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41. 发明授权

US09772208B2 Thermal type flowmeter with particle guide member 有权
公开(公告)号：US09772208B2
公开(公告)日：2017-09-26
申请号：US14359161
申请日：2012-01-18
申请人： Hiroshi Nakano , Masahiro Matsumoto , Satoshi Asano , Keiji Hanzawa
发明人： Hiroshi Nakano , Masahiro Matsumoto , Satoshi Asano , Keiji Hanzawa
IPC分类号： G01F1/692 , G01F1/684 , G01F1/696 , G01F15/00 , G01F5/00
CPC分类号： G01F1/692 , G01F1/6842 , G01F1/696 , G01F5/00 , G01F15/00
摘要： Provided is a thermal type flowmeter in which contamination of a sensor element is reduced. The flowmeter includes a sensor element including a heating resistor formed in a thin film part, the thin film part being provided on a diaphragm formed on a substrate; a support member to locate the sensor element thereon; a secondary channel that includes part of the support member and takes in part of intake air flowing through an air intake pipeline; and a guide member provided on the support member or the sensor element that lies on a line L that extends along an air flow in the secondary channel and passing over the thin film part, the guide member allowing fine particles to be guided in a direction away from the line L, the fine particles coming together with an air flow along the surface of the support member or the sensor element.

42. 发明申请

US20140167781A1 SENSOR DEVICE 审中-公开
标题翻译：传感器设备
公开(公告)号：US20140167781A1
公开(公告)日：2014-06-19
申请号：US14235933
申请日：2011-08-03
申请人： Satoshi Asano , Masahiro Matsumoto , HIroshi Nakano , Keiji Hanzawa
发明人： Satoshi Asano , Masahiro Matsumoto , HIroshi Nakano , Keiji Hanzawa
IPC分类号： G01R1/18 , G01D7/00
CPC分类号： G01R1/18 , B81B3/0086 , G01D7/00
摘要： An objective of the present invention is to provide a sensor device with an increased accuracy. In order to achieve the objective, provided is a sensor device includes: an external terminal 2 to which an external device is connected; a ground terminal 3 connected to the ground; an internal circuit 4 that generates a sensor output signal; and a protection circuit 5 having a resistive element 6 and a capacitative element 7 between the external terminal and the internal circuit, in which the capacitative element is formed of a pair of electrodes having different conductivities from each other and a lower-conductive electrode 7a of the electrodes which has a smaller conductivity is connected to the external terminal and the internal circuit.
摘要翻译：本发明的目的是提供一种具有更高精度的传感器装置。为了实现该目的，提供了一种传感器装置，包括：连接有外部装置的外部端子2; 连接到地面的接地端子3; 产生传感器输出信号的内部电路4; 以及保护电路5，其在外部端子和内部电路之间具有电阻元件6和电容元件7，其中电容元件由彼此具有不同电导率的一对电极形成，并且电容元件7的下导电电极7a 具有较小导电性的电极连接到外部端子和内部电路。

