedback loop, being for example a time integrated feedback signal (82) or a reading (94) of the sense current (22), the loop keeping the resonant frequency constant in opposition to the above mentioned tendency. A reference MEMS capacitive resonator (62) may be located in the vicinity of the resonator (8) for compensating purposes.
    • 一种压力/真空传感器和方法,包括:将MEMS压阻谐振器(8)驱动到共振振动中,对谐振器(8)施加焦耳加热; 以及感测响应谐振频率(fo)的趋势而变化的可变参数取决于谐振器(8)的温度,其温度取决于压力。 可变参数可以是谐振器(8)的谐振频率或其中的变化,或者可以从反馈回路导出,例如时间积分反馈信号(82)或感测电流的读数(94) (22),保持谐振频率与上述趋势相反的环路的回路。 参考MEMS电容谐振器(62)可以位于谐振器(8)附近用于补偿目的。
    • 43. 发明申请
    • Sensor Arrangement
    • 传感器布置
    • US20080258722A1
    • 2008-10-23
    • US11576141
    • 2005-09-21
    • Hans ZonJaap RuigrokJan Cornelis HoevenKim Phan Le
    • Hans ZonJaap RuigrokJan Cornelis HoevenKim Phan Le
    • G01R33/025
    • G01D5/147G01R33/09G01R33/096G05G9/047G05G2009/04729G05G2009/04755G06F3/0338
    • Consistent with an example embodiment, devices comprise sensor arrangements with field detectors for detecting components of magnetic fields in planes of the field detectors. The sensor arrangements further include movable objects for, in response to tilting movements, changing at least parts of the components of the magnetic fields in the planes of the field detectors so that the sensor arrangements are made less sensitive to in-plane stray fields by providing the field detectors with saturated field-dependent elements. The movable object may comprise a movable field generator for generating the magnetic field, or the movable object and the field generator may be different objects. The magnetic field is such that the field-dependent element is saturated. The field generator is smaller than the field detector, and the movable object is larger than the field detector, to reduce alignment problems. The movable object has a pivoting point close to the field detector.
    • 与示例性实施例一致,设备包括具有用于检测场检测器的平面中的磁场分量的场检测器的传感器装置。 传感器装置还包括可移动物体,用于响应于倾斜运动,改变场检测器的平面中的磁场的分量的至少一部分,使得传感器装置对平面内杂散场的敏感度较低,提供 具有饱和场相关元件的场检测器。 可移动物体可以包括用于产生磁场的可移动场发生器,或者可移动物体和场发生器可以是不同的物体。 磁场使得场依赖元件饱和。 场发生器小于场检测器,可移动物体大于场检测器,以减少对准问题。 可移动物体具有靠近场检测器的枢转点。
    • 44. 发明申请
    • Device with a Sensor Arrangement
    • 具有传感器布置的设备
    • US20080202241A1
    • 2008-08-28
    • US11910972
    • 2006-04-06
    • Kim Phan Le
    • Kim Phan Le
    • G01P15/11G01P15/18
    • G01D5/145G01P15/105G01P15/18
    • Devices (1) are provided with sensor arrangements (2) comprising field generators (10) for generating magnetic fields and first/second/third field detectors (11,12,13) comprising first/second/third elements (R1-R4, S1-S4, T1-T4) for detecting first/second/third components of the magnetic fields in a plane and movable objects (14) for, in response to first/second/third accelerations of the movable objects (14) in first/second/third directions, changing the first/second/third components of the magnetic fields (11,12,13) is more sensitive to the first (second, third) acceleration than to the other accelerations. Such devices (1) have a good sensitivity and a good linearity. The elements (R1-R4, S1-S4, T1-T4) form part of bridges. The first elements (R1-R4) surround the second and third elements (S1-S4, T1-T4), or vice versa. The first elements (R1-R4) may be in round or rectangular form and the second and third elements (S1-S4, T1-T4) may be in the form of sun beams leaving a sun. The first elements are non-saturated barberpole magnetoresistive elements measuring the field strength which varies in response to accelerations in a direction perpendicular to the plane. The second and third elements are saturated barberpole magnetoresistive elements measuring changes in the direction of the magnetic field in response to accelerations in directions parallel to the plane.
    • 设备(1)设置有包括用于产生磁场的场发生器(10)和包括第一/第二/第三元件(R 1 -R 4)的第一/第二/第三场检测器(11,12,13)的传感器装置(2) ,S 1 -S 4,T 1 -T 4),用于响应于可移动物体的第一/第二/第三加速度来检测平面中的磁场的第一/第二/第三分量和可移动物体(14) 在第一/第二/第三方向上,改变磁场(11,12,13)的第一/第二/第三分量比对其它加速度对第一(第二,第三)加速度更敏感。 这种装置(1)具有良好的灵敏度和良好的线性度。 元件(R 1 -R 4,S 1 -S 4,T 1 -T 4)构成桥的一部分。 第一元件(R 1 -R 4)围绕第二和第三元件(S 1 -S 4,T 1 -T 4),反之亦然。 第一元件(R 1 -R 4)可以是圆形或矩形形式,并且第二和第三元件(S 1 -S 4,T 1 -T 4)可以是太阳光束离开太阳的形式。 第一元件是测量场强度的非饱和的barberpole磁阻元件,该场强响应垂直于该平面的方向的加速度而变化。 第二和第三元件是饱和的barberpole磁阻元件,其响应于平行于平面的方向的加速度来测量磁场方向的变化。
    • 45. 发明申请
    • Device With A Sensor Arrangement
    • 具有传感器布置的设备
    • US20080184799A1
    • 2008-08-07
    • US11911669
    • 2006-04-13
    • Kim Phan LeHans Van Zon
    • Kim Phan LeHans Van Zon
    • G01P15/11
    • G01P15/18G01P15/105G01P15/11
    • Devices (40) are provided with sensor arrangements (41) comprising field generators (42) for generating magnetic fields, field detectors (43) comprising magnetic field dependent elements (51-58) for detecting components of the magnetic fields in planes of the elements (51-58), and movable objects (44) for, in response to accelerations of the movable objects (44) parallel to the planes, changing the components of the magnetic fields. Length axes of the magnetic field dependent elements (51-58) make angles between minus 80 degrees and plus 80 degrees with the components to be detected. Means for forcing the movable objects (44) into rest positions comprise elastic material (59) or fixed objects (46) whereby one of the objects (44,46) comprises the field generator (42) and the other comprises magnetic material or a further field generator (50).
    • 设备(40)设置有包括用于产生磁场的场发生器(42)的传感器装置(41),包括磁场相关元件(51-58)的场检测器(43),用于检测元件平面中的磁场的分量 (51-58)和可移动物体(44),用于响应于平行于平面的可移动物体(44)的加速度,改变磁场的分量。 磁场相关元件(51-58)的长轴与零件之间的角度在零下80度和正80度之间。 用于迫使可移动物体(44)进入静止位置的装置包括弹性材料(59)或固定物体(46),由此物体(44,46)中的一个包括场发生器(42),另一个包括磁性材料或另外 场发生器(50)。