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    • 42. 发明授权
    • Light beam scanning device
    • 光束扫描装置
    • US5418639A
    • 1995-05-23
    • US181766
    • 1994-01-21
    • Hiroyuki Yamazaki
    • Hiroyuki Yamazaki
    • G02B13/00G02B13/18G02B26/10G02B26/12G02B26/08
    • G02B26/125
    • A light beam scanning device in which two image formation lenses are disposed between a rotational polygonal mirror to reflect a light beam sent from a laser beam source, and a surface to be scanned. An image is formed on the scanned surface by the reflected light beam. A reflecting surface of the mirror and the scanned surface are approximately set in a geometrical-optical conjugate relation. The lens includes a surface on which a change in the radius of curvature in a secondary scanning direction is non-symmetrical with respect to the distance h from the optical axis. When rh(+) is defined as the radius of curvature in the secondary scanning direction section parallel to the optical axis at a position distant from the optical axis by h in the direction of "+" in the primary scanning direction, and rh(-) is defined as the radius of curvature in the secondary scanning direction section parallel to the optical axis at a position distant from the optical axis by h in the direction of "-" in the primary scanning direction, rh(+) and rh(-) are expressed by the following equation:rh(.+-.)=r.sub.0 =(1+k(.+-.).multidot.R.sub.p .multidot..alpha./n).multidot.R.multidot.[ 1-cos { sin.sup.-1 (h/R)}]and the following inequality is satisfied:k(+)-k(-)> 0.005M.sup.2,M is a lateral magnification in the secondary scanning direction of the lenses.
    • 一种光束扫描装置,其中两个图像形成透镜设置在旋转多面镜之间以反射从激光束源发送的光束和待扫描的表面。 通过反射光束在扫描表面上形成图像。 反射镜和扫描表面的反射表面近似设置成几何光学共轭关系。 该透镜包括其表面,二次扫描方向上的曲率半径的变化相对于距离光轴的距离h不对称。 当rh(+)被定义为在沿着主扫描方向的“+”方向上在远离光轴h的位置处平行于光轴的副扫描方向部分的曲率半径,并且rh( - )定义为在主扫描方向上的“ - ”方向上的远离光轴h的位置处的平行于光轴的副扫描方向部分的曲率半径,rh(+)和rh( - )由以下等式表示:rh(+/-)= r0 =(1 + k(+/-)xRpxα/ n)xRx [1-cos {sin-1(h / R)}] 满足不等式:k(+) - k( - )> 0.005M2,M是透镜的副扫描方向的横向倍率。
    • 43. 发明授权
    • Device for detecting surface level of scum in scum removing apparatus
    • 用于检测浮渣装置中浮渣表面水平的装置
    • US4166609A
    • 1979-09-04
    • US825595
    • 1977-08-18
    • Katsumi NagasakiKoichi TanimuraYoshihiro InoueHiroyuki YamazakiTetsuo Momose
    • Katsumi NagasakiKoichi TanimuraYoshihiro InoueHiroyuki YamazakiTetsuo Momose
    • B22D43/00G01F23/24C21C7/04
    • B22D43/008G01F23/242
    • In a scum removing apparatus including a suction source, a suction pipe having one end communicating with the suction source and the other free end positioned above the surface of scum to suck the scum and apply water to the sucked scum in the vicinity of the free end, and a scum separator provided at an intermediate portion of the suction pipe, a device for detecting the level of the scum surface relative to the free end of the suction pipe. The detecting device comprises a pair of electrode rods provided on the outer periphery of the free end of the suction pipe and projecting from the pipe end by a suitable length, and means for detecting variations in the electric resistance between the electrode rods. The electrode rod comprises a tube having accommodated therein a slider slidingly projectable from the front end of the tube and slidingly retractable into the tube. The slider is supported by a spring in its retracted position within the tube and connected to means for pushing out the slider from the front end of the tube against the action of the spring.
    • 在包括抽吸源的抽气装置中,具有与吸入源连通的一端的吸入管和位于浮渣表面上方的另一个自由端吸入浮渣并在自由端附近的吸附浮渣上施加水 以及设置在吸入管的中间部分的浮渣分离器,用于检测浮渣表面相对于吸入管的自由端的水平的装置。 检测装置包括一对电极杆,设置在吸管的自由端的外周上并且从管端突出适当的长度,以及用于检测电极棒之间的电阻变化的装置。 电极杆包括容纳有从滑块可从管的前端突出并滑动地伸缩到管中的滑块的管。 滑块由弹簧支撑在管内的缩回位置,并连接到抵抗弹簧的作用从管的前端推出滑块的装置。
    • 49. 发明申请
    • DOUBLE-SIDE COATING APPARATUS, METHOD FOR COATING DOUBLE SIDES WITH COATING SOLUTION, EDGE RINSING APPARATUS, AND EDGE RINSING METHOD
    • 双面涂布装置,涂层双面涂布方法,边缘冲洗装置和边缘冲洗方法
    • US20110027478A1
    • 2011-02-03
    • US12935553
    • 2009-03-30
    • Masato FukushimaTsubasa OkadaHiroyuki YamazakiNaoyuki Imai
    • Masato FukushimaTsubasa OkadaHiroyuki YamazakiNaoyuki Imai
    • B05D3/12B05D1/02B05D3/00B08B3/00
    • G11B5/855B05D1/00B05D1/002
    • Provided is a double-side coating apparatus which can uniformly coat both surfaces of a substrate to be processed with a coating solution and form uniform coating films on both the surfaces of the substrate to be processed. A double-side coating apparatus (1) includes a holding mechanism (3a) which holds a substrate (2) to be processed so that the thickness direction of the substrate (2) to be processed is a horizontal direction; a rotational driving mechanism which rotates the substrate (2) to be processed in a circumferential direction; a first coating solution nozzle (18a) which jets a coating solution onto one main surface (2a) of the substrate (2) to be processed; and a second coating solution nozzle which jets the coating solution onto the other main surface (2b) of the substrate (2) to be processed. The first coating solution nozzle (18a) and the second coating solution nozzle are symmetrically arranged with respect to a thickness center surface of the substrate (2) to be processed. Provided is an edge rinsing apparatus which can accurately and stably rinse only a fixed width of an outer peripheral portion of the substrate and can easily control the width of the outer peripheral portion to be rinsed even if the width of the outer peripheral portion to be rinsed is small.
    • 提供一种双面涂布装置,其能够均匀地涂布被处理基板的两面,并且在被处理基板的两面上形成均匀的涂膜。 双面涂布装置(1)包括:保持机构(3a),其保持要处理的基板(2),使得待处理的基板(2)的厚度方向为水平方向; 旋转驱动机构,其使圆​​周方向的被处理基板旋转; 第一涂布溶液喷嘴(18a),其将涂布溶液喷射到待处理的基板(2)的一个主表面(2a)上; 以及第二涂布溶液喷嘴,其将涂布溶液喷射到待处理的基板(2)的另一个主表面(2b)上。 第一涂布溶液喷嘴(18a)和第二涂布液喷嘴相对于待处理的基板(2)的厚度中心表面对称地布置。 本发明提供一种边缘冲洗装置,其能够精确稳定地仅冲洗基板的外周部的固定宽度,并且即使要冲洗的外周部的宽度也容易控制要冲洗的外周部的宽度 是小。