43. 发明申请

US20130199280A1 Thermal Flow Meter 有权
标题翻译：热流量计
公开(公告)号：US20130199280A1
公开(公告)日：2013-08-08
申请号：US13813094
申请日：2011-07-28
申请人： Hiroshi Nakano , Masahiro Matsumoto , Satoshi Asano , Keiji Hanzawa
发明人： Hiroshi Nakano , Masahiro Matsumoto , Satoshi Asano , Keiji Hanzawa
IPC分类号： G01F1/692
CPC分类号： G01F1/692 , G01F1/6842 , G01F1/699
摘要： An object of the present invention is to provide a thermal type flow rate sensor that offers high sensitivity and improved reliability. A sensor element according to the present invention includes a semiconductor substrate, a cavity portion formed on the semiconductor substrate, a heating resistor formed on the cavity portion via an electrically insulating film, a heating temperature sensor for detecting heating temperature of the heating resistor, and a driving circuit for controlling the heating temperature of the heating resistor using the temperature detected by the heating temperature sensor. The heating temperature sensor comprises temperature-sensitive resistors having resistance values varying according to temperature and disposed upstream and downstream of a direction of flow of a fluid to be measured relative to the heating resistor and on upper and lower sides in a direction perpendicular to the direction of flow of the fluid to be measured relative to the heating resistor.
摘要翻译：本发明的目的是提供一种提供高灵敏度和改善的可靠性的热式流量传感器。根据本发明的传感器元件包括半导体衬底，形成在半导体衬底上的空腔部分，通过电绝缘膜形成在空腔部分上的发热电阻器，用于检测加热电阻器的加热温度的加热温度传感器，以及使用由加热温度传感器检测到的温度来控制加热电阻器的加热温度的驱动电路。加热温度传感器包括具有根据温度变化的电阻值的温度敏感电阻器，并且设置在相对于加热电阻器的被测量流体的流动方向的上游和下游以及垂直于该方向的方向上下侧要测量的流体相对于加热电阻器的流动。

44. 发明申请

US20110023597A1 THERMAL FLOW METER 有权
标题翻译：热流量计
公开(公告)号：US20110023597A1
公开(公告)日：2011-02-03
申请号：US12844429
申请日：2010-07-27
申请人： Hiroshi NAKANO , Masahiro Matsumoto , Keiji Hanzawa
发明人： Hiroshi NAKANO , Masahiro Matsumoto , Keiji Hanzawa
IPC分类号： G01F1/69
CPC分类号： G01F1/6845 , G01F1/692 , G01F1/698 , G01F1/699
摘要： Provided is a heating temperature adjustment circuit in a thermal flow meter capable of adjusting fluctuations of a heating temperature of a heat-generating resistor due to fluctuations of resistances with high accuracy and low cost. The thermal flow meter comprises: a heat-generating resistor that generates heat when a current flows therethrough; a first temperature measuring resistor, a second resistor, a third resistor, and a fourth resistor whose resistance values vary due to temperature; and a fixed resistance having a resistance temperature coefficient lower than that of the first temperature measuring resistor, and measuring a flow rate of a fluid by controlling the heating temperature of the heat-generating resistor. The thermal flow meter includes: a first series circuit in which the fixed resistance, the first temperature measuring resistor, and the second resistor are connected to one another in series; and a second series circuit in which the third resistor and the fourth resistor are connected to each other in series, and generates a voltage to be added to the second series circuit based on voltages at both ends of the fixed resistance.
摘要翻译：提供一种热流量计中的加热温度调节电路，其能够以高精度和低成本由于电阻的波动而调节发热电阻器的加热温度的波动。热流量计包括：当电流流过其中时产生热量的发热电阻器; 第一温度测量电阻器，第二电阻器，第三电阻器和电阻值由温度变化的第四电阻器; 以及电阻温度系数低于第一温度测量电阻器的固定电阻，并且通过控制发热电阻器的加热温度来测量流体的流量。热流量计包括：第一串联电路，其中固定电阻，第一温度测量电阻器和第二电阻器串联连接; 以及第二串联电路，其中第三电阻器和第四电阻器串联连接，并且基于固定电阻两端的电压产生要添加到第二串联电路的电压。

