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    • 41. 发明申请
    • Magnet Rotor, Movable Magnet-Type Instrument With The Magnet Rotor, And Stepping Motor With The Magnet Rotor
    • 磁铁转子,带磁铁转子的可移动磁铁式仪器,带磁铁转子的步进电机
    • US20080100173A1
    • 2008-05-01
    • US11661395
    • 2005-08-01
    • Takahiro KomagataHideki SatoToru Hasegawa
    • Takahiro KomagataHideki SatoToru Hasegawa
    • H02K1/22H02K37/14H02K1/28
    • H02K37/16H02K1/2733H02K7/116
    • A magnet rotor in which rotation prevention and positional displacement (rattling, and misalignment of axes) between a magnet and a rotor body can be restricted, a movable magnet type-instrument with the magnet rotor, and a stepping motor with the magnet rotor. In the magnet rotor, projections (11) and recesses (12) arranged with predetermined intervals and formed in a substantially rectangular shape are provided on the inner wall of a hollow section of an annular magnet (10). Rising side wall sections (11A) defined by the projections (11) are radially directed with the position of the axis (G) of the magnet rotor (R) as the standard. In the rotor body (20), rotation prevention sections (21) for preventing relative rotation between the rotor body (20) and the annular magnet (10) are formed by placing a plastic material along the shapes of the projections (11) and the recesses (12).
    • 可以限制磁体和转子体之间的旋转防止和位置偏移(轴的偏移和不对准)的磁体转子,具有磁体转子的可动磁体式仪器和具有磁体转子的步进电动机。 在磁铁转子中,在环形磁铁(10)的中空部分的内壁上设有以预定间隔布置并形成为大致矩形形状的突起(11)和凹槽(12)。 由突起(11)限定的上升侧壁部分(11A)以磁铁转子(R)的轴线(G)的位置为标准径向。 在转子体(20)中,通过沿着突起(11)的形状放置塑料材料,形成用于防止转子体(20)与环状磁体(10)之间的相对旋转的防旋转部(21) 凹槽(12)。
    • 42. 发明申请
    • Method For Evaluating Semiconductor Wafer And Apparatus For Evaluating Semiconductor Wafer
    • 用于评估半导体晶片的方法和用于评估半导体晶片的装置
    • US20070279080A1
    • 2007-12-06
    • US11661276
    • 2005-09-12
    • Tsuyoshi OhtsukiHideki Sato
    • Tsuyoshi OhtsukiHideki Sato
    • G01R31/26
    • G01R31/2889H01L22/14
    • The present invention is a method for evaluating a semiconductor wafer by measuring an electric characteristic of the semiconductor wafer by using a mercury electrode, wherein when the semiconductor wafer is held on a wafer chuck that the mercury electrode is formed in a holding surface of so that a side of a surface to be measured of the semiconductor wafer is set to a side of the wafer chuck, the semiconductor wafer is held on the wafer chuck whose diameter forming an outermost periphery of the holding surface is smaller than a diameter forming an outermost periphery of the surface to be measured of the semiconductor wafer, and then, the electric characteristic is measured by contacting the mercury electrode with the surface to be measured of the wafer, and an evaluation apparatus. Thereby, there can be provided an evaluation method and an evaluation apparatus for a semiconductor wafer by which when the semiconductor wafer is evaluated by measuring an electric characteristic thereof by using a mercury electrode, the semiconductor wafer can be high-precisely and effectively evaluated by setting a size of a holding surface of a wafer chuck to be smaller than that of a surface to be measured of the semiconductor wafer that is an object to be measured.
