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    • 41. 发明申请
    • SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
    • 半导体器件及其制造方法
    • US20070296016A1
    • 2007-12-27
    • US11769423
    • 2007-06-27
    • Hajime NaganoTakeo Furuhata
    • Hajime NaganoTakeo Furuhata
    • H01L29/76H01L21/8234
    • H01L27/115H01L27/11521
    • A semiconductor device including a semiconductor substrate; an element isolation region having a trench filled with an insulating film defined or the semiconductor substrate; a memory cell transistor formed in an element forming region isolated by the element isolating regions of the semiconductor substrate; and the memory cell transistor includes a gate insulating film formed on a surface of the element forming region; a floating gate formed over the gate insulating film; an inter-gate insulating film formed integrally so as to cover the floating gate and the insulating film of the element isolation region and having high dielectric constant in a portion corresponding to the floating gate and low dielectric constant in a portion corresponding to the insulating film of the element isolation region; and a control gate stacked over the floating gate via the inter-gate insulating film.
    • 一种半导体器件,包括半导体衬底; 元件隔离区域,其具有填充有限定的绝缘膜的沟槽或半导体衬底; 形成在由所述半导体衬底的元件隔离区隔离的元件形成区域中的存储单元晶体管; 并且所述存储单元晶体管包括形成在所述元件形成区域的表面上的栅极绝缘膜; 形成在栅绝缘膜上的浮栅; 一体地形成栅绝缘膜,以覆盖元件隔离区域的浮栅和绝缘膜,并且在对应于浮栅的部分和低介电常数的部分中具有高介电常数 元件隔离区; 以及通过栅极间绝缘膜堆叠在浮置栅极上的控制栅极。
    • 44. 发明授权
    • Wireless communication terminal, transmission control method, and computer program
    • 无线通信终端,传输控制方法和计算机程序
    • US07561859B2
    • 2009-07-14
    • US11536511
    • 2006-09-28
    • Hajime Nagano
    • Hajime Nagano
    • H04B1/04
    • G06F1/206
    • A wireless communication terminal includes a transmitting unit transmitting data to a wireless base station, a temperature detecting unit detecting a terminal temperature of the inside of the wireless communication terminal, a transmission power detecting unit detecting a transmission power, a memory unit storing plural sets of terminal temperature variation information, and a control unit changing the transmission power based on a state of communication with a wireless base station. The control unit selects and reads one of the plural sets of terminal temperature variation information from a memory unit, based on an ambient temperature, a transmission power, and a changed one of predetermined transmission powers. The control unit controls the transmission state of the data based on the selected one of the plural sets of terminal temperature variation information, so as to prevent the terminal temperature from increasing over an upper limit of a predetermined operation guarantee temperature range.
    • 无线通信终端包括向无线基站发送数据的发送单元,检测无线通信终端内部的终端温度的温度检测单元,检测发送功率的发送功率检测单元,存储多个 端子温度变化信息,以及控制单元,基于与无线基站的通信状态来改变发送功率。 控制单元基于环境温度,发送功率和预定发送功率的改变中的一个,从存储单元中选择并读取多组终端温度变化信息中的一组。 控制单元基于所选择的多组终端温度变化信息来控制数据的传输状态,以防止终端温度超过预定操作保证温度范围的上限。
    • 45. 发明申请
    • NONVOLATILE SEMICONDUCTOR MEMORY DEVICE AND METHOD OF MANUFACTURING THE SAME
    • 非易失性半导体存储器件及其制造方法
    • US20080211006A1
    • 2008-09-04
    • US11965297
    • 2007-12-27
    • Tomoharu HASHIGUCHIHajime Nagano
    • Tomoharu HASHIGUCHIHajime Nagano
    • H01L27/115H01L21/28
    • H01L27/115H01L27/11521H01L27/11524
    • A nonvolatile semiconductor memory including a semiconductor substrate having an upper surface; a plurality of memory cell transistors formed in the semiconductor substrate, each memory cell transistor including a gate electrode having a gate insulating layer on the upper surface of the semiconductor substrate, a floating gate electrode layer on the gate insulating layer, an inter-gate insulating layer on the floating gate electrode layer, and a control gate electrode layer on the inter-gate insulating layer; a first oxide-based insulating film formed above the upper surface of the semiconductor substrate between the gate electrodes, and including an upper surface as high or higher than that of the floating gate electrode layer but lower than that of the control gate electrode layer; a nitride-based insulating film containing boron formed on the first oxide-based insulating film and the control gate layer; and a second oxide-based insulating film formed on the nitride-based insulating film.
    • 一种非易失性半导体存储器,包括具有上表面的半导体衬底; 形成在半导体衬底中的多个存储单元晶体管,每个存储单元晶体管包括在半导体衬底的上表面上具有栅极绝缘层的栅极电极,栅极绝缘层上的浮置栅极电极层,栅极间绝缘层 在栅极绝缘层上的控制栅极电极层, 第一氧化物基绝缘膜,形成在栅电极之间的半导体衬底的上表面上方,并且包括高于浮栅电极层的上表面或高于控制栅电极层的上表面的上表面; 含有形成在第一氧化物系绝缘膜和控制栅极层上的硼的氮化物系绝缘膜; 以及形成在所述氮化物系绝缘膜上的第二氧化物系绝缘膜。
    • 47. 发明申请
    • Method of manufacturing a semiconductor device
    • 制造半导体器件的方法
    • US20060270246A1
    • 2006-11-30
    • US11414359
    • 2006-05-01
    • Hajime Nagano
    • Hajime Nagano
    • H01L21/31
    • C23C16/481C23C16/52C23C16/54H01L22/12
    • A method of manufacturing a semiconductor device, includes preparing a film formation system including a film formation furnace and a heater heating a work piece placed in the furnace via a furnace wall of the furnace, acquiring a correlation between a first information value relevant to a thickness of a deposition film deposited using the film formation system and a second information value based on an adhesion film adhered to the furnace wall with respect to each kind of deposition film, adjusting a deposition condition of a deposition film to be deposited on a work piece based on the correlation, and depositing a deposition film on a work piece under the adjusted deposition condition.
    • 一种制造半导体器件的方法,包括制备成膜系统,其包括成膜炉和加热通过炉的炉壁放置在炉中的工件的加热器,获得与厚度相关的第一信息值之间的相关性 使用成膜系统沉积的沉积膜和相对于每种沉积膜粘附到炉壁上的粘合膜的第二信息值,调整沉积在工件上的沉积膜的沉积条件 并且在调整后的沉积条件下将沉积膜沉积在工件上。