45. 发明授权

US09188470B2 Thermal flow meter 有权
标题翻译：热流量计
公开(公告)号：US09188470B2
公开(公告)日：2015-11-17
申请号：US13813094
申请日：2011-07-28
申请人： Hiroshi Nakano , Masahiro Matsumoto , Satoshi Asano , Keiji Hanzawa
发明人： Hiroshi Nakano , Masahiro Matsumoto , Satoshi Asano , Keiji Hanzawa
IPC分类号： G01F1/68 , G01F1/692 , G01F1/684 , G01F1/699
CPC分类号： G01F1/692 , G01F1/6842 , G01F1/699
摘要： An object of the present invention is to provide a thermal type flow rate sensor that offers high sensitivity and improved reliability. A sensor element according to the present invention includes a semiconductor substrate, a cavity portion formed on the semiconductor substrate, a heating resistor formed on the cavity portion via an electrically insulating film, a heating temperature sensor for detecting heating temperature of the heating resistor, and a driving circuit for controlling the heating temperature of the heating resistor using the temperature detected by the heating temperature sensor. The heating temperature sensor comprises temperature-sensitive resistors having resistance values varying according to temperature and disposed upstream and downstream of a direction of flow of a fluid to be measured relative to the heating resistor and on upper and lower sides in a direction perpendicular to the direction of flow of the fluid to be measured relative to the heating resistor.
摘要翻译：本发明的目的是提供一种提供高灵敏度和改善的可靠性的热式流量传感器。根据本发明的传感器元件包括半导体衬底，形成在半导体衬底上的空腔部分，通过电绝缘膜形成在空腔部分上的发热电阻器，用于检测加热电阻器的加热温度的加热温度传感器，以及使用由加热温度传感器检测到的温度来控制加热电阻器的加热温度的驱动电路。加热温度传感器包括具有根据温度变化的电阻值的温度敏感电阻器，并且设置在相对于加热电阻器的被测量流体的流动方向的上游和下游以及垂直于该方向的方向上下侧要测量的流体相对于加热电阻器的流动。

46. 发明授权

US09038454B2 Thermal flowmeter 有权
标题翻译：热流量计
公开(公告)号：US09038454B2
公开(公告)日：2015-05-26
申请号：US13814855
申请日：2011-09-06
申请人： Satoshi Asano , Masahiro Matsumoto , Hiroshi Nakano
发明人： Satoshi Asano , Masahiro Matsumoto , Hiroshi Nakano
IPC分类号： G01F1/68 , G01F1/69 , G01F1/684 , G01F1/692
CPC分类号： G01F1/69 , G01F1/6845 , G01F1/692
摘要： Measuring flow rate of gas based on amount of heat transfer from gas to temperature-sensing resistors, comprises: substrate having hollow space formed therethrough; an insulating film deposited on the substrate so as to cover the hollow space; a heat-generating resistor formed on the insulating film; temperature-sensing resistors arranged adjacent to the heat-generating resistor; electrodes arranged at an edge of the semiconductor substrate so electrodes are parallel to the edge; and wiring connecting the electrodes and heat-generating resistors. Thermal resistance of a first area is made almost equal to thermal resistance of a second area, first area is defined by the side of the heat-generating resistor closer to the electrodes and by the side of the hollow space closer to the electrodes, and the second area is defined by the opposite side of the heat-generating resistor and by the opposite side of the hollow space.
摘要翻译：基于从气体到温度感测电阻器的传热量来测量气体的流量，包括：具有通过其形成的中空空间的衬底; 沉积在基板上以覆盖中空空间的绝缘膜; 形成在绝缘膜上的发热电阻器; 与发热电阻相邻设置的温度感测电阻器; 电极布置在半导体衬底的边缘处，使得电极平行于边缘; 以及连接电极和发热电阻器的布线。第一区域的热阻几乎等于第二区域的热阻，第一区域由靠近电极的发热电阻器的侧面和靠近电极的中空空间的一侧限定，并且第二区域由发热电阻器的相对侧和中空空间的相对侧限定。