    • 本发明是一种通过使用水银电极测量半导体晶片的电特性来评估半导体晶片的方法,其中当将半导体晶片保持在晶片卡盘上时,将汞电极形成在保持表面上,使得 将半导体晶片的待测表面的一侧设置在晶片卡盘的一侧,将半导体晶片保持在形成保持表面的最外周的直径小于形成最外周的直径的晶片卡盘上 的半导体晶片的待测表面,然后通过使水银电极与晶片的待测表面接触来测量电特性,以及评估装置。 因此,可以提供一种用于半导体晶片的评估方法和评估装置,当通过使用汞电极测量半导体晶片的电特性来评估半导体晶片时,可以通过设置高精度有效地评估半导体晶片 晶片卡盘的保持表面的尺寸要小于作为被测量对象的半导体晶片的待测量表面的尺寸。
    • 43. 发明申请
    • Method For Evaluating Crystal Defects Of Silicon Wafer
    • 评估硅晶片缺陷的方法
    • US20070204789A1
    • 2007-09-06
    • US10594458
    • 2005-03-11
    • Hideki Sato
    • Hideki Sato
    • C30B15/00C30B23/00
    • G01N1/32H01L21/30604
    • A method for evaluating crystal defects of a silicon wafer comprising: etching a surface of the silicon wafer by immersing the wafer in an etching solution; and observing etch pits formed on the etched surface of the wafer, wherein the silicon wafer of which crystal defects are evaluated has low electrical resistivity of 1 Ω·cm or less, and the etching solution is a mixture of hydrofluoric acid, nitric acid, acetic acid and water further including iodine or iodide, in which a volume ratio of nitric acid in the etching solution is the largest among volume ratios of hydrofluoric acid, nitric acid, acetic acid and water, and the etching solution is adjusted to have an etching rate of 100 nm/min or less for the silicon wafer. Thereby, there is provided a method for evaluating crystal defects of a silicon wafer with low electrical resistivity by using a chromium-free etching solution without toxic chromium with high capability of detecting defects.
    • 一种用于评估硅晶片的晶体缺陷的方法,包括:通过将晶片浸入蚀刻溶液中来蚀刻硅晶片的表面; 并且观察在晶片的蚀刻表面上形成的蚀刻凹坑,其中评估晶体缺陷的硅晶片具有低于1Ω·cm或更小的电阻率,并且蚀刻溶液是氢氟酸,硝酸,乙酸的混合物 另外还含有碘或碘化物的酸和水,其中蚀刻溶液中的硝酸的体积比在氢氟酸,硝酸,乙酸和水的体积比中最大,并且蚀刻溶液被调节为具有蚀刻速率 对于硅晶片为100nm / min以下。 因此,提供了一种通过使用无铬铬的无铬蚀刻溶液来评价具有低电阻率的硅晶片的晶体缺陷的方法,所述无铬蚀刻溶液具有高检测缺陷的能力。
    • 45. 发明授权
    • Apparatus and method for detecting azimuth and inclination angle, program for detecting the same, and portable terminal device for detecting the same
    • 用于检测方位和倾斜角的装置和方法,用于检测方位和程序,以及用于检测方法的便携式终端装置
    • US07210235B2
    • 2007-05-01
    • US11479970
    • 2006-06-30
    • Hideki Sato
    • Hideki Sato
    • G01C17/02
    • G01C17/38G01C21/20
    • In an azimuth/inclination-angle detection apparatus, a measurement data obtaining unit obtains first and second measurement data sets g and h from acceleration and magnetic sensors, respectively. A first computation unit calculates an azimuth α0, an elevation angle β0, and a geomagnetism depression angle θ0 from the measurement data sets g and h. An averaging unit accumulates and averages the geomagnetism depression angle θ0 so as to obtain a value to be used as a geomagnetism depression angle θ. A second computation unit calculates an azimuth α and an elevation angle β from the second measurement data set h and the geomagnetism depression angle θ. When a plurality of solutions exist, they are stored as candidates (α1, β1) and (α2, β2). A selection unit selects a detection value (α, β) from the candidates (α1, β1) and (α2, β2) with reference to the above-described values α0 and β0 serving as reference values.
