会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 41. 发明申请
    • Encoder-equipped sealing device
    • US20060273523A1
    • 2006-12-07
    • US11500402
    • 2006-08-08
    • Hironori Yamamoto
    • Hironori Yamamoto
    • F16J9/00
    • F16J15/326F16C33/7883F16C41/007
    • An encoder-equipped sealing device, that is, a sealing device that has an encoder incorporated therein is disclosed, which comprises a combination of seal elements, each of which includes an annular metal core having a substantially L-shaped cross section and including a cylindrical portion and a flange portion provided on one end of the cylindrical portion and extending in a direction perpendicular to a direction in which the cylindrical portion extends. One seal element, of the two seal elements, and the other seal element are combined such that a space defined by the cylindrical portion and flange portion of the one seal element, and a space defined by the cylindrical portion and flange portion of the other seal element, face opposite each other, wherein the one seal element further includes an elastic seal portion provided on the flange portion and arranged in the space defined by the cylindrical portion and flange portion, and the other seal element further includes a magnet-based encoder provided on the flange portion. The one seal element further includes a projecting portion on an end of the cylindrical portion on a side on which the flange portion is located and extending beyond a side of the flange portion opposite a side on which the seal portion is located and in a direction in which the cylindrical portion extends.
    • 48. 发明授权
    • Exposure apparatus
    • 曝光装置
    • US4749867A
    • 1988-06-07
    • US856221
    • 1986-04-28
    • Koichi MatsushitaJunji IsohataHironori YamamotoMakoto MiyazakiKunitaka OzawaHideki Yoshinari
    • Koichi MatsushitaJunji IsohataHironori YamamotoMakoto MiyazakiKunitaka OzawaHideki Yoshinari
    • G03F7/20G01B11/26
    • G03F7/70691G03F7/70358
    • An exposure apparatus for exposing in a step-and-scan manner a plate-like member to a pattern with radiation so that images of the pattern are transferred onto different regions on the plate-like member. The apparatus includes a mirror imaging optical system for projecting the image of the pattern onto the plate-like member, a carriage for scanningly moving, at the time of exposure, the plate-like member relative to the mirror imaging system, and a stage movably mounted on the carriage for step-feeding the plate-like member at the time of non-exposure so as to sequentially place the different regions of the plate-like member at an exposure station under the mirror imaging system. A locking system is provided to lock the stage relative to the carriage by use of vacuum, at the time of exposure, whereby unwanted displacement of the plate-like member relative to the carriage at the time of scanning exposure is prevented. Also, any positional deviation which may be caused by the locking of the stage is compensated for, by controlling supply of air pressure to linear air-bearings supporting the carriage.
    • 一种用于以逐步扫描的方式将板状构件暴露于具有辐射的图案的曝光装置,使得图案的图像转印到板状构件上的不同区域上。 该装置包括:镜像成像光学系统,用于将图案的图像投影到板状构件上;滑架,用于在曝光时相对于镜像成像系统扫描地移动板状构件;以及可移动的台 安装在滑架上,用于在不曝光时对板状构件进行步进供给,以便将板状构件的不同区域依次放置在镜像摄像系统下的曝光站。 提供锁定系统以在曝光时通过使用真空来相对于托架锁定台架,由此防止了在扫描曝光时板状构件相对于托架的不期望的移动。 此外,通过控制对支撑滑架的线性空气轴承的空气压力的供给来补偿可能由级的锁定引起的任何位置偏差。
    • 49. 发明授权
    • Exposure apparatus
    • 曝光装置
    • US4748477A
    • 1988-05-31
    • US856222
    • 1986-04-28
    • Junji IsohataKoichi MatsushitaHironori YamamotoMakoto MiyazakiKunitaka OzawaHideki Yoshinari
    • Junji IsohataKoichi MatsushitaHironori YamamotoMakoto MiyazakiKunitaka OzawaHideki Yoshinari
    • G03F7/20G03B27/42G03B27/53
    • G03F7/70691
    • An exposure apparatus for exposing in a step-and-scan manner a plate-like member to a pattern with radiation so that images of the pattern are transferred onto different regions on the plate-like member. The exposure apparatus includes a mirror imaging optical system for projecting the image of the pattern onto the plate-like member. Also, the exposure apparatus includes a carriage for scanningly moving, at the time of exposure, the plate-like member relative to the mirror imaging optical system and a stage for step-feeding the plate-like member at the time of non-exposure so as to sequentially place the different regions of the plate-like member at an exposure station under the mirror imaging system. The stage is mounted on the carriage, and the movement of the carriage is guided by linear air-bearings. The apparatus is arranged such that inclination of the carriage relative to the mirror imaging system to be caused by the movement of the stage is corrected by controlling the amount of air supply to the linear air-bearings, whereby occurrence of shift between the images to be transferred onto the plate-like member is prevented regardless of the change in position of the stage relative to the carriage. In another aspect, the amount of movement of the stage is corrected in accordance the amount of image shift which otherwise may be caused, whereby occurrence of such image shift is prevented.
    • 一种用于以逐步扫描的方式将板状构件暴露于具有辐射的图案的曝光装置,使得图案的图像转印到板状构件上的不同区域上。 曝光装置包括用于将图案的图像投影到板状构件上的镜像成像光学系统。 此外,曝光装置还包括在曝光时相对于镜面成像光学系统在板状部件上进行扫描移动的台架,以及在不曝光时使板状部件逐步进给的台阶 以将该板状构件的不同区域依次放置在镜像摄像系统下方的曝光站。 台架安装在滑架上,滑架的运动由线性空气轴承引导。 该装置被布置成使得通过控制对线性空气轴承的空气供应量来校正由台架的运动引起的托架相对于镜像成像系统的倾斜,由此在图像之间发生偏移 不管台架相对于托架的位置的变化如何,都能够防止转印到板状构件上。 在另一方面,根据否则可能引起的图像偏移量校正舞台的移动量,从而防止了这种图像偏移的发生。