47. 发明授权

US08596113B2 Intake air temperature sensor and thermal airflow meter including the same 有权
标题翻译：进气温度传感器和热风量计包括相同
公开(公告)号：US08596113B2
公开(公告)日：2013-12-03
申请号：US13360923
申请日：2012-01-30
申请人： Masahiro Matsumoto , Hiroshi Nakano , Keiji Hanzawa , Satoshi Asano
发明人： Masahiro Matsumoto , Hiroshi Nakano , Keiji Hanzawa , Satoshi Asano
IPC分类号： G01M15/04
CPC分类号： G01K13/02 , G01F1/00 , G01F1/68 , G01F1/6888 , G01F5/00 , G01F15/185 , G01K1/20 , G01K7/42 , G01K2013/024 , G01K2205/02
摘要： An intake air temperature sensor capable of detecting an intake air temperature highly accurately and at high speed. The intake air temperature sensor of the present invention includes: a secondary passage 7 taking in an intake airflow; a flow rate detecting element 13 disposed in the secondary passage 7; an intake air temperature detecting element 4 provided outside the secondary passage; a temperature sensor 9 detecting a temperature of a fitting section of the intake air temperature detecting element 4; a circuit board 11 disposed in a casing; and an integrated circuit 10 applying a correction process to an output of the intake air temperature detecting element 4 on the basis of signals output from the temperature sensor 9 and a flow rate detecting element 13.
摘要翻译：能够高精度地且高速地检测进气温度的进气温度传感器。本发明的进气温度传感器包括：进入气流的二次通路7; 设置在次通道7中的流量检测元件13; 设置在次级通道外侧的进气温度检测元件4; 检测进气温度检测元件4的嵌合部的温度的温度传感器9; 布置在壳体中的电路板11; 以及基于从温度传感器9和流量检测元件13输出的信号将校正处理应用于进气温度检测元件4的输出的集成电路10。

48. 发明申请

US20130145840A1 THERMAL FLOWMETER 有权
标题翻译：热流量计
公开(公告)号：US20130145840A1
公开(公告)日：2013-06-13
申请号：US13814855
申请日：2011-09-06
申请人： Satoshi Asano , Masahiro Matsumoto , Hiroshi Nakano
发明人： Satoshi Asano , Masahiro Matsumoto , Hiroshi Nakano
IPC分类号： G01F1/69
CPC分类号： G01F1/69 , G01F1/6845 , G01F1/692
摘要： Measuring flow rate of gas based on amount of heat transfer from gas to temperature-sensing resistors, comprises: substrate having hollow space formed therethrough; an insulating film deposited on the substrate so as to cover the hollow space; a heat-generating resistor formed on the insulating film; temperature-sensing resistors arranged adjacent to the heat-generating resistor; electrodes arranged at an edge of the semiconductor substrate so electrodes are parallel to the edge; and wiring connecting the electrodes and heat-generating resistors. Thermal resistance of a first area is made almost equal to thermal resistance of a second area, first area is defined by the side of the heat-generating resistor closer to the electrodes and by the side of the hollow space closer to the electrodes, and the second area is defined by the opposite side of the heat-generating resistor and by the opposite side of the hollow space.
摘要翻译：基于从气体到温度感测电阻器的传热量来测量气体的流量，包括：具有通过其形成的中空空间的衬底; 沉积在基板上以覆盖中空空间的绝缘膜; 形成在绝缘膜上的发热电阻器; 与发热电阻相邻设置的温度感测电阻器; 电极布置在半导体衬底的边缘处，使得电极平行于边缘; 以及连接电极和发热电阻器的布线。第一区域的热阻几乎等于第二区域的热阻，第一区域由靠近电极的发热电阻器的侧面和靠近电极的中空空间的一侧限定，并且第二区域由发热电阻器的相对侧和中空空间的相对侧限定。