    • 在方位角/倾斜角检测装置中,测量数据获取单元分别从加速度和磁性传感器获得第一和第二测量数据集g和h。 第一计算单元从测量数据集g和h计算方位α0,仰角β0和地磁抑制角θ0。 平均单元积累并平均地磁俯角θ0,以获得要用作地磁俯角θ的值。 第二计算单元计算来自第二测量数据集h和地磁俯角θ的方位角α和仰角β。 当存在多个解决方案时,它们被存储为候选(α1,β1)和(α2,β2)。 选择单元参照作为参考值的上述值α0和β0从候选(α1,β1)和(α2,β2)中选择检测值(α,β)。
    • 46. 发明授权
    • Portable electronic apparatus with azimuth measuring function, magnetic sensor suitable for the apparatus, and azimuth measuring method for the apparatus
    • 具有方位测量功能的便携式电子设备,适用于该设备的磁性传感器,以及该装置的方位测量方法
    • US07197343B2
    • 2007-03-27
    • US10190525
    • 2002-07-09
    • Hideki Sato
    • Hideki Sato
    • H04M1/00
    • H04M1/21G01C17/28G01C17/38H04M1/72522H04M2250/12
    • A portable phone has a CPU and a magnetic sensor unit including an X-axis magnetic sensor, a Y-axis magnetic sensor, and a temperature sensor. CPU measures at first and second temperatures the influence of a magnetic field of permanent magnets upon an output Sx of the X-axis magnetic sensor and an output Sy of the Y-axis magnetic sensor, and stores the influence data together with the first and second temperature data. CPU estimates at the present temperature the influence upon the output Sx of the X-axis magnetic sensor and the output Sy of the Y-axis magnetic sensor, from the present temperature detected with the temperature sensor and the stored influence data. CPU corrects the outputs Sx and Sy in accordance with the estimated influence and determines the direction of the portable phone from the corrected outputs Sx and Sy.
    • 便携式电话具有包括X轴磁传感器,Y轴磁传感器和温度传感器的CPU和磁传感器单元。 CPU在第一和第二温度下测量永磁体的磁场对X轴磁传感器的输出Sx和Y轴磁传感器的输出Sy的影响,并将影响数据与第一和第二 温度数据。 CPU在当前温度下,从根据温度传感器检测到的当前温度和存储的影响数据对X轴磁传感器的输出Sx和Y轴磁传感器的输出Sy的影响。 CPU根据估计的影响来校正输出Sx和Sy,并根据校正的输出Sx和Sy确定便携式电话的方向。
    • 49. 发明申请
    • Portable terminal apparatus with auto caliblation of orientation measurement
    • 便携式终端设备,具有方向测量的自动校准
    • US20060185182A1
    • 2006-08-24
    • US11359485
    • 2006-02-23
    • Hideki Sato
    • Hideki Sato
    • G01C17/38
    • G01C17/38
    • A portable terminal apparatus is mounted in a casing and has a magnetic sensor that detects a magnetic field around the casing with an offset and outputs magnetic data representing the detected magnetic field, and a tilt sensor that detects a tilt of the casing and sequentially outputs tilt data representing the detected tilt. In the portable terminal apparatus, a capture part sequentially captures the magnetic data from the magnetic sensor at a given time interval. A calculation part calculates the offset of the magnetic sensor based on a plurality of the magnetic data sequentially captured by the capture part. A detection part detects an orientation variation of the casing based on the tilt data sequentially outputted from the tilt sensor. A change part changes the time interval for sequentially capturing the magnetic data in accordance with the detected orientation variation.
    • 便携式终端装置安装在壳体中并具有磁传感器,该磁传感器利用偏移检测壳体周围的磁场并输出表示检测到的磁场的磁数据;以及倾斜传感器,其检测壳体的倾斜并依次输出倾斜 表示检测到的倾斜的数据。 在便携式终端装置中,捕捉部件以给定的时间间隔顺序地捕获来自磁传感器的磁数据。 计算部分基于由捕获部分顺序捕获的多个磁数据来计算磁传感器的偏移。 检测部根据从倾斜传感器依次输出的倾斜数据来检测壳体的朝向变化。 改变部分根据检测到的取向变化改变顺序地捕获磁数据的时间间隔。