49. 发明授权

US08186213B2 Thermal-type flowmeter 有权
标题翻译：热式流量计
公开(公告)号：US08186213B2
公开(公告)日：2012-05-29
申请号：US12708387
申请日：2010-02-18
申请人： Hiroshi Nakano , Masahiro Matsumoto , Keiji Hanzawa
发明人： Hiroshi Nakano , Masahiro Matsumoto , Keiji Hanzawa
IPC分类号： G01F1/68
CPC分类号： G01F5/00 , G01F1/692 , G01F1/698
摘要： The present invention provides a highly-sensitive thermal-type flow-rate sensor with enhanced reliability. Provided is a thermal-type flow-rate sensor including: a passage into which a measurement-target fluid is introduced; and a sensor element which is provided in the passage and which measures the flow rate of the measurement-target fluid. The sensor element 1 includes: a semiconductor substrate; a hollow portion formed in the semiconductor substrate; and a heating resistor formed on an electric insulating film above the hollow portion. The sensor element measures the flow rate of the measurement-target fluid by radiating heat from the heating resistor to the measurement-target fluid. When Lh is the length of the heating resistor in a direction perpendicular to a flowing direction of the measurement-target fluid and Wd is the shortest distance to an upstream-side edge of the heating resistor from an edge of the hollow portion (an outer peripheral edge of a diaphragm) in the flowing direction of the measurement-target fluid, Wd≧0.4×Lh is satisfied in a relation between Lh and Wd.
摘要翻译：本发明提供了一种具有增强的可靠性的高灵敏度热式流量传感器。本发明提供一种热式流量传感器，包括：导入测定对象流体的通道; 以及传感器元件，其设置在通道内并测量测量对象流体的流量。传感器元件1包括：半导体衬底; 形成在半导体衬底中的中空部分; 以及形成在中空部分上方的电绝缘膜上的加热电阻器。传感器元件通过从加热电阻器向测量目标流体辐射热量来测量测量目标流体的流量。当Lh是与测量对象流体的流动方向垂直的方向上的加热电阻器的长度，Wd是从中空部分的边缘到加热电阻器的上游侧边缘的最短距离（外周边在测量目标流体的流动方向上，隔膜的边缘）在Lh和Wd之间的关系中满足Wd≥0.4×Lh。

50. 发明授权

US07775104B2 Thermal flowmeter in which relationship among length of heat resistor, heating temperature for the heat resistor, and power supplied to the heat resistor is prescribed 有权
标题翻译：规定热电阻器的长度，热电阻的加热温度和供给到热电阻器的功率之间的关系的热流量计
公开(公告)号：US07775104B2
公开(公告)日：2010-08-17
申请号：US12020025
申请日：2008-01-25
申请人： Hiroshi Nakano , Masahiro Matsumoto , Keiji Hanzawa
发明人： Hiroshi Nakano , Masahiro Matsumoto , Keiji Hanzawa
IPC分类号： G01F1/68
CPC分类号： G01F1/6845 , G01F1/688
摘要： To reduce power consumption by a thermal flowmeter while good flow-rate detection sensitivity is maintained, it is only necessary to reduce power consumption by a heat resistor under predetermined conditions. Specifically, provided that a width Wh of the heat resistor is between 100 micrometers and 400 micrometers inclusive (100≦Wh≦400), it is only necessary that a relationship among the length Lh of the heat resistor, a temperature increase ΔTh for the heat resistor, and a maximum permissible power Phmax to be supplied to the heat resistor be set so as to satisfy a formula 1.4≦ΔTh·Lh/Ph max≦2.8 in order to maintain good flow-rate detection sensitivity. Accordingly, the length of the heat resistor and the temperature increase in the heat resistor are set so that the maximum power consumption can be reduced within a range in which the formula is satisfied.
摘要翻译：为了在保持良好的流量检测灵敏度的同时通过热式流量计降低功耗，仅需要在预定条件下降低热电阻器的功耗。具体而言，只要热电阻器的宽度Wh为100微米至400微米（100＆lt; 1; Wh＆nlE; 400），则仅需要将热电阻器的长度Lh，温度升高＆Dgr; Th之间的关系为了保持良好的流量检测灵敏度，要设置供热电阻器的最大允许功率Phmax以满足公式1.4＆nlE;＆Dgr; Th·Lh / Ph max＆nlE; 2.8。因此，热电阻器的长度和热电阻器的温度上升被设定为能够在满足公式的范围内降低最大功耗。

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